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Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber

  • US 10,514,167 B1
  • Filed: 04/19/2019
  • Issued: 12/24/2019
  • Est. Priority Date: 06/29/2018
  • Status: Active Grant
First Claim
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1. An apparatus for processing exhaust gases from a chamber for processing extreme ultraviolet radiation, the apparatus comprising:

  • a gas inlet configured to direct the exhaust gases from the chamber into a combustion zone, the combustion zone being configured to flamelessly ignite the exhaust gases;

    an air inlet configured to direct a mixture of air and a fuel into the combustion zone;

    a control valve configured to change a volume of fluid exhausted from the combustion zone; and

    a controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value.

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