Continuous monitoring of drive amplitude in vibrating microelectromechanical gyroscopes

• US 10,520,313 B2
• Filed: 05/04/2017
• Issued: 12/31/2019
• Est. Priority Date: 05/27/2016
• Status: Active Grant

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Tormalehto, Kimmo
• Primary Examiner(s): Schmitt, Benjamin R
• Application Number:
  US15/586,418
• Publication Number:
  US 20170343351A1
• Time in Patent Office: 971 Days
• Field of Search: 7350402, 7350412
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure
• CPC Class Codes: G01C 19/5726 Signal processing
• CPC Class Codes: G01C 19/5733 Structural details or topology
• CPC Class Codes: G01C 19/574 the devices having two sensing masses in anti-phase motion

Abstract

The disclosure relates to a microelectromechanical gyroscope comprising at least one mass element, a drive actuator and sense electrodes. The at least one mass element is configured to be driven by the drive actuator into oscillating movement with a drive oscillation frequency ω_D, and the sense electrodes are configured to produce a sense signal from the oscillating movement of the at least one mass element. The gyroscope control circuit comprises an amplitude detection unit which detects a sense signal amplitude at the frequency 2ω_D. This amplitude yields a measure of drive oscillation amplitude. Amplitude detection at the frequency ω_D yields a measure of angular rotation rate.

Claims

1. A microelectromechanical gyroscope comprising at least one mass element, a drive actuator, sense electrodes, and a gyroscope control circuit, wherein—

the drive actuator is configured to be controlled by a drive signal comprising a drive signal amplitude and a drive signal frequency,

the at least one mass element is configured to be driven by the drive actuator into a drive oscillation movement with a drive oscillation frequency ω

_D, and

the sense electrodes are configured to produce a sense signal from a sense oscillation movement of the at least one mass element, the sense signal including a first component induced by the effect of the Coriolis force on the at least one mass element,

wherein the gyroscope control circuit comprises an amplitude detection unit which detects the effect of the Coriolis force from a sense signal amplitude at the frequency ω

_D,

and the sense signal has a second component with a second harmonic frequency 2ω

_D,

and the gyroscope control circuit comprises a second amplitude detection unit which detects the sense signal amplitude at the second harmonic frequency 2ω

_D.

2. The microelectromechanical gyroscope according to claim 1, wherein the gyroscope control circuit also comprises an amplitude control unit which adjusts the drive signal amplitude based on the sense signal amplitude detected at the second harmonic frequency 2ω

_D.

3. The microelectromechanical gyroscope according to claim 2, wherein the amplitude control unit is configured to compare the detected sense signal amplitude to a reference sense signal amplitude.

4. The microelectromechanical gyroscope according to claim 1, wherein the gyroscope control circuit

comprises a phase-locked loop where the sense signal is demodulated at the second harmonic frequency 2ω

_D, and

comprises a frequency divider which divides the frequency set in the phase-locked loop in half, and

feeds this halved frequency to a signal generator which sets the drive signal frequency to said halved frequency.

5. The microelectromechanical gyroscope according to claim 4, wherein the gyroscope comprises a self-test monitoring unit which outputs a signal indicating self-test failure if either the detected sense signal amplitude, the adjusted drive signal amplitude or the frequency set in the phase-locked loop falls beyond a self-test allowance margin.

6. The microelectromechanical gyroscope according to claim 1, wherein the at least one mass element is surrounded by a reference frame.

7. The microelectromechanical gyroscope according to claim 6, wherein the at least one mass element oscillates within the plane defined by the reference frame.

8. The microelectromechanical gyroscope according to claim 7, wherein the at least one mass element oscillates out of the plane defined by the reference frame.

9. The microelectromechanical gyroscope according to claim 1, wherein the microelectromechanical gyroscope comprises two mass elements and the drive actuator is configured to actuate the at least two mass elements into linear anti-phase oscillation along a primary axis (a1) and the sense oscillation movement of the at least two mass elements occurs along a secondary axis (a3) perpendicular to the primary axis (a1), and the at least two mass elements are physically coupled to each other with two levers, so that the distance between the at least two mass elements in the direction of the secondary axis (a3) exhibits two maxima and two minima in each drive oscillation period.

10. The microelectromechanical gyroscope according to claim 1, wherein the microelectromechanical gyroscope comprises two mass elements and the drive actuator is configured to actuate the at least two mass elements into rotational oscillation about a primary axis (a2), and the sense oscillation of the at least two mass elements occurs about a secondary axis (a3) perpendicular to the primary axis (a2), and the at least two mass elements and the sense electrodes are arranged so that the areal overlap between one of the sense electrodes and one of the at least two mass elements in the direction of the primary axis (a2) exhibits two minima and two maxima in each drive oscillation period.

11. A method for operating a microelectromechanical gyroscope comprising at least one mass element, a gyroscope control circuit, and a drive actuator controlled by a drive signal comprising a drive signal amplitude and a drive signal frequency, wherein

the at least one mass element is driven by the drive actuator into a drive oscillation movement with a drive oscillation frequency ω

_D,

a sense signal is produced from a sense oscillation movement of the at least one mass element, the sense signal including a first component induced by effect of the Coriolis force on the at least one mass element,

wherein an amplitude detection unit in the gyroscope control circuit detects the effect of the Coriolis force from a sense signal amplitude at the frequency ω

_D,

the sense signal has a second component with a second harmonic frequency 2ω

_D,

the sense signal amplitude is detected at the second harmonic frequency 2ω

_D in the gyroscope control circuit,

and a second amplitude detection unit in the gyroscope control circuit detects the sense signal amplitude at the second harmonic frequency 2ω

_D.

12. The method according to claim 11, wherein the drive signal amplitude is adjusted based on the sense signal amplitude detected at the second harmonic frequency 2ω

_D.

13. The method according to claim 12, wherein the sense signal amplitude is compared to a reference sense signal amplitude.

14. The method according to claim 11, wherein

the sense signal is demodulated at the second harmonic frequency 2ω

_D in a phase-locked loop,

the frequency set in the phase-locked loop is divided in half in a frequency divider, and

the halved frequency is fed to a signal generator which sets the drive signal frequency to said halved frequency.

15. The method according to claim 14, wherein

the detected sense signal amplitude is fed to a self-test monitoring unit,

the adjusted drive signal amplitude is fed to the self-test monitoring unit, and

the frequency set in the phase-locked loop is fed to the self-test monitoring unit, and

a signal indicating self-test failure is output by the self-test monitoring unit if the detected sense signal amplitude, the adjusted drive signal amplitude or the frequency set in the phase-locked loop falls beyond a self-test allowance margin.

16. The method according to claim 11, wherein the microelectromechanical gyroscope comprises two mass elements and the drive actuator is configured to actuate the at least two mass elements into linear anti-phase oscillation along a primary axis (a1) and the sense oscillation movement of the at least two mass elements occurs along a secondary axis (a3) perpendicular to the primary axis (a1), and the at least two mass elements are physically coupled to each other with two levers, so that the distance between the at least two mass elements in the direction of the secondary axis (a3) exhibits two maxima and two minima in each drive oscillation period.

17. The method according to claim 11, wherein the microelectromechanical gyroscope comprises two mass elements and the drive actuator is configured to actuate the at least two mass elements into rotational oscillation about a primary axis (a2), and the sense oscillation of the at least two mass elements occurs about a secondary axis (a3) perpendicular to the primary axis (a2), and the at least two mass elements and the sense electrodes are arranged so that the areal overlap between one of the sense electrodes and one of the at least two mass elements in the direction of the primary axis (a2) exhibits two minima and two maxima in each drive oscillation period.