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Reference circuit for metrology system

  • US 10,527,503 B2
  • Filed: 09/22/2016
  • Issued: 01/07/2020
  • Est. Priority Date: 01/08/2016
  • Status: Active Grant
First Claim
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1. An integrated circuit comprising:

  • a plurality of sensors implemented in corresponding ones of one or more functional circuit blocks;

    a metrology control circuit including;

    a reference sensor, wherein the reference sensor is implemented using a circuit topology identical to each of the plurality of sensors and has substantially same operating characteristics as each of the plurality of sensors;

    a precision voltage generation circuit configured to provide a known voltage value to the reference sensor, wherein the precision voltage generation circuit is separate and distinct from respective voltage sources coupled to each of the plurality of sensors;

    a precision temperature sensing circuit in close proximity to the reference sensor; and

    a processing circuit configured to correlate readings received from the reference sensor to a voltage received from the precision voltage generation circuit and the precision temperature sensing circuit, and further configured to calibrate each of the plurality of sensors based on the correlated readings.

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