Groove-type drying structure

• US 10,553,460 B2
• Filed: 01/09/2018
• Issued: 02/04/2020
• Est. Priority Date: 03/23/2016
• Status: Active Grant

• Current Assignee: Changzhou SC Exact Equipment Co., Ltd.
• Original Assignee: Changzhou SC Exact Equipment Co., Ltd.
• Inventors: Zuo, Guojun, Dai, Hongye
• Primary Examiner(s): Gravini, Stephen M
• Application Number:
  US15/865,605
• Publication Number:
  US 20180130676A1
• Time in Patent Office: 756 Days
• Field of Search: 34231
• CPC Class Codes: F26B 21/04 partly outside the drying enclosure F26B21/006 takes precedence
• CPC Class Codes: F26B 21/10 Temperature; Pressure F26B23/026 takes precedence
• CPC Class Codes: F26B 9/06 in stationary drums or chambers
• CPC Class Codes: H01L 21/67034 for drying

Abstract

A groove-type drying structure includes a drying groove having a cover. The drying groove is internally provided with an inner groove body. The inner groove body forms air current channels with the two sides and the bottom part of the drying groove. The upper part of the drying groove is provided with an air outlet, and the inner groove body is provided with an air compensation port. A heating device and a temperature detector are installed on the air current channels at the two sides. An air wheel is arranged in the air current channel at the bottom part, an air inlet of the air wheel is communicated with an inner chamber of the inner groove body, and a rotating shaft of the air wheel is connected with a motor installed in the bottom part of the drying groove.

Claims

1. A groove-type drying structure, comprising a drying groove (1) having a cover (7), wherein an inner groove body (5) is installed inside the drying groove (1), the inner groove body (5) is a hollow structure having an inner chamber therein, two first gaps are respectively provided between two sides of the inner groove body (5) and corresponding two sides of the drying groove (1) and a second gap is provided between a bottom part of the inner groove body (5) and a corresponding bottom part of the driving groove (1), the first gaps and the second gap are connected to form air current channels (4) such that the air current channels (4) are communicated with the inner chamber of the inner groove body (5), an upper part of the drying groove (1) is provided with an air outlet (6), and the inner groove body (5) is provided with an air compensation port (8) communicated with an outside environment of the drying groove (1);

a heating device (2) and a temperature detector (3) are installed in each of the first gaps of the air current channels, an air wheel (9) is arranged in the second gap of the air current channels, an air inlet of the air wheel is communicated with the inner chamber of the inner groove body (5), and a rotating shaft of the air wheel (9) is connected with a motor (10) installed in the bottom part of the drying groove (1).

2. The groove-type drying structure according to claim 1, wherein:

the bottom part of the inner groove body (5) has a lower opening communicating the inner chamber of the inner groove body (5) with the second gap of the air current channels (4), and an upper part of the inner groove body (5) has an upper opening communicating the inner chamber of the inner groove body (5) with the first gaps of the air current channels (4); and

when the motor (10) is electrified to drive the air wheel (9) to rotate during working, air in the inner chamber of the inner groove body (5) is pumped through the lower opening into the second gap of the air current channels (4) and passes through the first gaps of the air current channels (4), the air is heated when passing through the heating device (2) in each of the first gaps of the air current channels (4) and then enters the inner chamber of the inner groove body (5) through the upper opening, and the heated air passes through a load bearing part (11) and the silicon wafer and is pumped by the air wheel (9) into the second gap of the air current channels (4), so as to form an air cycle in the drying groove (1).