Method and apparatus for detecting electron beam source filament wear
First Claim
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1. A method for detecting electron beam filament wear in an electron beam source, the method comprising the steps of:
- fixing the electron beam source in a reference condition,moving a focus plane of electron beams emanating from the electron beam source a predetermined distance from a target surface for reproducing electron emission of the filament onto the target surface,capturing an image of the reproduced electron emission of the filament onto the target surface by a camera,comparing the captured image with a reference image of the reproduced electron emission of the filament onto the target surface, anddetecting filament wear if a luminous flux in the captured image is deviating more than a predetermined value from the reference image.
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Abstract
A method for detecting electron beam filament wear in an electron beam source, the method comprising the steps of: enlarging a beam spot emanating from the electron beam source on a work table to a predetermined minimum size, capturing an image of the beam spot on the work table by a camera, comparing the captured image of the beam spot with a reference image, and detecting filament wear if the captured image is deviating more than a predetermined value from the reference image.
218 Citations
20 Claims
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1. A method for detecting electron beam filament wear in an electron beam source, the method comprising the steps of:
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fixing the electron beam source in a reference condition, moving a focus plane of electron beams emanating from the electron beam source a predetermined distance from a target surface for reproducing electron emission of the filament onto the target surface, capturing an image of the reproduced electron emission of the filament onto the target surface by a camera, comparing the captured image with a reference image of the reproduced electron emission of the filament onto the target surface, and detecting filament wear if a luminous flux in the captured image is deviating more than a predetermined value from the reference image. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An apparatus for detecting electron beam filament wear in an electron beam source, the apparatus comprising:
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means for fixing the electron beam source in a reference condition, means for moving a focus plane of electron beams emanating from the electron beam source a predetermined distance from a target surface for reproducing electron emission of the filament onto the target surface, a camera for capturing an image of the reproduced electron emission of the filament onto the target surface, and a processor configured for; comparing the captured image with a reference image, and detecting filament wear if a luminous flux in the captured image is deviating more than a predetermined value from the reference image. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. A computer program product comprising at least one non-transitory computer-readable storage medium having computer-readable program code portions embodied therein, the computer-readable program code portions comprising one or more executable portions configured for:
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fixing the electron beam source in a reference condition, moving a focus plane of electron beams emanating from the electron beam source a predetermined distance from a target surface for reproducing electron emission of the filament onto the target surface, capturing an image of the reproduced electron emission of the filament onto the target surface by a camera, comparing the captured image with a reference image, and detecting filament wear if a luminous flux in the captured image is deviating more than a predetermined value from the reference image. - View Dependent Claims (20)
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Specification