Semiconductor device and manufacturing method thereof
First Claim
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1. A semiconductor device, comprising:
- channel layers disposed and vertically arranged over a fin structure;
a source/drain region disposed over the fin structure;
a gate dielectric layer disposed on and wrapping each of the channel layers; and
a gate electrode layer disposed on the gate dielectric layer and wrapping each of the channel layers, wherein;
each of the channel layers includes a first semiconductor wire made of a first semiconductor material,the source/drain region includes second semiconductor wires made of a second semiconductor material different from the first semiconductor material, andeach of the second semiconductor wires in the source/drain regions is wrapped around by a third semiconductor material.
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Abstract
A semiconductor device includes channel layers disposed over a substrate, a source/drain region disposed over the substrate, a gate dielectric layer disposed on and wrapping each of the channel layers, and a gate electrode layer disposed on the gate dielectric layer and wrapping each of the channel layers. Each of the channel layers includes a semiconductor wire made of a first semiconductor material. The semiconductor wire extends into the source/drain region. The semiconductor wire in the source/drain regions is wrapped around by a second semiconductor material.
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Citations
20 Claims
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1. A semiconductor device, comprising:
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channel layers disposed and vertically arranged over a fin structure; a source/drain region disposed over the fin structure; a gate dielectric layer disposed on and wrapping each of the channel layers; and a gate electrode layer disposed on the gate dielectric layer and wrapping each of the channel layers, wherein; each of the channel layers includes a first semiconductor wire made of a first semiconductor material, the source/drain region includes second semiconductor wires made of a second semiconductor material different from the first semiconductor material, and each of the second semiconductor wires in the source/drain regions is wrapped around by a third semiconductor material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A semiconductor device, comprising:
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a channel layer disposed over a fin structure; a source/drain region disposed over the fin structure; a gate dielectric layer disposed on the channel layer; and a gate electrode layer disposed on the gate dielectric layer, wherein; the channel layer includes first semiconductor wires made of a first semiconductor material and second semiconductor wires made of a second semiconductor material different from the first semiconductor material, stacked alternately, the first semiconductor wires extends into the source/drain region, and ends of the second semiconductors are in contact with the source/drain region. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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20. A semiconductor device, comprising:
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gate structures including channel layers formed by semiconductor wires and disposed and vertically arranged over a fin structure; and a source/drain region disposed over the fin structure and between the gate structures, wherein; the semiconductor wires pass through the source/drain region, each of the semiconductor wires are made of a first semiconductor material, the source/drain region are made of a second semiconductor material different from the first semiconductor material, and a thickness of the semiconductor wires at the channel layers is greater than a thickness of the semiconductor wires at the source/drain region.
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Specification