Directional microphone and associated packing techniques
First Claim
1. A device, comprising:
- an acoustic sensor havinga first substrate, the first substrate including a first surface;
a sensing diaphragm mounted to the first surface and configured to sense sound pressure; and
a cavity below the sensing diaphragm;
a channel with an inlet open at an edge of the first substrate and an outlet connected with the cavity; and
a housing enclosing the acoustic sensor, the housing having a cover attached to a second substrate supporting the first substrate;
wherein the cover includes a first opening at least partially overlapping with the sensing diaphragm in a direction perpendicular to the first surface, and a second opening at a side of the cover, the second opening being disposed adjacent to the inlet of the channel.
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Accused Products
Abstract
Aspect of the disclosure provide a packaging technique for making a directional microphone which employs mechanical structures to cancel undesired background noise to realize the directional function instead of an extra sensor required in electronic noise-cancelling techniques, thus reducing footprint and cost of a directional microphone. A directional microphone based on this technique can include an acoustic sensor and a housing enclosing the acoustic sensor. The acoustic sensor can include a sensing diaphragm, a cavity below the sensing diaphragm, and a first substrate. The directional microphone device can further include a channel with an inlet open at an edge of the first substrate and an outlet connected with the cavity. The housing can include a cover attached to a second substrate supporting the first substrate. The cover can include a first opening over the sensing diaphragm and a second opening at a side of the cover.
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Citations
19 Claims
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1. A device, comprising:
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an acoustic sensor having a first substrate, the first substrate including a first surface; a sensing diaphragm mounted to the first surface and configured to sense sound pressure; and a cavity below the sensing diaphragm; a channel with an inlet open at an edge of the first substrate and an outlet connected with the cavity; and a housing enclosing the acoustic sensor, the housing having a cover attached to a second substrate supporting the first substrate; wherein the cover includes a first opening at least partially overlapping with the sensing diaphragm in a direction perpendicular to the first surface, and a second opening at a side of the cover, the second opening being disposed adjacent to the inlet of the channel. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification