Pressure sensing apparatuses and methods

• US 10,545,058 B2
• Filed: 03/07/2016
• Issued: 01/28/2020
• Est. Priority Date: 09/10/2010
• Status: Active Grant

• Current Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford University)
• Original Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford University)
• Inventors: Bao, Zhenan, Mannsfeld, Stefan Christian Bernhardt, Locklin, Jason, Tee, Chee-Keong
• Primary Examiner(s): Miller, Daniel R
• Application Number:
  US15/062,841
• Publication Number:
  US 20160187209A1
• Time in Patent Office: 1,422 Days
• CPC Class Codes: G01L 1/146 for measuring force distributions, e.g. using force arrays G01L1/148 takes precedence
• CPC Class Codes: G01L 1/148 using semiconductive material, e.g. silicon
• CPC Class Codes: G06F 2203/04102 Flexible digitiser, i.e. constructional details for allowing the whole digitising part of a device to be flexed or rolled like a sheet of paper
• CPC Class Codes: G06F 2203/04103 Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
• CPC Class Codes: G06F 2203/04107 Shielding in digitiser, i.e. guard or shielding arrangements, mostly for capacitive touchscreens, e.g. driven shields, driven grounds
• CPC Class Codes: G06F 3/0412 Digitisers structurally integrated in a display
• CPC Class Codes: G06F 3/0445 using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
• CPC Class Codes: H01L 29/84 controllable by variation of applied mechanical force, e.g. of pressure
• CPC Class Codes: H10K 10/464 Lateral top-gate IGFETs comprising only a single gate
• CPC Class Codes: H10K 85/623 containing five rings, e.g. pentacene
• CPC Class Codes: Y10T 156/10 Methods of surface bonding and/or assembly therefor
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

Sensors, sensing arrangements and devices, and related methods are provided. In accordance with an example embodiment, an impedance-based sensor includes a flexible dielectric material and generates an output based on pressure applied to the dielectric material and a resulting compression thereof. In certain embodiments, the dielectric material includes a plurality of regions separated by gaps and configured to elastically deform and recover in response to applied pressure.

Claims

1. An apparatus comprising:

a dielectric structure including a plurality of elastomeric regions separated from one another by space regions, the elastomeric regions being configured and arranged, in response to pressure, to compress and thereby exhibit a changed effective dielectric constant corresponding to a state of compression of the elastomeric regions, wherein the respective elastomeric regions are configured and arranged to exhibit a different effective dielectric constant, relative to other ones of the elastomeric regions, in response to different pressures being applied to the respective elastomeric regions; and

a sense circuit including a plurality of impedance-based sensors and including at least one electrode adjacent the dielectric structure, each impedance-based sensor including a portion of the dielectric structure and configured and arranged to respond to the change in dielectric constant by providing an indication of the pressure applied to the dielectric structure adjacent each sensor, wherein the elastomeric regions are configured and arranged to compress in response to applied pressure including pressure of 1 kPa or a change in the applied pressure of 1 kPa and arranged with the space regions and the sense circuit to provide respective outputs from each elastomeric region, wherein the elastomeric regions have width and thickness dimensions and including at least one of the plurality of elastomeric regions having a cross-section with a width dimension being less than 50 microns, and the elastomeric regions are configured and arranged to, relative to one another and a distance between the elastomeric regions, reversibly store and release energy via elastic deformation of the respective elastomeric regions, and wherein during the state of compression, the plurality of elastomeric regions are located between the at least one electrode and another electrode adjacent the dielectric structure.

2. The apparatus of claim 1, wherein the elastomeric regions are configured and arranged to, relative to one another and with a distance between the elastomeric regions, reversibly store and release energy via elastic deformation of the respective elastomeric regions, and each of the one or more-of the elastomeric regions has a cross-sectional width dimension of less than 5 microns and has a tapering shape.

3. The apparatus of claim 1, wherein each sensor is to provide an output indicative of a state of compression of the elastomeric region adjacent the sensor, and the sense circuit is to provide an indication of a position of the respective sensor providing each output.

