Low temperature film for PCRAM sidewall protection

• US 10,510,951 B1
• Filed: 11/14/2018
• Issued: 12/17/2019
• Est. Priority Date: 10/24/2018
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Yu, Shao-Ming, Wu, Jau-Yi
• Primary Examiner(s): Lee, Cheung
• Application Number:
  US16/190,702
• Time in Patent Office: 398 Days
• CPC Class Codes: H10B 63/30 comprising selection components having three or more electrodes, e.g. transistors
• CPC Class Codes: H10B 63/80 Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
• CPC Class Codes: H10N 70/021 Formation of the switching material, e.g. layer deposition
• CPC Class Codes: H10N 70/041 Modification of the switching material, e.g. post-treatment, doping
• CPC Class Codes: H10N 70/063 by etching of pre-deposited switching material layers, e.g. lithography
• CPC Class Codes: H10N 70/231 based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
• CPC Class Codes: H10N 70/801 Constructional details of multistable switching devices
• CPC Class Codes: H10N 70/826 adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
• CPC Class Codes: H10N 70/828 Current flow limiting means within the switching material region, e.g. constrictions
• CPC Class Codes: H10N 70/841 Electrodes
• CPC Class Codes: H10N 70/8828 Tellurides, e.g. GeSbTe

Abstract

A method for forming a phase change random access memory (PCRAM) device is provided. The method includes: forming a memory stack over an insulator layer. A first etch process is performed to pattern the memory stack defining a memory cell including a top electrode overlying a dielectric layer. The dielectric layer includes a center region laterally between a first outer region and a second outer region. An etchant used in the first etch process creates a compound in the first and second outer regions, the compound has a first melting point temperature. A first deposition process is performed to form a first sidewall spacer over the memory cell, the first sidewall spacer is in direct contact with outer sidewalls of the memory cell. The first deposition process reaches a first maximum temperature less than the first melting point temperature.

Claims

1. A method for forming a phase change random access memory (PCRAM) device, the method comprising:

forming a memory stack over an insulator layer;

performing a first etch process to pattern the memory stack defining a memory cell, wherein the memory cell comprises a top electrode overlying a dielectric layer, wherein the dielectric layer comprises a center region laterally between a first outer region and a second outer region, wherein an etchant used in the first etch process creates a compound in the first and second outer regions, and wherein the compound has a first melting point temperature; and

performing a first deposition process to form a first sidewall spacer over the memory cell, wherein the first sidewall spacer is in direct contact with outer sidewalls of the memory cell, and wherein the first deposition process reaches a first maximum temperature less than the first melting point temperature.

2. The method of claim 1, wherein the dielectric layer is comprised of a first material, wherein the etchant comprises a halogen element such that the compound comprises the first material and the halogen element.

3. The method of claim 2, wherein the first material is germanium antimony tellurium (GeSbTe).

4. The method of claim 2, after the first deposition process the dielectric layer is a continuous uniform layer extending from a bottom surface of the top electrode to a top surface of the insulator layer.

5. The method of claim 2, wherein the first material has a second melting point temperature greater than the first melting point temperature.

6. The method of claim 1, further comprising:

performing a second deposition process to form a second sidewall spacer over the first sidewall spacer, wherein a second maximum temperature of the second deposition process is greater than the first maximum temperature.

7. The method of claim 6, wherein the second maximum temperature is approximately equal to or greater than the first melting point temperature.

8. The method of claim 6, further comprising:

performing a third deposition process to form an inter-level dielectric (ILD) layer over the second sidewall spacer, wherein a third maximum temperature of the third deposition process is greater than the second maximum temperature.

9. The method of claim 8, wherein the first melting point temperature is approximately 300 degrees Celsius, the first maximum temperature is approximately 250 degrees Celsius, the second maximum temperature is approximately 350 degrees Celsius, and the third maximum temperature is approximately 400 degrees Celsius.

10. A method for forming a memory device, the method comprising:

forming a memory cell stack over a via within an insulator layer;

performing a first patterning process on the memory cell stack to define a memory cell, the memory cell includes a top electrode overlying a phase change layer, wherein the phase change layer is comprised of a first material, wherein an etchant used during the first patterning process combines with the first material to form a compound in the phase change layer;

performing a first deposition process to form a first sidewall spacer around the memory cell, such that the first sidewall spacer directly contacts outer sidewalls of the memory cell, wherein the first deposition process reaches a first maximum temperature, wherein the first maximum temperature is less than a melting point temperature of the compound; and

performing a second deposition process to form a second sidewall spacer over the first sidewall spacer, wherein the second sidewall spacer extends continuously from an upper surface of the first sidewall spacer to an upper surface of the insulator layer, wherein the second deposition process reaches a second maximum temperature greater than the first maximum temperature.

11. The method of claim 10, further comprising:

performing a third deposition process to form an inter-metal dielectric (IMD) layer over the second sidewall spacer, wherein the third deposition process reaches a third maximum temperature greater than the second maximum temperature.

12. The method of claim 11, wherein the first maximum temperature is approximately 250 degrees Celsius, the second maximum temperature is approximately 350 degrees Celsius, and the third maximum temperature is approximately 400 degrees Celsius.

13. The method of claim 11, wherein after the third deposition process the phase change layer is a continuous layer absent of any voids.

14. The method of claim 10, wherein the first sidewall spacer prevents diffusion of a diffusive species out of the phase change layer.

15. The method of claim 14, wherein the diffusive species is a compound including group 17 elements.

16. The method of claim 10, wherein the top electrode is centered relative to the phase change layer, and wherein a maximum width of the phase change layer is greater than a maximum with of the top electrode.

17. A phase change random access memory (PCRAM) device comprising:

a memory cell over an insulator layer, the memory cell includes a top electrode overlying a phase change layer, wherein outer sidewalls of the top electrode are aligned with outer sidewalls of the phase change layer; and

a first sidewall spacer in contact with outer sidewalls of the memory cell;

wherein the phase change layer comprises a center region between a first outer region and a second outer region, wherein the center region comprises a first material, and wherein the first and second outer regions comprise a compound of the first material and a halogen element.

18. The PCRAM device of claim 17, wherein the first material is germanium antimony tellurium (GeSbTe).

19. The PCRAM device of claim 17, further comprising:

a second sidewall spacer overlying the first sidewall spacer and the insulator layer, wherein the second sidewall spacer extends continuously from an upper surface of the first sidewall spacer to an upper surface of the insulator layer, and wherein the first sidewall spacer comprises a second material and the second sidewall spacer comprises a third material different than the second material.

20. The PCRAM device of claim 17, wherein the phase change layer is a continuous layer extending between a lower surface of the top electrode to an upper surface of the insulator layer.