MEMS pressure sensor and microphone devices having through-vias and methods of forming same

• US 10,519,032 B2
• Filed: 06/29/2018
• Issued: 12/31/2019
• Est. Priority Date: 03/14/2013
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Cheng, Chun-Wen, Chu, Chia-Hua
• Primary Examiner(s): Nguyen, Cuong B
• Application Number:
  US16/023,631
• Publication Number:
  US 20180327254A1
• Time in Patent Office: 550 Days
• CPC Class Codes: B81B 2201/0257 Microphones or microspeakers
• CPC Class Codes: B81B 2201/0264 Pressure sensors
• CPC Class Codes: B81B 7/007 Interconnections between the MEMS and external electrical signals
• CPC Class Codes: B81C 1/00238 Joining a substrate with an electronic processing unit and a substrate with a micromechanical structure
• CPC Class Codes: B81C 1/00301 Connecting electric signal lines from the MEMS device with external electrical signal lines, e.g. through vias
• CPC Class Codes: B81C 2201/019 Bonding or gluing multiple substrate layers
• CPC Class Codes: B81C 2203/0792 Forming interconnections between the electronic processing unit and the micromechanical structure

Abstract

A method embodiment includes providing a MEMS wafer. A portion of the MEMS wafer is patterned to provide a first membrane for a microphone device and a second membrane for a pressure sensor device. A carrier wafer is bonded to the MEMS wafer. The carrier wafer is etched to expose the first membrane and a first surface of the second membrane to an ambient environment. A MEMS structure is formed in the MEMS wafer. A cap wafer is bonded to a side of the MEMS wafer opposing the carrier wafer to form a first sealed cavity including the MEMS structure and a second sealed cavity including a second surface of the second membrane for the pressure sensor device. The cap wafer comprises an interconnect structure. A through-via electrically connected to the interconnect structure is formed in the cap wafer.

Claims

1. A device comprising:

a device chip comprising;

a conductive layer providing a first membrane for a first device and a second membrane for a second device different than the first device;

a first micro-electromechanical (MEMS) structure over and aligned with the first membrane; and

a second MEMS structure over and aligned with the second membrane;

a

a carrier bonded to the device chip, wherein the carrier exposes a first surface of the first membrane and a second surface of the second membrane to ambient pressure; and

a cap bonded to the device chip, the device chip being interposed between the cap and the carrier, wherein the cap comprises a through via extending through a substrate, and wherein the cap and the device chip define;

a first cavity extending into the substrate, wherein the first MEMS structure and a third surface of the first membrane are disposed in the first cavity; and

a second cavity extending into the substrate, wherein the second MEMS structure and a fourth surface of the second membrane are disposed in the second cavity, and wherein the first cavity is completely separated from the second cavity.

2. The device of claim 1, wherein the cap further comprises an interconnect structure disposed between the substrate and the device chip, wherein the through via is electrically connected to the interconnect structure.

3. The device of claim 1, wherein the conductive layer further provides a third membrane for a third device different than the first device and the second device, wherein the device chip further comprises a third MEMS structure over and aligned with the third membrane, wherein the cap and the device chip further define a third cavity, and wherein the third MEMS structure and a fifth surface of the third membrane are disposed in the third cavity.

4. The device of claim 3, wherein the cap further comprises anti-stiction bumps in the third cavity.

5. The device of claim 1, wherein a first pressure level in the first cavity is the same as a second pressure level of the second cavity.

6. The device of claim 1, wherein the carrier comprises:

a first through hole exposing the first surface of the first membrane to ambient pressure; and

a second through hole exposing the second surface of the second membrane to ambient pressure.

7. A device comprising:

a first chip comprising a conductive layer, wherein the conductive layer provides a first membrane for a first device and a second membrane for a second device different than the first device;

a second chip bonded to a first side of the first chip by a plurality of eutectic bonds, the second chip comprising;

a substrate, wherein a top surface of the first membrane is exposed to a pressure level of a first cavity extending into the substrate, and wherein a top surface of the second membrane is exposed to a pressure level of a second cavity extending into the substrate, the first cavity being sealed off from the second cavity by the eutectic bonds; and

a plurality of through vias extending through the substrate; and

a third chip bonded to a second side of the first chip, the second side being opposite the first side, wherein a first opening extending through the third chip exposes a bottom surface of the first membrane to an ambient pressure level.

8. The device of claim 7, wherein a second opening extending through the third chip exposes a bottom surface of the second membrane to the ambient pressure level.

9. The device of claim 7 further comprising a third device having a first micro-electromechanical (MEMS) structure disposed in a third cavity, the third cavity being sealed off from the first cavity and the second cavity by the eutectic bonds.

10. The device of claim 9, wherein the third device is a motion sensor, a gyroscope, or an accelerometer.

11. The device of claim 7, wherein the first device further comprises a first micro-electromechanical (MEMS) structure disposed in the first cavity, and wherein the second device further comprises a second MEMS structure disposed in the second cavity.

12. The device of claim 7, wherein the plurality of through vias is electrically connected to the plurality of eutectic bonds.

13. The device of claim 7, wherein the first device is a microphone, and wherein the second device is a pressure sensor.

14. The device of claim 7, wherein the second chip comprises an oxide layer disposed between each of the plurality of through vias and the substrate.

15. A device comprising:

a first chip comprising a conductive layer that provides a first membrane for a first device and a second membrane for a second device;

a second chip bonded the first chip, the second chip comprising;

a semiconductor substrate;

an insulating layer on the semiconductor substrate; and

a plurality of through vias extending through the semiconductor substrate, the insulating layer disposed between the plurality of through vias and the semiconductor substrate along a line perpendicular to a major surface of the semiconductor substrate; and

a third chip bonded to the first chip, the first chip being interposed between the third chip and the second chip, wherein a first opening extending through the third chip exposes a first surface of the first membrane to an ambient pressure level, and wherein a second opening extending through the third chip exposes a second surface of the second membrane to the ambient pressure level.

16. The device of claim 15 wherein the first chip and the second chip define a first cavity, and wherein a third surface of the first membrane is exposed to a pressure level of the first cavity.

17. The device of claim 16, wherein the first cavity extends into the semiconductor substrate.

18. The device of claim 15, wherein the first chip and the second chip define a first cavity, wherein a third surface of the first membrane is exposed to a pressure level of the first cavity, wherein the first chip and the second chip define a second cavity, wherein a fourth surface of the second membrane is exposed to a pressure level of the second cavity, and wherein the pressure level of the second cavity is equal to the pressure level of the first cavity.

19. The device of claim 18, wherein the second chip is bonded to the first chip by a plurality of eutectic bonds, and wherein the first cavity is sealed off from the second cavity by the plurality of eutectic bonds.

20. The device of claim 19, wherein the plurality of through vias are electrically connected to the plurality of eutectic bonds.