Technique for the growth and fabrication of semipolar (Ga,Al,In,B)N thin films, heterostructures, and devices

• US 10,529,892 B2
• Filed: 09/07/2017
• Issued: 01/07/2020
• Est. Priority Date: 06/01/2005
• Status: Active Grant

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Farrell, Jr., Robert M., Baker, Troy J., Chakraborty, Arpan, Haskell, Benjamin A., Pattison, P. Morgan, Sharma, Rajat, Mishra, Umesh K., DenBaars, Steven P., Speck, James S., Nakamura, Shuji
• Primary Examiner(s): Fan, Michele
• Application Number:
  US15/698,181
• Publication Number:
  US 20180013035A1
• Time in Patent Office: Days
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: C30B 23/025 characterised by the substrate
• CPC Class Codes: C30B 25/18 characterised by the substrate
• CPC Class Codes: C30B 29/403 AIII-nitrides
• CPC Class Codes: H01L 21/02389 Nitrides
• CPC Class Codes: H01L 21/0242 Crystalline insulating materials
• CPC Class Codes: H01L 21/02433 Crystal orientation
• CPC Class Codes: H01L 21/02458 Nitrides
• CPC Class Codes: H01L 21/0254 Nitrides
• CPC Class Codes: H01L 21/02609 Crystal orientation
• CPC Class Codes: H01L 33/0004 Devices characterised by their operation
• CPC Class Codes: H01L 33/0062 for devices with an active region comprising only III-V compounds
• CPC Class Codes: H01L 33/007 comprising nitride compounds
• CPC Class Codes: H01L 33/02 characterised by the semiconductor bodies
• CPC Class Codes: H01L 33/16 with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous
• CPC Class Codes: H01S 2304/04 MOCVD or MOVPE
• CPC Class Codes: H01S 5/0422 with n- and p-contacts on the same side of the active layer
• CPC Class Codes: H01S 5/04257 having positive and negative electrodes on the same side of the substrate
• CPC Class Codes: H01S 5/2201 in a specific crystallographic orientation
• CPC Class Codes: H01S 5/320275 semi-polar orientation
• CPC Class Codes: H01S 5/34333 : with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser

Abstract

A method for growth and fabrication of semipolar (Ga,Al,In,B)N thin films, heterostructures, and devices, comprising identifying desired material properties for a particular device application, selecting a semipolar growth orientation based on the desired material properties, selecting a suitable substrate for growth of the selected semipolar growth orientation, growing a planar semipolar (Ga,Al,In,B)N template or nucleation layer on the substrate, and growing the semipolar (Ga,Al,In,B)N thin films, heterostructures or devices on the planar semipolar (Ga,Al,In,B)N template or nucleation layer. The method results in a large area of the semipolar (Ga,Al,In,B)N thin films, heterostructures, and devices being parallel to the substrate surface.

Claims

1. A light emitting device configured as a laser device, comprising:

a semipolar III-nitride film including a light emitting device structure, wherein;

the light emitting device structure includes a semipolar III-nitride active region grown on or above a surface of a nitride substrate, the surface oriented at a crystal angle θ

from a c-plane of the nitride substrate, wherein 75°

≤

θ

<

90°

; and

an edge configured on the light emitting device structure for emission of light.

2. The device of claim 1, wherein the semipolar III-nitride film comprises a gallium and nitrogen material.

3. The device of claim 1, wherein the semipolar III-nitride active region is grown on or above a semipolar surface of the substrate comprising a free-standing gallium nitride (GaN) substrate, the semipolar surface having a {20-21} orientation or offcut thereof.

4. The device of claim 1, wherein the light emitting device structure comprises a green light emitting semipolar diode.

5. The device of claim 1, wherein:

a material property of the semipolar III-nitride active region is such that the device emits light in response to a drive current density of 278 Amps per centimeter square, and

the drive current density is direct current density.

6. The device of claim 5, wherein:

the device structure includes a diode structure including the active region, the diode structure having a current-voltage (I-V) characteristic, and

the material property is effective to achieve the I-V characteristic exhibiting a turn-on voltage of at most 3.1 Volts.

7. The device of claim 5, wherein the material property is such that the device emits light having an output power of at least 1.5 milliwatts at the drive current density.

8. The device of claim 5, wherein:

a top surface of the semipolar III-nitride active region is planar, semipolar, and substantially parallel to a main surface of the nitride substrate.

9. The device of claim 5, wherein the semipolar III-nitride active region is grown on or above the nitride substrate comprising a Gallium Nitride substrate.

10. The device of claim 5, wherein the semipolar III-nitride active region is grown on or above the nitride substrate comprising Gallium Nitride having a thickness of at least 10 micrometers.

11. The device of claim 10, wherein the surface comprises a {1011}, {1013}, or {1122} orientation.

12. The device of claim 5, wherein the device is a laser diode emitting blue light.

13. A method for fabricating a laser device, comprising:

growing a semipolar III-nitride film including a light emitting laser device structure, wherein;

the light emitting laser device structure includes a semipolar III-nitride active region grown on or above a surface of a nitride substrate, and

the surface is oriented at a crystal angle θ

from a c-plane of the nitride substrate,

wherein 75°

≤

θ

<

90°

; and

forming an edge on the laser device structure for emission of light.

14. The method of claim 13, wherein the semipolar III-nitride active region is grown on or above the nitride substrate comprising a free-standing gallium nitride (GaN) substrate having a {20-21} surface orientation and off-cut thereof.

15. The method of claim 13, wherein the nitride substrate includes at least a 10 micrometer thickness of Gallium Nitride.

16. A light emitting device configured as a laser device, comprising:

a semipolar III-nitride film including a light emitting device structure, wherein;

the light emitting device structure includes a semipolar III-nitride active region grown on or above a surface of a nitride layer on or above a foreign substrate, the surface oriented at a crystal angle θ

from a c-plane of the nitride substrate, wherein 75°

≤

θ

<

90°

; and

an edge configured on the light emitting device structure for emission of light.

17. The light emitting device of claim 16, wherein the foreign substrate comprises a sapphire substrate.

18. The light emitting device of claim 16, wherein:

the foreign substrate comprises sapphire, silicon carbide, silicon, zinc oxide, lithium aluminate, lithium niobate, germanium, lithium gallate, spinel, and quaternary tetragonal oxides sharing the γ

-LiAlO₂ structure,

a top surface of the semipolar III-nitride active region is planar, semipolar, and substantially parallel to a main surface of the foreign substrate, and

the nitride layer includes at least a 10 micrometer thickness.

19. The light emitting device of claim 16, wherein:

a top surface of the semipolar III-nitride active region is planar, semipolar, and substantially parallel to a main surface of the foreign substrate, and

the nitride layer includes at least a 10 micrometer thickness.

20. The light emitting device of claim 16, wherein:

the nitride layer comprises a laterally overgrown template, and

a top surface of the semipolar III-nitride active region is planar, semipolar, and substantially parallel to a main surface of the foreign substrate.