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Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections

  • US 10,525,506 B2
  • Filed: 01/10/2019
  • Issued: 01/07/2020
  • Est. Priority Date: 06/21/2017
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • forming a plurality of cavities in a first side of a first substrate;

    for one or more of the plurality of cavities, forming first isolation trenches in the first side of the first substrate;

    bonding a second substrate to the first substrate to seal the cavities; and

    forming second isolation trenches in a second side of the first substrate;

    the bonded first and second substrates defining an ultrasonic transducer substrate having a membrane, a bottom electrode, and the plurality of cavities disposed between the membrane and the bottom electrode, each of the plurality of cavities corresponding to an individual transducer cell;

    wherein portions of the bottom electrode corresponding to each individual transducer cell are electrically isolated from one another by the second isolation trenches; and

    each portion of the bottom electrode corresponding to each individual transducer cell further comprising a first bottom electrode portion and a second bottom electrode portion, the first and second bottom electrode portions electrically isolated from one another by the first isolation trenches.

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