Vacuum valve with optical sensor

• US 10,520,109 B2
• Filed: 03/09/2018
• Issued: 12/31/2019
• Est. Priority Date: 03/09/2017
• Status: Active Grant

• Current Assignee: VAT Holding AG (VAT Group AG)
• Original Assignee: VAT Holding AG (VAT Group AG)
• Inventors: Hofer, Andreas, Bohm, Christoph, Eschenmoser, Adrian
• Primary Examiner(s): Stock, Jr., Gordon J
• Application Number:
  US15/916,745
• Publication Number:
  US 20180259075A1
• Time in Patent Office: 662 Days
• CPC Class Codes: F16K 3/10 with special arrangements for separating the sealing faces or for pressing them together
• CPC Class Codes: F16K 3/18 by movement of the closure members
• CPC Class Codes: F16K 37/0025 Electrical or magnetic means F16K37/0075 takes precedence
• CPC Class Codes: F16K 37/0041 for measuring valve parameters F16K37/0033 takes precedence
• CPC Class Codes: F16K 37/0058 Optical means, e.g. light transmission, observation ports F16K37/0075 takes precedence
• CPC Class Codes: F16K 37/0091 by measuring fluid parameters
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence

Abstract

A vacuum valve system having a valve seat and a valve closure for closing the valve opening. At least two sealing faces are provided, a first sealing face is the valve seat around the valve opening, and a second sealing face is the valve closure. A drive unit coupled to the valve closure designed so that the valve closure can be adjusted to provide respective valve opening states and is movable from an open position to a closed position, in which the second sealing face is pressed in the direction of the first sealing face and the valve opening in a gastight manner. The vacuum valve system has an optical sensor unit, designed to detect an optical measurement signal and an optical detection axis of the optical sensor unit oriented so that the measurement signal can be detected, and can be produced in a test position.

Claims

1. A vacuum valve system comprising a

vacuum valve for controlling a volume flow or mass flow and/or for gastight sealing off a process volume, wherein the vacuum valve has

a valve seat, which runs for closing the valve opening in a gas-tight manner, and

at least two sealing faces, wherein

a first sealing face of the at least two sealing faces is provided by the valve seat and runs around the valve opening, and

a second sealing face of the at least two sealing faces is provided by the valve closure and is formed correspondingly to the first sealing face,

a drive unit coupled to the valve closure, which drive unit is designed in such a way that the valve closure

can be varied and adjusted in a defined manner in order to provide respective valve opening states and

is movable from an open position, in which the valve closure at least partially releases the valve opening, into a closed position, in which the second sealing face is pressed in the direction of the first sealing face and the valve opening is closed in a substantially gastight manner, and back,

wherein the vacuum valve system has an optical sensor unit, wherein the optical sensor unit

is designed to detect an optical measurement signal and

is arranged in such a way, and an optical detection axis of the optical sensor unit is oriented in such a way that the measurement signal with respect to at least part of one of the sealing faces can be detected,

wherein the measurement signal can be generated in a test position of the valve closure.

2. The vacuum valve system according to claim 1,

wherein the measurement signal with respect to at least part of one of the sealing faces can be generated only in a certain test position of the valve closure.

3. The vacuum valve system according to claim 1,

wherein the vacuum valve defines a vacuum region separated from an outer environment.

4. The vacuum valve system according to claim 3,

wherein

the optical sensor unit is arranged at least in part within the vacuum region and

the detection axis is oriented in the direction of the valve seat for detection of the optical measurement signal for the second sealing face.

5. The vacuum valve system according to claim 1,

wherein

the vacuum valve has a transmission window permeable at east for the optical measurement signal.

6. The vacuum valve system according to claim 5,

wherein

the optical sensor unit is arranged in the outer environment in such a way that the optical measurement signal can be detected via the transmission window by means of the optical sensor unit.

7. The vacuum valve system according to claim 5,

wherein

the transmission window forms at least part of one of the at least two sealing faces.

8. The vacuum valve system according to claim 1,

wherein

the optical sensor unit comprises an optical fibre for detecting and guiding the optical measurement signal.

9. The vacuum valve system according to claim 1,

wherein

the optical sensor unit is connected to the valve closure.

10. The vacuum valve system according to claim 1,

wherein

the optical sensor unit comprises a beam detection module, with

a camera,

an infrared detector,

a scattered light sensor and/or

a Raman detector.

11. The vacuum valve system according to claim 1,

wherein

the vacuum valve system comprises a processing unit formed in such a way that a detected measurement signal can be processed by means of the processing unit and state information can be generated on the basis of the detected measurement signal.

12. The vacuum valve system according to claim 11,

wherein

the state information provides information regarding a chemical, mechanical and/or structural integrity of the first or second sealing face

and/or

the state information is generated by means of image processing and/or by means of an actual-target comparison for the detected measurement signal.

13. The vacuum valve system according to claim 11,

wherein

based on the state information, a material composition and/or change to the material composition can be deduced for at least the detectable part of one of the at least two sealing faces.

14. The vacuum valve system according to claim 11,

wherein

the state information is produced as

a visual representation of at least the detectable part of one of the at least two sealing faces, or a graph embodying spectroscopic measurement signals, or

an output signal specifying a relation of the detected measurement signal to a specific tolerance value.

15. The vacuum valve system according to claim

wherein the valve seat

is formed by a part of the vacuum valve structurally connected to the vacuum valve, or

is provided by a process chamber.

16. The vacuum valve system according to claim 8, wherein at least part of the optical fibre is present in the vacuum region and is arranged and oriented to detect the optical measurement signal for at least one of the at least two sealing faces.

17. The vacuum valve system according to claim 9, wherein the optical sensor unit is integrated at least in part in the valve closure.