4. The apparatus of claim 1, wherein the at least one of the plurality of elastomeric regions has a width dimension being greater than 5 microns and less than 50 microns, said width dimension corresponding to a cross section of said at least one of the plurality of elastomeric regions.

5. The apparatus of claim 1, wherein the elastomeric regions are further configured and arranged to compress in response to applied pressure, or a change in the applied pressure of 3 Pascals.

6. The apparatus of claim 1, wherein the sense circuit is to sense pressure differences from an arterial or venial vessel wall, and wherein the at least one electrode includes two opposing electrodes, each adjacent the dielectric structure.

7. A method, comprising:

forming a plurality of sensors in an array, each sensor respectively including an impedance-based sensor having a dielectric material and opposing electrodes separated by the dielectric material by a distance of less than 100 um in an uncompressed state, each sensor configured and arranged to compress in response to applied pressure including pressure of 1 kPa or a change in the applied pressure of 1 kPa and generate an output from at least one of the opposing electrodes based on pressure applied to the dielectric material and changes, responsive to the applied pressure, in a dielectric property of an elastomeric material in the dielectric material, wherein the elastomeric material is configured and arranged with a plurality of elastomeric regions; and

coupling the sensors with interconnecting circuits configured and arranged to provide an output indicative of, for each sensor, both the pressure applied to the dielectric material and a location of the applied pressure that is distinct relative to locations of other sensors in the array, wherein the elastomeric regions have width and thickness dimensions and including at least one of the plurality of elastomeric regions having a cross-section with a width dimension being less than 50 microns, and the elastomeric regions are configured and arranged to, relative to one another and a distance between the elastomeric regions, reversibly store and release energy via elastic deformation of the respective elastomeric regions, and wherein during the state of compression.

8. The method of claim 7, wherein the plurality of sensors in the array include a micro-structured dielectric material between the opposing electrodes.

9. The method of claim 8, further including forming the micro-structured dielectric material by partitioning the micro-structured dielectric material into sections, wherein the micro-structured dielectric material includes microstructures that are shaped to set a pressure sensitivity of the sensors.

10. The method of claim 7, further including applying sequential applications of pressure to the sensor array, with at least one of the applications of pressure including a pressure change of less than 1 kPa, and wherein the sensors and the interconnecting circuits provide outputs indicative of the pressure applied and the location of the applied pressure for each sequential application.

11. The method of claim 10, the method further including, in response to each sequential application of pressure, the dielectric material compressing at a cross-section thereof and recovering therefrom in less than 300 msecs, thereby, exhibiting a changed dielectric constant corresponding to a state of compression of the dielectric material.

12. An apparatus comprising:

an elastomer including a plurality of elastomeric regions separated from one another by space regions, each of the elastomeric regions being configured and arranged to compress in response to applied pressure including pressure of 1 kPa or a change in the applied pressure of 1 kPa and thereby exhibit a changed dielectric constant corresponding to a state of compression of the elastomer regions; and

a sense circuit including a plurality of impedance-based sensors, each impedance-based sensor including a portion of the elastomer and having opposing electrodes separated by the portion of the elastomer by a distance of less than 100 um before the state of compression, each sensor configured and arranged to respond to the changed dielectric constant by providing an indication of the pressure applied to the portion of the elastomer between the opposing electrodes of the respective sensor, wherein the elastomeric regions have width and thickness dimensions and including at least one of the plurality of elastomeric regions having a cross-section with a width dimension being less than 50 microns, and the elastomeric regions are configured and arranged to, relative to one another and a distance between the elastomeric regions, reversibly store and release energy via elastic deformation of the respective elastomeric regions, and wherein during the state of compression.

13. The apparatus of claim 12, wherein the respective elastomeric regions are configured and arranged to exhibit a different effective dielectric constant, relative to other ones of the elastomeric regions, in response to different pressures being applied to the respective elastomeric regions.