Quad proof mass MEMS gyroscope with outer couplers and related methods

• US 10,514,259 B2
• Filed: 08/31/2016
• Issued: 12/24/2019
• Est. Priority Date: 08/31/2016
• Status: Active Grant

• Current Assignee: Analog Devices, Inc.
• Original Assignee: Analog Devices, Inc.
• Inventors: Jia, Kemiao, Zhang, Xin, Zhang, Jianglong, Kuang, Jinbo
• Primary Examiner(s): Nguyen, Judy
• Assistant Examiner(s): Parco, Jr., Ruben C
• Application Number:
  US15/253,792
• Publication Number:
  US 20180058853A1
• Time in Patent Office: 1,210 Days
• Field of Search: None
• CPC Class Codes: G01C 19/5705 using masses driven in reciprocating rotary motion about an axis
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure

Abstract

A two-axis microelectromechanical systems (MEMS) gyroscope having four proof masses disposed in respective quadrants of a plane is described. The quad proof mass gyroscope may comprise an inner coupler passing between a first and a third proof mass and between a second and a fourth proof mass, and coupling the four proof masses with one another. The quad proof mass gyroscope may further comprising a first outer coupler coupling the first and the second proof masses and a second outer coupler coupling the third and the fourth proof masses. The outer couplers may have masses configured to balance the center of masses of the four proof masses, and may have elastic constants matching the elastic constant of the inner coupler. The quad gyroscope may further comprise a plurality of sense capacitors configured to sense angular rates.

Claims

1. A microelectromechanical systems (MEMS) gyroscope comprising:

four proof masses coupled to a substrate, the four proof masses being disposed in respective quadrants of a plane and each configured to rotate relative to the substrate, a first proof mass of the four proof masses and a second proof mass of the four proof masses being configured to rotate in-phase;

at least one electrode configured to cause rotation of the first proof mass relative to the substrate;

a first outer coupler coupling the first and second proof masses of the four proof masses;

a second outer coupler coupling third and fourth proof masses of the four proof masses; and

a beam-shaped coupler intersecting a first imaginary axis connecting respective centers of the first and third proof masses to each other and further intersecting a second imaginary axis connecting respective centers of the second and fourth proof masses to each other, the beam-shaped coupler coupling the four proof masses with one another.

2. The MEMS gyroscope of claim 1, wherein the third and fourth proof masses are configured to resonate in-phase.

3. The MEMS gyroscope of claim 2, wherein the first and third proof masses are configured to resonate out-of-phase.

4. The MEMS gyroscope of claim 1, wherein a third imaginary axis that connects the respective centers of the first proof mass and the second proof mass to each other is substantially perpendicular to the first imaginary axis.

5. The MEMS gyroscope of claim 1, wherein the first outer coupler and the second outer coupler are substantially parallel to one another.

6. The MEMS gyroscope of claim 1, further comprising a sense electrode disposed on the substrate and forming a sense capacitor with a portion of the first proof mass.

7. The MEMS gyroscope of claim 1, wherein the first outer coupler and the second outer coupler have approximately equal masses.

8. The MEMS gyroscope of claim 1, wherein each of the four proof masses is configured to rotate within the plane.

9. The MEMS gyroscope of claim 1, wherein the first and the second outer couplers are symmetrically disposed with respect to the beam-shaped coupler.

10. The system of claim 1, wherein the first proof mass is configured to, when driven to oscillate in the plane, tilt outside the plane in response to rotation of the MEMS gyroscope.

11. The system of claim 1, wherein the first proof mass is configured to, when driven to oscillate in the plane, tilt about a first axis lying on the plane in response to rotation of the MEMS gyroscope about a second axis lying on the plane, the second axis being perpendicular to the first axis.

12. The system of claim 10, wherein each of the rotational axes of the four proof masses is perpendicular to the plane.

13. A system comprising:

four proof masses coupled to a substrate, the four proof masses being disposed in respective quadrants of a plane and each configured to rotate relative to the substrate within the plane about respective rotational axes, a first proof mass of the four proof masses and a second proof mass of the four proof masses being configured to resonate in-phase;

at least one electrode configured to cause rotation of the first proof mass relative to the substrate;

a first outer coupler coupling the first and second proof masses of the four proof masses;

a second outer coupler coupling third and fourth proof masses of the four proof masses;

an inner coupler passing between the first and third proof masses and between the second and fourth proof masses and coupling the four proof masses with one another, the inner coupler comprising a first beam connecting the first proof mass to the third proof mass, a second beam connecting the second proof mass to the fourth proof mass, and a third beam connecting the first beam to the second beam, the third beam intersecting a first imaginary axis connecting the respective rotational axes of the first and third proof masses to each other and the third beam further intersecting a second imaginary axis connecting the respective rotational axes of the second and fourth proof masses to each other;

a sense electrode disposed on the substrate and forming a sense capacitor with a portion of the first proof mass; and

sense circuitry coupled to the sense capacitor and configured to digitize angular rate data for at least one of the four proof masses.

14. The system of claim 13, further comprising an I/O interface coupled to the sense circuitry and configured to transmit the digitized angular rate data to a monitoring station disposed external to the system.

15. The system of claim 13, further comprising a display coupled to the sense circuitry and configured to display an image corresponding to the digitized angular rate data.

16. The system of claim 13, wherein the third beam, the first outer coupler and the second outer coupler are substantially parallel to each other.

17. The system of claim 13, wherein the third and fourth proof masses are configured to resonate in-phase.

18. The system of claim 17, wherein the first and third proof masses are configured to resonate out-of-phase.

19. A device comprising the system of claim of 13 and a mechanical stabilizer coupled to the sense circuitry and configured to stabilize the device in response to the angular rate data.