CMP pad construction with composite material properties using additive manufacturing processes

• US 10,537,974 B2
• Filed: 01/22/2018
• Issued: 01/21/2020
• Est. Priority Date: 10/17/2014
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Bajaj, Rajeev, Krishnan, Kasiraman, Orilall, Mahendra C., Redfield, Daniel, Redeker, Fred C., Patibandla, Nag B., Menk, Gregory E., Fung, Jason G., Perry, Russell Edward, Davenport, Robert E.
• Primary Examiner(s): Eley, Timothy V
• Application Number:
  US15/876,436
• Publication Number:
  US 20180161954A1
• Time in Patent Office: 729 Days
• CPC Class Codes: B24B 37/205 provided with a window for inspecting the surface of the work being lapped
• CPC Class Codes: B24B 37/22 characterised by a multi-layered structure
• CPC Class Codes: B24B 37/24 characterised by the composition or properties of the pad materials
• CPC Class Codes: B24B 37/26 characterised by the shape of the lapping pad surface, e.g. grooved
• CPC Class Codes: B24D 18/0018 by electrolytic deposition
• CPC Class Codes: B24D 18/0045 by stacking sheets of abrasive material
• CPC Class Codes: B29C 64/112 using individual droplets, e.g. from jetting heads
• CPC Class Codes: B33Y 80/00 Products made by additive manufacturing

Abstract

Embodiments of the disclosure generally provide polishing pads includes a composite pad body and methods for forming the polishing pads. One embodiment provides a polishing pad including a composite pad body. The composite pad body includes one or more first features formed from a first material or a first composition of materials, and one or more second features formed from a second material or a second composition of materials, wherein the one or more first features and the one or more second features are formed by depositing a plurality of layers comprising the first material or first composition of materials and second material or second composition of materials.

Claims

1. A method of forming a polishing pad, comprising:

depositing a plurality of composite layers with a printer to reach a target thickness, wherein depositing the plurality of composite layers comprises;

depositing a first material over one or more first regions of a surface; and

depositing a second material over one or more second regions of the surface, wherein the one or more first regions and the one or more second regions form a continuous part of each of the plurality of composite layers; and

solidifying the plurality of composite layers to form a composite pad body having one or more first features comprising the first material and one or more second features comprising the second material, wherein the one or more first features and the one or more second features form a unitary body.

2. The method of claim 1, wherein the first material comprises a first composition of materials that is formed by depositing droplets of a third material and a fourth material.

3. The method of claim 2, wherein the second material comprises a second composition of materials that is formed by depositing droplets of a fifth material and a sixth material.

4. The method of claim 1, further comprising depositing a plurality of discontinuous layers with a printer after depositing the plurality of composite layers, wherein each of the discontinuous layer comprises one or more feature regions that are disconnected from one another.

5. The method of claim 4, wherein the one or more feature regions are disposed over the one or more first regions.

6. The method of claim 4, wherein depositing each of the discontinuous layers comprises:

depositing the first material and the second material on each of one or more feature regions, wherein the second material surrounds the first material in each feature region.

7. The method of claim 1, wherein the first material comprises one or more thermoplastic polymers.

8. The method of claim 7, wherein the one or more thermoplastic polymers comprises polyurethane, polypropylene, polystyrene, polyacrylonitrile, polymethyle methacrylate, polychlorotrifluoroethylene, polytetrafluoroethylene, polyoxymethylene, polycarbonate, polyimide, polyetheretherketone, polyphenylene sulfide, polyether sulfone, acrylonitrile butadiene styrene (ABS), polyetherimide, polyamides, melamines, polyesters, polysulfones, polyvinyl acetates, fluorinated hydrocarbons, and acrylate, copolymers, grafts, and mixtures thereof.