Dynamic match statistics in pattern matching
First Claim
1. A machine-implemented method for compensating for a change to a performance metric responsive to a set of modifications to a set of pattern information recorded in a template repository included in a patterning system having a match process for comparisons of pairs of pattern information structures, comprising executing on a processor the steps of:
- a) enumerating, using the processor, a number of the modifications of the set of modifications to produce a modification metric;
b) estimating, responsive to said modification metric using the processor, a magnitude of the change to the performance metric;
c) adjusting, responsive to said magnitude of the change to the performance metric using the processor, the match process producing a modified match process; and
d) reducing, responsive to said modified match process using the processor, an absolute value of said magnitude of the change to the performance metric.
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Accused Products
Abstract
A system, method, and computer program product for producing a consistent desired set of operational parameters during use of a patterning solution that would otherwise alter an initial set of operational parameters. A variable match process is adjusted dynamically to counter changes to the performance metric to tend to maintain the performance metric at a desired predetermined specification.
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Citations
18 Claims
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1. A machine-implemented method for compensating for a change to a performance metric responsive to a set of modifications to a set of pattern information recorded in a template repository included in a patterning system having a match process for comparisons of pairs of pattern information structures, comprising executing on a processor the steps of:
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a) enumerating, using the processor, a number of the modifications of the set of modifications to produce a modification metric; b) estimating, responsive to said modification metric using the processor, a magnitude of the change to the performance metric; c) adjusting, responsive to said magnitude of the change to the performance metric using the processor, the match process producing a modified match process; and d) reducing, responsive to said modified match process using the processor, an absolute value of said magnitude of the change to the performance metric. - View Dependent Claims (2, 3, 4, 5, 16)
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6. A non-transitory computer-readable medium for compensating for a change to a performance metric responsive to a set of modifications to a set of pattern information recorded in a template repository included in a patterning system having a match process for comparisons of pairs of pattern information structures, comprising instructions stored thereon, that when executed on a processor, perform the steps of:
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a) enumerating, using the processor, a number of the modifications of the set of modifications to produce a modification metric; b) estimating, responsive to said modification metric using the processor, a magnitude of the change to the performance metric; c) adjusting, responsive to said magnitude of the change to the performance metric using the processor, the match process producing a modified match process; and d) reducing, responsive to said modified match process using the processor, an absolute value of said magnitude of the change to the performance metric. - View Dependent Claims (7, 8, 9, 10, 17)
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11. A system for compensating for a change to a performance metric responsive to a set of modifications to a set of pattern information recorded in a template repository included in a patterning system having a match process for comparisons of pairs of pattern information structures, comprising:
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a processor; a memory coupled to said processor wherein a pattern processing program is stored in said memory, said pattern processing program, when executed by said processor, initiates said processor to perform the steps of; a) enumerating, using the processor, a number of the modifications of the set of modifications to produce a modification metric; b) estimating, responsive to said modification metric using the processor, a magnitude of the change to the performance metric; c) adjusting, responsive to said magnitude of the change to the performance metric using the processor, the match process producing a modified match process; and d) reducing, responsive to said modified match process using the processor, an absolute value of said magnitude of the change to the performance metric. - View Dependent Claims (12, 13, 14, 15, 18)
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Specification