Laser-assisted micromachining systems and methods
First Claim
Patent Images
1. A laser-assisted micromachining system comprising:
- a laser beam source;
a cutting tool;
means for engaging a workpiece with the cutting tool;
optical elements arranged to define a path of a laser beam emitted by the laser beam source, the optical elements comprising at least a first mirror mounted with mounting means that is in fixed relation to the laser beam source and at least a second mirror; and
means for adjustably mounting the second mirror to project the laser beam onto the workpiece in proximity to the cutting tool and at an incidence angle relative to a surface of the workpiece, the means for adjustably mounting the second mirror comprising a rotatable fixture that provides independent rotational movement of the second mirror about at least two axes.
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Abstract
Laser-assisted micromachining methods and systems capable of providing flexible beam positioning and low incident angles. Such laser-assisted micromachining systems preferably include a laser beam source, a cutting tool, means for engaging a workpiece with the cutting tool, optical elements arranged to define a path of a laser beam emitted by the laser beam source wherein the optical elements include at least a first mirror mounted in fixed relation to the laser beam source, and means for adjustably mounting a second mirror to project the laser beam onto the workpiece in proximity to the cutting tool and at an incidence angle relative to a surface of the workpiece.
17 Citations
18 Claims
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1. A laser-assisted micromachining system comprising:
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a laser beam source; a cutting tool; means for engaging a workpiece with the cutting tool; optical elements arranged to define a path of a laser beam emitted by the laser beam source, the optical elements comprising at least a first mirror mounted with mounting means that is in fixed relation to the laser beam source and at least a second mirror; and means for adjustably mounting the second mirror to project the laser beam onto the workpiece in proximity to the cutting tool and at an incidence angle relative to a surface of the workpiece, the means for adjustably mounting the second mirror comprising a rotatable fixture that provides independent rotational movement of the second mirror about at least two axes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A laser-assisted micromachining system comprising:
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a laser beam source comprising a laser head mounted to a fixed structure with a 1-axis stage and a rotatable table; a cutting tool; means for engaging a workpiece with the cutting tool; optical elements arranged to define a path of a laser beam emitted by the laser beam source, the optical elements comprising at least first, second, and third mirrors, the first and third mirrors being mounted with mounting means that are each in fixed relation to the laser beam source and the second mirror being coupled to the cutting tool; and means for adjustably mounting the second mirror to project the laser beam onto the workpiece in proximity to the cutting tool and at an incidence angle relative to a surface of the workpiece, the means for adjustably mounting the second mirror comprising a rotatable fixture that provides independent rotational movement of the second mirror about at least two axes. - View Dependent Claims (15, 16)
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17. A laser-assisted micromachining system comprising:
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a laser beam source comprising a laser head mounted to a fixed structure with a 1-axis stage and a rotatable table; a cutting tool; means for engaging a workpiece with the cutting tool; optical elements arranged to define a path of a laser beam emitted by the laser beam source, the optical elements comprising at least first, second, and third mirrors, the first and third mirrors being mounted with mounting means that are each in fixed relation to the laser beam source and the second mirror being coupled to the cutting tool; means for adjustably mounting the second mirror to project the laser beam onto the workpiece in proximity to the cutting tool and at an incidence angle relative to a surface of the workpiece; and a spindle configured to rotate the cutting tool, wherein the means for adjustably mounting the second mirror comprises a rotatable fixture coupled to the spindle that provides independent rotational movement of the second mirror about at least two axes and provides for rotational movement of the second mirror around the cutting tool. - View Dependent Claims (18)
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Specification