Dynamic match statistics in pattern matching

• US 10,528,789 B2
• Filed: 04/09/2018
• Issued: 01/07/2020
• Est. Priority Date: 02/27/2015
• Status: Active Grant

• Current Assignee: Idex ASA
• Original Assignee: Idex ASA
• Inventors: Bauchspies, Roger A.
• Primary Examiner(s): Ahmed, Samir A
• Application Number:
  US15/947,905
• Publication Number:
  US 20180232559A1
• Time in Patent Office: 638 Days
• CPC Class Codes: G06V 10/44 Local feature extraction by analysis of parts of the pattern, e.g. by detecting edges, contours, loops, corners, strokes or intersections; Connectivity analysis, e.g. of connected components
• CPC Class Codes: G06V 10/751 Comparing pixel values or logical combinations thereof, or feature values having positional relevance, e.g. template matching
• CPC Class Codes: G06V 40/1365 Matching; Classification

Abstract

A system, method, and computer program product for producing a consistent desired set of operational parameters during use of a patterning solution that would otherwise alter an initial set of operational parameters. A variable match process is adjusted dynamically to counter changes to the performance metric to tend to maintain the performance metric at a desired predetermined specification.

Claims

1. A machine-implemented method for compensating for a change to a performance metric responsive to a set of modifications to a set of pattern information recorded in a template repository included in a patterning system having a match process for comparisons of pairs of pattern information structures, comprising executing on a processor the steps of:

a) enumerating, using the processor, a number of the modifications of the set of modifications to produce a modification metric;

b) estimating, responsive to said modification metric using the processor, a magnitude of the change to the performance metric;

c) adjusting, responsive to said magnitude of the change to the performance metric using the processor, the match process producing a modified match process; and

d) reducing, responsive to said modified match process using the processor, an absolute value of said magnitude of the change to the performance metric.

2. The method of claim 1 wherein the performance metric includes a false acceptance rate, wherein said set of modifications includes a net increase of the set of pattern information recorded in the template repository, wherein the change of the performance metric includes an increase in said false acceptance rate responsive to said net increase, and wherein said modified match process includes an increased match rigor.

3. The method of claim 1 wherein the performance metric includes a false acceptance rate, wherein said set of modifications includes a net decrease of the set of pattern information recorded in the template repository, wherein the change of the performance metric includes a decrease in said false acceptance rate responsive to said net increase, and wherein said modified match process includes a decreased match rigor.

4. The method of claim 1 wherein the performance metric includes a false rejection rate, wherein said set of modifications includes a net increase of the set of pattern information recorded in the template repository, wherein the change of the performance metric includes a decrease in said false rejection rate responsive to said net increase, and wherein said modified match process includes a decreased match rigor.

5. The method of claim 1 wherein the performance metric includes a false rejection rate, wherein said set of modifications includes a net decrease of the set of pattern information recorded in the template repository, wherein the change of the performance metric includes an increase in said false rejection rate responsive to said net decrease, and wherein said modified match process includes an increased match rigor.

16. The method of claim 1 wherein said pairs of pattern information structures include pairs of fingerprints.

6. A non-transitory computer-readable medium for compensating for a change to a performance metric responsive to a set of modifications to a set of pattern information recorded in a template repository included in a patterning system having a match process for comparisons of pairs of pattern information structures, comprising instructions stored thereon, that when executed on a processor, perform the steps of:

a) enumerating, using the processor, a number of the modifications of the set of modifications to produce a modification metric;

b) estimating, responsive to said modification metric using the processor, a magnitude of the change to the performance metric;

c) adjusting, responsive to said magnitude of the change to the performance metric using the processor, the match process producing a modified match process; and

d) reducing, responsive to said modified match process using the processor, an absolute value of said magnitude of the change to the performance metric.

7. The medium of claim 6 wherein the performance metric includes a false acceptance rate, wherein said set of modifications includes a net increase of the set of pattern information recorded in the template repository, wherein the change of the performance metric includes an increase in said false acceptance rate responsive to said net increase, and wherein said modified match process includes an increased match rigor.

8. The medium of claim 6 wherein the performance metric includes a false acceptance rate, wherein said set of modifications includes a net decrease of the set of pattern information recorded in the template repository, wherein the change of the performance metric includes a decrease in said false acceptance rate responsive to said net increase, and wherein said modified match process includes a decreased match rigor.

9. The medium of claim 6 wherein the performance metric includes a false rejection rate, wherein said set of modifications includes a net increase of the set of pattern information recorded in the template repository, wherein the change of the performance metric includes a decrease in said false rejection rate responsive to said net increase, and wherein said modified match process includes a decreased match rigor.

10. The medium of claim 6 wherein the performance metric includes a false rejection rate, wherein said set of modifications includes a net decrease of the set of pattern information recorded in the template repository, wherein the change of the performance metric includes an increase in said false rejection rate responsive to said net decrease, and wherein said modified match process includes an increased match rigor.

17. The medium of claim 6 wherein said pairs of pattern information structures include pairs of fingerprints.

11. A system for compensating for a change to a performance metric responsive to a set of modifications to a set of pattern information recorded in a template repository included in a patterning system having a match process for comparisons of pairs of pattern information structures, comprising:

a processor;

a memory coupled to said processor wherein a pattern processing program is stored in said memory, said pattern processing program, when executed by said processor, initiates said processor to perform the steps of;

a) enumerating, using the processor, a number of the modifications of the set of modifications to produce a modification metric;

b) estimating, responsive to said modification metric using the processor, a magnitude of the change to the performance metric;

c) adjusting, responsive to said magnitude of the change to the performance metric using the processor, the match process producing a modified match process; and

d) reducing, responsive to said modified match process using the processor, an absolute value of said magnitude of the change to the performance metric.

12. The system of claim 11 wherein the performance metric includes a false acceptance rate, wherein said set of modifications includes a net increase of the set of pattern information recorded in the template repository, wherein the change of the performance metric includes an increase in said false acceptance rate responsive to said net increase, and wherein said modified match process includes an increased match rigor.

13. The system of claim 11 wherein the performance metric includes a false acceptance rate, wherein said set of modifications includes a net decrease of the set of pattern information recorded in the template repository, wherein the change of the performance metric includes a decrease in said false acceptance rate responsive to said net increase, and wherein said modified match process includes a decreased match rigor.

14. The system of claim 11 wherein the performance metric includes a false rejection rate, wherein said set of modifications includes a net increase of the set of pattern information recorded in the template repository, wherein the change of the performance metric includes a decrease in said false rejection rate responsive to said net increase, and wherein said modified match process includes a decreased match rigor.

15. The system of claim 11 wherein the performance metric includes a false rejection rate, wherein said set of modifications includes a net decrease of the set of pattern information recorded in the template repository, wherein the change of the performance metric includes an increase in said false rejection rate responsive to said net decrease, and wherein said modified match process includes an increased match rigor.

18. The system of claim 11 wherein said pairs of pattern information structures include pairs of fingerprints.