Method and apparatus for optical waveguide-to-semiconductor coupling and optical vias for monolithically integrated electronic and photonic circuits

• US 10,514,509 B2
• Filed: 01/10/2014
• Issued: 12/24/2019
• Est. Priority Date: 01/10/2013
• Status: Active Grant

• Current Assignee: Massachusetts Institute of Technology, The Board of Regents of the University of Colorado (University of Colorado System)
• Original Assignee: The Board of Regents of the University of Colorado (University of Colorado System)
• Inventors: Popovic, Milos, Stojanovic, Vladimir Marko, Orcutt, Jason Scott
• Primary Examiner(s): Radkowski, Peter
• Application Number:
  US14/152,898
• Publication Number:
  US 20140193115A1
• Time in Patent Office: 2,174 Days
• Field of Search: 385 37, 385 11, 385129, 385131, 385 14, 372 5011, 250237 G
• CPC Class Codes: G02B 6/124 Geodesic lenses or integrated gratings
• CPC Class Codes: G02B 6/34 utilising prism or grating G02B6/293 takes precedence

Abstract

An optical coupler has a waveguide coupled to a grating of multiple scattering units, each scattering unit having a first scattering element formed of a shape in a polysilicon gate layer and a second scattering element formed of a shape in a body silicon layer of a metal-oxide-semiconductor (MOS) integrated circuit (IC). The couplers may be used in a system having a coupler on each of a first and second IC, infrared light being formed into a beam passing between the couplers. Vias may be interposed in third ICs between the first and second ICs. The couplers may be configured with nonuniform width of scattering elements to produce Gaussian or focused beams.

Claims

1. An optical out-of-plane coupler on a monolithically integrated metal-oxide-semiconductor (MOS) integrated circuit comprising:

a waveguide; and

a grating coupled to the waveguide, the grating comprising a plurality of scattering units,

each scattering unit further comprising;

a first scattering element formed of a first shape formed in a polysilicon gate layer of the integrated circuit, and

a second scattering element formed of a second shape formed in an active layer of the integrated circuit,

each shape having width smaller than two microns,

the polysilicon gate layer being also used to form gates of MOS transistors of the integrated circuit;

the waveguide being formed in a layer comprising a layer selected from the group consisting of the polysilicon gate layer and the active layer;

the first scattering element in each scattering unit having a first side (E1) disposed towards the waveguide and a second side (E2) disposed more distant from the waveguide than side E1;

the second scattering element in each scattering unit having a first side (E3) disposed towards the waveguide and a second side (E4) disposed more distant from the waveguide than side E3;

wherein sides E1 and E3 are offset along the in-plane propagation direction from the waveguide W to the grating;

wherein sides E2 and E4 are offset along the in-plane propagation direction from the waveguide to the grating;

wherein;

if side E1 is closer to the waveguide than side E3, then side E2 is closer to the waveguide than side E4 and light will be scattered with constructive interference out-of-plane toward the second scattering elements,

and if side E3 is closer to the waveguide than side E1, then side E4 is closer to the waveguide than side E2 and light will be scattered with constructive interference out-of-plane toward the first scattering elements; and

wherein a distance from E1 to E3 is less than a design wavelength of light, the design wavelength being less than 1650 nanometers;

and a distance measured in an axis perpendicular to a plane of the integrated circuit between the first and second scattering element being less than 500 nanometers.

2. The optical coupler of claim 1, the design wavelength of light being an infrared wavelength between 1100 and 1600 nanometers.

3. The optical coupler of claim 1 wherein the first scattering elements have nonuniform width and spacing and the second scattering elements have nonuniform width and spacing, the scattering elements having widths determined to produce a beam having a Gaussian intensity distribution.

10. The optical coupler of claim 1 wherein the first and second scattering element are spaced in the plane of the chip by a distance between 100 nanometers (nm) and 2000 nm, and normal to the plane of the chip by between 25 nm to 500 nm.

21. The optical coupler of claim 3, wherein:

at positions along the grating (in the propagation direction) where the width of first scattering elements increases from one element to the next in the propagation direction, the width of the second scattering elements increases from one element to the next; and

at positions along the grating (in the propagation direction) where the width of first scattering elements decreases from one element to the next in the propagation direction, the width of the second scattering elements decreases from one element to the next.

