Method and structure for FinFET isolation
First Claim
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1. A method of forming a semiconductor device, comprising:
- receiving a substrate having a fin extending from the substrate, first and second dummy gate stacks over the substrate and engaging the fin;
removing the first and second dummy gate stacks thereby forming a first trench and a second trench, wherein the first and second trenches expose first and second portions of the fin respectively;
removing the first portion of the fin; and
forming a gate stack in the second trench, the gate stack engaging the second portion of the fin.
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Abstract
A method of forming a semiconductor device includes receiving a substrate having a fin extending from the substrate, first and second dummy gate stacks over the substrate and engaging the fin; removing the first and second dummy gate stacks thereby forming a first trench and a second trench, wherein the first and second trenches expose first and second portions of the fin respectively; removing the first portion of the fin; and forming a gate stack in the second trench, the gate stack engaging the second portion of the fin.
17 Citations
20 Claims
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1. A method of forming a semiconductor device, comprising:
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receiving a substrate having a fin extending from the substrate, first and second dummy gate stacks over the substrate and engaging the fin; removing the first and second dummy gate stacks thereby forming a first trench and a second trench, wherein the first and second trenches expose first and second portions of the fin respectively; removing the first portion of the fin; and forming a gate stack in the second trench, the gate stack engaging the second portion of the fin. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of forming a semiconductor device, comprising:
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receiving a substrate having an active fin, an isolation structure over the substrate, a plurality of dummy gate stacks over a first surface of the isolation structure and engaging the active fin; removing the dummy gate stacks thereby forming first, second, and third trenches, wherein the second trench is between the first and third trenches, and the first, second, and third trenches expose first, second, and third portions of the active fin respectively; removing the second portion of the active fin; and forming gate stacks in the first and third trenches, the gate stacks engaging the first and third portions of the active fin. - View Dependent Claims (12, 13, 14, 15)
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16. A method of forming a semiconductor device, comprising:
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receiving a substrate having first and second fins extending lengthwise generally along a same line, wherein each of the first and second fins has first and second ends, and the second end of the first fin is adjacent to the first end of the second fin; forming a first gate stack over the substrate and engaging the first fin; forming a second gate stack over the substrate and engaging the second fin; forming a first isolation structure over the first end of the first fin; forming a second isolation structure over the second end of the second fin; and forming a third isolation structure adjacent to both the second end of the first fin and the first end of the second fin. - View Dependent Claims (17, 18, 19, 20)
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Specification