Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
First Claim
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1. An apparatus, comprising:
- an ultrasonic transducer substrate having a membrane, a bottom electrode, and a plurality of cavities disposed between the membrane and the bottom electrode, each of the plurality of cavities corresponding to an individual transducer cell;
wherein portions of the bottom electrode corresponding to each individual transducer cell are electrically isolated from one another; and
each portion of the bottom electrode corresponding to each individual transducer cell further comprising a first bottom electrode portion and a second bottom electrode portion, the first and second bottom electrode portions electrically isolated from one another;
first trench isolation regions disposed within the bottom electrode and configured to electrically isolate each individual transducer cell from one another; and
second trench isolation regions disposed within the bottom electrode and configured to electrically isolate the first and second bottom electrode portions of an individual transducer cell from one another;
the apparatus further comprising an electrical substrate bonded to the ultrasonic transducer substrate.
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Abstract
An ultrasonic transducer includes a membrane, a bottom electrode, and a plurality of cavities disposed between the membrane and the bottom electrode, each of the plurality of cavities corresponding to an individual transducer cell. Portions of the bottom electrode corresponding to each individual transducer cell are electrically isolated from one another. Each portion of the bottom electrode corresponds to each individual transducer that cell further includes a first bottom electrode portion and a second bottom electrode portion, the first and second bottom electrode portions electrically isolated from one another.
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Citations
6 Claims
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1. An apparatus, comprising:
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an ultrasonic transducer substrate having a membrane, a bottom electrode, and a plurality of cavities disposed between the membrane and the bottom electrode, each of the plurality of cavities corresponding to an individual transducer cell; wherein portions of the bottom electrode corresponding to each individual transducer cell are electrically isolated from one another; and each portion of the bottom electrode corresponding to each individual transducer cell further comprising a first bottom electrode portion and a second bottom electrode portion, the first and second bottom electrode portions electrically isolated from one another; first trench isolation regions disposed within the bottom electrode and configured to electrically isolate each individual transducer cell from one another; and second trench isolation regions disposed within the bottom electrode and configured to electrically isolate the first and second bottom electrode portions of an individual transducer cell from one another; the apparatus further comprising an electrical substrate bonded to the ultrasonic transducer substrate. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification