Method to recess cobalt for gate metal application

• US 10,546,785 B2
• Filed: 03/09/2017
• Issued: 01/28/2020
• Est. Priority Date: 03/09/2017
• Status: Active Grant

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.), International Business Machines Corporation, Lam Research Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Jacobi, Georges, Kamineni, Vimal K., Knarr, Randolph F., Pranatharthiharan, Balasubramanian, Sankarapandian, Muthumanickam
• Primary Examiner(s): Pizarro, Marcos D.
• Assistant Examiner(s): Crite, Antonio B
• Application Number:
  US15/454,445
• Publication Number:
  US 20180261507A1
• Time in Patent Office: 1,055 Days
• CPC Class Codes: H01L 21/28088 the final conductor layer next to the insulator being a composite, e.g. TiN
• CPC Class Codes: H01L 21/28247 passivation or protection of the electrode, e.g. using re-oxidation
• CPC Class Codes: H01L 21/823456 gate conductors with different shapes, lengths or dimensions
• CPC Class Codes: H01L 21/823871 interconnection or wiring or contact manufacturing related aspects
• CPC Class Codes: H01L 29/401 Multistep manufacturing processes
• CPC Class Codes: H01L 29/4958 with a multiple layer structure
• CPC Class Codes: H01L 29/4966 the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2 H01L29/4908, H01L29/4983 take precedence
• CPC Class Codes: H01L 29/66545 using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate

Abstract

After forming a material stack including a gate dielectric, a work function metal and a cobalt gate electrode in a gate cavity formed by removing a sacrificial gate structure, the cobalt gate electrode is recessed by oxidizing the cobalt gate electrode to provide a cobalt oxide layer on a surface of the cobalt gate electrodes and removing the cobalt oxide layer from the surface of the cobalt gate electrodes by a chemical wet etch. The oxidation and oxide removal steps can be repeated until the cobalt gate electrode is recessed to any desired thickness. The work function metal can be recessed after the recessing of the cobalt gate electrode is completed or during the recessing of the cobalt gate electrode.

Claims

1. A method of forming a semiconductor structure comprising:

providing a structure comprising a gate cavity exposing a portion of a semiconductor material portion, wherein a gate spacer surrounds the gate cavity;

forming a material stack comprising, from bottom to top, a gate dielectric, a work function metal and a cobalt gate electrode within the gate cavity;

recessing the cobalt gate electrode, wherein the recessing the cobalt gate electrode is performed by repeating steps of oxidizing the cobalt gate electrode utilizing an oxidizing agent to form a cobalt oxide layer on a surface of a remaining portion of the cobalt gate electrode and removing the cobalt oxide layer utilizing a wet chemical etchant;

recessing the work function metal, wherein the recessing of the work function metal is performed prior to the removing of the last cobalt oxide layer;

recessing the gate dielectric; and

forming a gate cap above the recessed cobalt gate electrode to completely fill the gate cavity.

2. The method of claim 1, wherein the gate cap has a bottommost surface contacting topmost surfaces of the recessed gate dielectric, the recessed work function metal and the recessed cobalt gate electrode.

3. The method of claim 1, wherein the providing of the structure comprises:

forming a sacrificial gate structure on the portion of the semiconductor material portion;

forming the gate spacer on sidewalls of the sacrificial gate structure;

forming a source region and a drain region on opposites of the sacrificial gate structure;

forming an interlevel dielectric (ILD) layer on outer sidewalls of the gate spacer and surrounding the sacrificial gate structure; and

removing the sacrificial gate structure by etching.

4. The method of claim 1, wherein the oxidizing agent is selected from the group consisting of ozonated deionized water (DIO₃), a hydrogen peroxide (H₂O₂) solution, and an SC-1 solution containing a mixture of H₂O₂ and an ammonia-derived base, wherein the ammonia-derived base comprises NH₄OH or quaternary NH₄OH.

5. The method of claim 1, wherein the wet chemical etch uses an acidic etching agent comprising one or more organic acids or inorganic acids.

6. The method of claim 1, wherein the recessing of the work function metal is performed after the recessing the cobalt gate electrode.

7. The method of claim 1, wherein the forming of the material stack comprises:

forming a gate dielectric layer on sidewalls and a bottom surface of the gate cavity and on a topmost surface of the ILD layer;

forming a work function metal layer on the gate dielectric layer;

forming a cobalt gate electrode layer on the work function metal layer, wherein the cobalt gate electrode layer completely fills the gate cavity; and

removing portions of the cobalt gate electrode layer, the work function metal layer and the gate dielectric layer from the topmost surface of the ILD layer.

8. The method of claim 1, wherein the work function metal comprises TiN.

9. The method of claim 8, wherein the recessing of the work function metal is carried out using a H₂O₂ solution or an SC-1 solution containing a mixture of H₂O₂ and an ammonia-derived base, wherein the ammonia-derived base comprises NH₄OH or quaternary NH₄OH, and the H₂O₂ solution or the SC-1 solution is heated to a temperature above 70°

C.

10. A method of forming a semiconductor structure comprising:

providing a structure comprising a first gate cavity of a first width and exposing a first portion of a semiconductor material portion and a second gate cavity of a second width that is greater than the first width and exposing a second portion of the semiconductor material portion, wherein a first gate spacer surrounds the first gate cavity, and a second gate spacer surrounds the second gate cavity;

forming a first material stack comprising, from bottom to top, a first gate dielectric, a first work function metal and a first cobalt gate electrode within the first gate cavity, and a second material stack comprising, from bottom to top, a second gate dielectric, a second work function metal and a second cobalt gate electrode within the second gate cavity;

recessing the first cobalt gate electrode and the second cobalt gate electrode, wherein the recessing the first cobalt gate electrode and the second cobalt gate electrode is performed by repeating steps of oxidizing the first cobalt gate electrode and the second cobalt gate electrode utilizing an oxidizing agent to form a cobalt oxide layer on a surface of each of a remaining portion of the first cobalt gate electrode and a remaining portion of the second cobalt gate electrode and removing each cobalt oxide layer utilizing a wet chemical etchant;

recessing the first work function metal and the second work function metal;

recessing the first gate dielectric and the second gate dielectric; and

forming a first gate cap above the recessed first cobalt gate electrode to completely fill the first gate cavity and a second gate cap above the recessed second cobalt gate electrode to completely fill the second gate cavity.

11. The method of claim 10, wherein the first gate cap has a bottommost surface contacting topmost surfaces of the recessed first gate dielectric, the recessed first work function metal and the recessed cobalt gate electrode, and the second gate cap has a bottommost surface contacting topmost surfaces of the recessed second gate dielectric, the recessed work function metal and the recessed cobalt gate electrode.

12. The method of claim 10, wherein the oxidizing agent is selected from the group consisting of ozonated deionized water (DIO₃), a hydrogen peroxide (H₂O₂) solution, and an SC-1 solution containing a mixture of H₂O₂ and an ammonia-derived base, wherein the ammonia-derived base comprises ammonium hydroxide (NH₄OH) or quaternary NH₄OH.

13. The method of claim 10, wherein the wet chemical etch uses an acidic etching agent comprising one or more organic acids or inorganic acids.

14. The method of claim 10, wherein the recessed first cobalt gate electrode has a thickness the same as a thickness of the recessed second cobalt gate electrode.

15. The method of claim 10, wherein the recessing of the first work function metal and the second work function metal is carried out using a H₂O₂ solution or an SC-1 solution containing a mixture of H₂O₂ and an ammonia-derived base, wherein the ammonia-derived base comprises NH₄OH or quaternary NH₄OH, and the H₂O₂ solution or the SC-1 solution is heated to a temperature above 70°

C.