CMP pad construction with composite material properties using additive manufacturing processes
First Claim
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1. A method of forming a polishing pad, comprising:
- depositing a plurality of composite layers with a printer to reach a target thickness, wherein depositing the plurality of composite layers comprises;
depositing a first material over one or more first regions of a surface; and
depositing a second material over one or more second regions of the surface, wherein the one or more first regions and the one or more second regions form a continuous part of each of the plurality of composite layers; and
solidifying the plurality of composite layers to form a composite pad body having one or more first features comprising the first material and one or more second features comprising the second material, wherein the one or more first features and the one or more second features form a unitary body.
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Abstract
Embodiments of the disclosure generally provide polishing pads includes a composite pad body and methods for forming the polishing pads. One embodiment provides a polishing pad including a composite pad body. The composite pad body includes one or more first features formed from a first material or a first composition of materials, and one or more second features formed from a second material or a second composition of materials, wherein the one or more first features and the one or more second features are formed by depositing a plurality of layers comprising the first material or first composition of materials and second material or second composition of materials.
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Citations
8 Claims
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1. A method of forming a polishing pad, comprising:
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depositing a plurality of composite layers with a printer to reach a target thickness, wherein depositing the plurality of composite layers comprises; depositing a first material over one or more first regions of a surface; and depositing a second material over one or more second regions of the surface, wherein the one or more first regions and the one or more second regions form a continuous part of each of the plurality of composite layers; and solidifying the plurality of composite layers to form a composite pad body having one or more first features comprising the first material and one or more second features comprising the second material, wherein the one or more first features and the one or more second features form a unitary body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification