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Method and apparatus for detecting electron beam source filament wear

  • US 10,529,070 B2
  • Filed: 10/08/2018
  • Issued: 01/07/2020
  • Est. Priority Date: 11/10/2017
  • Status: Active Grant
First Claim
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1. A method for detecting electron beam filament wear in an electron beam source, the method comprising the steps of:

  • fixing the electron beam source in a reference condition,moving a focus plane of electron beams emanating from the electron beam source a predetermined distance from a target surface for reproducing electron emission of the filament onto the target surface,capturing an image of the reproduced electron emission of the filament onto the target surface by a camera,comparing the captured image with a reference image of the reproduced electron emission of the filament onto the target surface, anddetecting filament wear if a luminous flux in the captured image is deviating more than a predetermined value from the reference image.

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