Quad proof mass MEMS gyroscope with outer couplers and related methods
First Claim
1. A microelectromechanical systems (MEMS) gyroscope comprising:
- four proof masses coupled to a substrate, the four proof masses being disposed in respective quadrants of a plane and each configured to rotate relative to the substrate, a first proof mass of the four proof masses and a second proof mass of the four proof masses being configured to rotate in-phase;
at least one electrode configured to cause rotation of the first proof mass relative to the substrate;
a first outer coupler coupling the first and second proof masses of the four proof masses;
a second outer coupler coupling third and fourth proof masses of the four proof masses; and
a beam-shaped coupler intersecting a first imaginary axis connecting respective centers of the first and third proof masses to each other and further intersecting a second imaginary axis connecting respective centers of the second and fourth proof masses to each other, the beam-shaped coupler coupling the four proof masses with one another.
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Abstract
A two-axis microelectromechanical systems (MEMS) gyroscope having four proof masses disposed in respective quadrants of a plane is described. The quad proof mass gyroscope may comprise an inner coupler passing between a first and a third proof mass and between a second and a fourth proof mass, and coupling the four proof masses with one another. The quad proof mass gyroscope may further comprising a first outer coupler coupling the first and the second proof masses and a second outer coupler coupling the third and the fourth proof masses. The outer couplers may have masses configured to balance the center of masses of the four proof masses, and may have elastic constants matching the elastic constant of the inner coupler. The quad gyroscope may further comprise a plurality of sense capacitors configured to sense angular rates.
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Citations
19 Claims
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1. A microelectromechanical systems (MEMS) gyroscope comprising:
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four proof masses coupled to a substrate, the four proof masses being disposed in respective quadrants of a plane and each configured to rotate relative to the substrate, a first proof mass of the four proof masses and a second proof mass of the four proof masses being configured to rotate in-phase; at least one electrode configured to cause rotation of the first proof mass relative to the substrate; a first outer coupler coupling the first and second proof masses of the four proof masses; a second outer coupler coupling third and fourth proof masses of the four proof masses; and a beam-shaped coupler intersecting a first imaginary axis connecting respective centers of the first and third proof masses to each other and further intersecting a second imaginary axis connecting respective centers of the second and fourth proof masses to each other, the beam-shaped coupler coupling the four proof masses with one another. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A system comprising:
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four proof masses coupled to a substrate, the four proof masses being disposed in respective quadrants of a plane and each configured to rotate relative to the substrate within the plane about respective rotational axes, a first proof mass of the four proof masses and a second proof mass of the four proof masses being configured to resonate in-phase; at least one electrode configured to cause rotation of the first proof mass relative to the substrate; a first outer coupler coupling the first and second proof masses of the four proof masses; a second outer coupler coupling third and fourth proof masses of the four proof masses; an inner coupler passing between the first and third proof masses and between the second and fourth proof masses and coupling the four proof masses with one another, the inner coupler comprising a first beam connecting the first proof mass to the third proof mass, a second beam connecting the second proof mass to the fourth proof mass, and a third beam connecting the first beam to the second beam, the third beam intersecting a first imaginary axis connecting the respective rotational axes of the first and third proof masses to each other and the third beam further intersecting a second imaginary axis connecting the respective rotational axes of the second and fourth proof masses to each other; a sense electrode disposed on the substrate and forming a sense capacitor with a portion of the first proof mass; and sense circuitry coupled to the sense capacitor and configured to digitize angular rate data for at least one of the four proof masses. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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Specification