High speed semiconductor chip stack

• US 10,504,843 B2
• Filed: 05/02/2018
• Issued: 12/10/2019
• Est. Priority Date: 05/02/2017
• Status: Active Grant

• Current Assignee: L. Pierre De Rochemont
• Original Assignee: L. Pierre De Rochemont
• Inventors: de Rochemont, L. Pierre
• Primary Examiner(s): Sefer, Ahmed N
• Application Number:
  US15/969,234
• Publication Number:
  US 20180358295A1
• Time in Patent Office: 587 Days
• CPC Class Codes: H01G 4/1209 characterised by the ceramic dielectric material H01G4/1272, H01G4/1281 take precedence
• CPC Class Codes: H01G 4/1272 Semiconductive ceramic capacitors
• CPC Class Codes: H01G 4/30 Stacked capacitors H01G4/33 takes precedence
• CPC Class Codes: H01G 4/33 Thin- or thick-film capacitors thin- or thick-film circuits H01L27/00; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor H01L28/40
• CPC Class Codes: H01L 2223/6655 Matching arrangements, e.g. arrangement of inductive and capacitive components
• CPC Class Codes: H01L 2223/6666 for decoupling, e.g. bypass capacitors
• CPC Class Codes: H01L 2223/6677 for antenna, e.g. antenna included within housing of semiconductor device
• CPC Class Codes: H01L 23/5329 Insulating materials
• CPC Class Codes: H01L 23/642 Capacitive arrangements H01L23/49589, H01L23/645, H01L23/647, H01L23/66 take precedence; capacitive effects between wiring layers on the semiconductor body H01L23/5222
• CPC Class Codes: H01L 23/66 High-frequency adaptations
• CPC Class Codes: H01L 25/0657 Stacked arrangements of devices
• CPC Class Codes: H01L 28/10 Inductors
• CPC Class Codes: H01L 28/20 Resistors

Abstract

The present invention ultra-low loss high energy density dielectric layers having femtosecond (10⁻¹⁵ sec) polarization response times within a chip stack assembly to extend impedance-matched electrical lengths and mitigate ringing within the chip stack to bring the operational clock speed of the stacked system closer to the intrinsic clock speed(s) of the semiconductor die bonded within chip stack.

Claims

1. A high-speed semiconductor chip stack forming an electrical circuit comprising one or more physical layers of perovskite electroceramic that functions as a capacitive dielectric material and said one or more physical layers are integrated as part of at least one surface feature on a semiconductor die or an interposer embedded within the high speed semiconductor chip stack wherein the perovskite electroceramic forming said capacitive dielectric material further comprises a uniform distribution of ceramic grains with a grain size diameter less than 50 nm such that orbital deformations constitute the sole mechanism contributing to the dielectric polarization within said capacitive dielectric material,

wherein the perovskite electroceramic has a composition doped with ≤

0.05 mol % of silicon dioxide that forms electrically insulating metal oxide phases at nanoscale grain boundaries within the perovskite electroceramic to neutralize the formation of internal conductive pathways and dissipation currents within the capacitive dielectric material.

2. The high-speed semiconductor chip stack of claim 1, wherein the capacitive dielectric material has dielectric polarization rates measured on femto-second time scales.

3. The high-speed semiconductor chip stack of claim 1, wherein the perovskite electroceramic has a relative permittivity ε

_R≤

70.

4. The high-speed semiconductor chip stack of claim 3, wherein the capacitive dielectric material has a relative permittivity, ε

_R, in the range of 200≤

ε

_R≤

800.

5. The high-speed semiconductor chip stack of claim 1, wherein the capacitive dielectric material comprises a thermodynamically stable perovskite electroceramic.

6. The high-speed semiconductor chip stack of claim 5, wherein the thermodynamically stable perovskite electroceramic may comprise titanate, zirconate, hafnate, niobate, or tantalate electroceramic, or admixture thereof.

7. The high-speed semiconductor chip stack of claim 6, wherein thermodynamically stable perovskite electroceramic comprises an admixture of three (3) or more elements from the group comprising:

scandium (Sc), titanium (Ti), vanadium (V), chromium (Cr), manganese (Mn), zinc (Zn), zirconium (Zr), niobium (Nb), molybdenum (Mo), hafnium (Hf), tantalum (Ta), tungsten (W), lanthanum (La), cerium (Ce), praseodymium (Pr), neodymium (Nd), samarium (Sm), europium (Eu), gadolinium (Gd), terbium (Tb), dionysium (Dy), holomium (Ho), ytterbium (Yb), indium (In), tin (Sn), lead (Pb), or bismuth (Bi).

8. The high-speed semiconductor chip stack of claim 3, wherein the perovskite electroceramic has a crystal lattice with an average atomic mass unit (amu) that is greater than 25.

9. The high-speed semiconductor chip stack of claim 8, wherein the crystal lattice has an average atomic mass unit (amu) that is greater than 50.

10. The high-speed semiconductor chip stack of claim 1, wherein the surface feature is deployed to terminate an electrical discontinuity in the electrical circuit.

11. The high-speed semiconductor chip stack of claim 10, wherein the surface feature is deployed along a transmission line.

12. The high-speed semiconductor chip stack of claim 11, wherein the surface feature and transmission line are deployed on a semiconductor die.

13. The high-speed semiconductor ship stack of claim 11, wherein the surface feature and transmission line are deployed on an interposer.

14. The high-speed semiconductor chip stack of claim 10, wherein the surface feature is deployed at a via.

15. The high-speed semiconductor chip stack of claim 14, wherein the surface feature and the via are deployed on a semiconductor die.

16. The high-speed semiconductor chip stack of claim 14, wherein the surface feature and the via are deployed on an interposer.

17. A high-speed semiconductor chip stack forming an electrical circuit comprising one or more physical layers of perovskite electroceramic that functions as a capacitive dielectric material and said one or more physical layers are integrated as part of at least one surface feature on a semiconductor die or an interposer embedded within the high speed semiconductor chip stack wherein the perovskite electroceramic forming said capacitive dielectric material further comprise a uniform distribution of ceramic grains with a grain size diameter less than 50 nm such that orbital deformations constitute the sole mechanism contributing to the dielectric polarization within said capacitive dielectric material, wherein the at least one surface feature minimizes reflections of higher frequency harmonics of digital signal pulses such that an operational system clock speed of the high-speed semiconductor chip stack optimally matches a slowest clock speed of a semiconductor die embedded within the high speed semiconductor chip stack.

18. The high-speed semiconductor chip stack of claim 17, wherein the semiconductor die embedded within the high speed semiconductor chip stack perform an optical or electro-optical circuit function.

19. The high-speed semiconductor chip stack of claim 17, wherein the semiconductor die embedded within the high speed semiconductor chip stack is a component of a wireless transmitter, wireless receiver, or wireless transceiver circuit module.