Edge ring for a substrate processing chamber
First Claim
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1. An edge ring for a substrate processing chamber, the edge ring comprising:
- an annular body comprising a first material; and
a plurality of thermal breaks comprising a second material having a higher coefficient of thermal conductivity relative to the first material, whereineach of the plurality of thermal breaks is encapsulated within the first material of the annular body, the thermal breaks disposed perpendicular to a centerline of the annular body and configured to disperse heat laterally throughout the edge ring while inhibiting axial heat transfer along the centerline.
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Abstract
An edge ring and process for fabricating an edge ring are disclosed herein. In one embodiment, an edge ring includes an annular body and a plurality of thermal breaks disposed within the annular body. The thermal breaks are disposed perpendicular to a center line of the annular body of the edge ring.
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Citations
20 Claims
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1. An edge ring for a substrate processing chamber, the edge ring comprising:
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an annular body comprising a first material; and a plurality of thermal breaks comprising a second material having a higher coefficient of thermal conductivity relative to the first material, wherein each of the plurality of thermal breaks is encapsulated within the first material of the annular body, the thermal breaks disposed perpendicular to a centerline of the annular body and configured to disperse heat laterally throughout the edge ring while inhibiting axial heat transfer along the centerline. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A processing chamber, comprising:
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a substrate support member configured to process a substrate; and an edge ring supported by the substrate support member, the edge ring comprising; an annular body comprising a first material; and a plurality of thermal breaks comprising a second material having a higher coefficient of thermal conductivity relative to the first material, wherein each of the plurality of thermal breaks is encapsulated within the first material of the annular body, the thermal breaks disposed perpendicular to a centerline of the annular body and configured to disperse heat laterally throughout the edge ring while inhibiting axial heat transfer along the centerline. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification