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High-voltage supply unit and circuit arrangement for generating a high voltage for a particle beam apparatus

  • US 10,546,717 B2
  • Filed: 03/19/2018
  • Issued: 01/28/2020
  • Est. Priority Date: 04/23/2015
  • Status: Active Grant
First Claim
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1. A circuit arrangement for generating a high voltage for a particle beam apparatus, comprisingat least one high-voltage supply unit for providing an output voltage;

  • at least one noise suppression unit, which is linked to the high-voltage supply unit by way of at least one link line for guiding the output voltage of the high-voltage supply unit into the noise suppression unit, wherein the noise suppression unit comprises;

    at least one noise measurement device for registering noise of the output voltage,at least one amplifier-filter unit, wherein the amplifier-filter unit is linked to the noise measurement device by way of an eighth line,at least one control loop, wherein the control loop is linked to the amplifier-filter unit by a ninth line and wherein the control loop is linked to the noise measurement device by a tenth line, and comprisesat least one high-voltage connector, at which the high voltage is present, wherein the high-voltage connector is linked to the control loop by way of an eleventh line.

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