22. The optical coupler of claim 1 wherein:

The first and second scattering elements of each scatterer overlap in part, with at least part of a gap on the active layer lying under first shape.

4. An interlayer out-of-plane optical coupling system comprising:

a first integrated circuit having a first coupler, the first coupler comprising;

a first waveguide; and

a first grating coupled to the first waveguide, the first grating comprising a plurality of scattering units, each scattering unit further comprising at least a first scattering element formed of;

a shape in an active silicon layer of the first integrated circuit; and

a shape in a polysilicon gate layer of the first integrated circuit, wherein;

each of the shape in the active silicon layer and the shape in the polysilicon gate layer have a leading edge,

in at least one scattering unit the leading edge of the shape in the active silicon layer being offset by at least 100 nm from the leading edge of the shape in the polysilicon gate layer,

each of the shape in the active silicon layer and the shape in the polysilicon gate layer have a trailing edge,

in at least one scattering unit the trailing edge of the shape in the active silicon layer being offset by at least 100 nm from the trailing edge of the shape in the polysilicon gate layer,

if the leading edge of the shape in the polysilicon layer is closer to the waveguide than the leading edge of the shape in the active layer, then the trailing edge of the shape in the polysilicon layer is closer to the waveguide than the trailing edge of the shape in the active layer and light will be scattered with constructive interference out-of-plane toward the shape in the active layer, and

if the leading edge of the shape in the active layer is closer to the waveguide than the leading edge of the shape in the polysilicon layer, then the trailing edge of the shape in the active layer is closer to the waveguide than the trailing edge of the shape in the polysilicon layer and light will be scattered with constructive interference out-of-plane toward the shape in the polysilicon layer; and

a second integrated circuit having a second coupler, the second coupler comprising a second waveguide coupled to a second grating comprising a plurality of second scattering units, each second scattering unit further comprising at least a second scattering element,

the first grating configured to divert light out-of-plane from the first waveguide primarily along a light path directed to the second optical coupler.

5. The system of claim 4 further comprising a via in a third integrated circuit, the third integrated circuit disposed between the first and second integrated circuit, the via comprising a hole, and wherein the light path passes through the via.

6. The system of claim 4 wherein the scattering units of the first coupler further comprise a third scattering element formed of a shape in a different layer than the first scattering element.

7. The system of claim 4 wherein the first coupler is configured with first scattering elements having non-uniform width along an in-plane propagation direction in the coupler, the scattering elements having a width distribution determined to focus light of the design wavelength.

8. The system of claim 4 wherein the light path is at least 2 degrees away from propagation direction at right angles relative to a surface of the first integrated circuit.

9. The system of claim 5 further comprising a third and a fourth optical coupler, the third optical coupler being configured to divert light from a third waveguide primarily along a second light path directed to the fourth optical coupler, and wherein the second light path passes through the via.

11. An out-of-plane grating coupler comprising:

a waveguide coupled to a grating comprising a plurality of scattering units, at least a subset of the scattering units each further comprising;

a first structure formed of a first core material layer having a first thickness, adjacent

a second structure formed of a second core material layer having a second thickness;

wherein the first and second core material layer are different material layers;

wherein;

E1 is a first edge of the first structure other than top and bottom edges,

E2 is a second edge of the first structure other than top or bottom edges,

E3 is a first edge of the second structure other than top or bottom edges, and

E4 is a second edge of the second structure other than top or bottom edges,

wherein edges E1 and E3 are offset, and edges E2 and E4 are offset along a direction of propagation in a plane of the first material layer from an edge of the waveguide toward the grating such that;

E1 is closer to the waveguide than E3, and

E2 is closer to the waveguide than E4,

the offset from edge E1 to edge E3 is less than 2000 nanometers, and

light will be scattered with constructive interference out-of-plane toward the second core material layer.

12. The grating coupler of claim 11 formed on a metal-oxide-semiconductor (MOS) integrated circuit, a layer selected from the first and second core material layers being selected from the group consisting of a layer used for gates of MOS transistors of the integrated circuit and an active body layer of the integrated circuit.

13. The grating coupler of claim 11, wherein the first and second core material layers are spaced in a direction normal to the plane of the chip by less than 500 nanometers.

23. The grating coupler of claim 11, wherein the first and second core material layers are selected from the group consisting of semiconductors including silicon, gallium arsenide, germanium, silicon carbide, diamond, and dielectrics including silicon nitride, silicon oxynitride (SiOxNy), silicon oxycarbides (SiCOH), and chalcogenide glasses.

14. An optical system comprising:

a first integrated circuit having a first out-of-plane coupler, the first out-of-plane coupler comprising;

a first waveguide; and

a first grating coupled to the first waveguide, the first grating comprising a plurality of scattering units;

a second out-of-plane coupler comprising;

a second waveguide; and

a second grating coupled to the second waveguide, the second grating comprising a plurality of second scattering units and located in a plane different from a plane of the first out-of-plane coupler;

wherein the first out-of-plane coupler is configured as a focusing coupler for producing a focused optical beam having a beam waist between the first out-of-plane coupler and the second out-of-plane coupler, the second out-of-plane coupler being aligned to receive the focused optical beam produced by the first out-of-plane coupler; and

wherein the scattering units of the first out-of-plane coupler comprise a first portion of silicon and gap, the first portion of silicon having a first thickness and formed on a first layer of silicon, adjacent a second portion of silicon and gap, the second portion of silicon having a second thickness and formed on a second layer of silicon, the first waveguide comprising a silicon structure formed on the first or second layer of silicon, there being an offset of 100 nm to 2000 nm in a plane of the waveguide between the first portion of silicon and the second portion of silicon such that light will be scattered with constructive interference out-of-plane toward whichever of the first portion of silicon and the second portion of silicon is farther from the waveguide;

wherein, when viewed from a point perpendicular to a plane of the coupler, the first portion of silicon having a first section overlapping the corresponding second portion of silicon, and a second section not overlapping the corresponding second portion of silicon; and

wherein the second portion of silicon has a first section overlapping the first portion of silicon, and a second section portion not overlapping the first portion of silicon.

15. The system in claim 14, further comprising a third integrated circuit having an optical via, wherein the focused optical beam is further configured to pass through the optical via, the via being disposed between the first and the second coupler.

16. The system of claim 15 where a cross-sectional area of the beam waist is between four plus the square root of fifteen and one divided by the quantity four plus the square root of fifteen, times half a product of a distance between the first and second circuits and the wavelength.

17. A planar, unidirectional out-of-plane optical coupler on a chip, for coupling light at an operating wavelength, the planar, unidirectional out-of-plane optical coupler on a chip comprising:

a first grating comprising an array of lithographically defined elements in a first material layer;

a second grating comprising an array of lithographically defined elements in a second planar material layer different from the first material layer; and

a waveguide;

wherein;

the waveguide comprises a portion of a lithographically patterned material layer selected from the first and second planar material layers;

the first grating being displaced from the second grating in a direction normal to the plane of the first planar material layer by a distance that is between 25 nm and 500 nm such that light will be scattered with constructive interference out-of-plane toward whichever of the first grating and the second grating is farther from the waveguide;

the lithographically defined elements forming the first grating are spaced in the plane of the first planar material by a distance of between 100 nm and 2000 nm; and

the lithographically defined elements forming the second grating being spaced in the plane of the second planar material by a distance between 100 nm and 2000 nm;

wherein, when viewed from a point perpendicular to a plane of the coupler, a lithographically defined element of the second grating has a first portion overlapping a corresponding lithographically defined element of the first grating, and a second portion not overlapping the corresponding lithographically defined element of the first grating; and

wherein the corresponding lithographically defined element of the first grating has a third portion overlapping the lithographically defined element of the second grating, and a fourth portion not overlapping the corresponding lithographically defined element of the second grating.

18. The coupler in claim 17, where the first planar material layer is between 20 and 250 nm thick.

19. The coupler in claim 17, where the first planar material layer is a polysilicon gate layer of a complementary metal oxide semiconductor (CMOS) transistor material stack.

20. The coupler in claim 17, where the second planar material layer is an active body silicon layer of a complementary metal oxide semiconductor, silicon-on-insulator (CMOS SOI) transistor material stack.