Discrete source mask optimization
First Claim
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1. A method comprising:
- generating, by a hardware computer system, a discrete pupil profile based on a desired pupil profile designed for imaging a portion of a design layout onto a substrate using a lithographic projection apparatus;
selecting a discrete change, from among a plurality of different discrete changes, to the discrete pupil profile, wherein the selecting further comprises calculating an estimated change in a value of a cost function for each of the plurality of discrete changes;
applying, by the hardware computer system, the selected discrete change to the discrete pupil profile; and
generating electronic data, based on the discrete profile to which the selected discrete change has been applied, for use in configuring an optical component of, or for, the lithographic projection apparatus.
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Abstract
A method for improving a lithographic process for imaging a portion of a design layout onto a substrate using a lithographic projection apparatus, the method including: calculating a discrete pupil profile based on a desired pupil profile; selecting a discrete change to the discrete pupil profile; and applying the selected discrete change to the discrete pupil profile. The methods according to various embodiments disclosed herein may reduce the computational cost of discrete optimization from O(an) to O(n) wherein a is constant and n is the number of knobs that can generate discrete change in the pupil profile.
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Citations
20 Claims
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1. A method comprising:
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generating, by a hardware computer system, a discrete pupil profile based on a desired pupil profile designed for imaging a portion of a design layout onto a substrate using a lithographic projection apparatus; selecting a discrete change, from among a plurality of different discrete changes, to the discrete pupil profile, wherein the selecting further comprises calculating an estimated change in a value of a cost function for each of the plurality of discrete changes; applying, by the hardware computer system, the selected discrete change to the discrete pupil profile; and generating electronic data, based on the discrete profile to which the selected discrete change has been applied, for use in configuring an optical component of, or for, the lithographic projection apparatus. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A computer program product comprising a non-transitory computer readable medium having instructions recorded thereon, the instructions, when executed by a computer system, configured to at least:
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generate a discrete pupil profile based on a desired pupil profile designed for imaging a portion of a design layout onto a substrate using a lithographic projection apparatus; select a discrete change, from among a plurality of different discrete changes, to the discrete pupil profile, wherein the selection further comprises calculation of an estimated change in a value of a cost function for each of the plurality of discrete changes; apply the selected discrete change to the discrete pupil profile; and generate electronic data, based on the discrete profile to which the selected discrete change has been applied, for use in configuring an optical component of, or for, a lithographic projection apparatus. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. A computer program product comprising a non-transitory computer readable medium having instructions recorded thereon, the instructions, when executed by a computer system, configured to at least:
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generate a discrete pupil profile based on a desired pupil profile designed for imaging a portion of a design layout onto a substrate using a lithographic projection apparatus; select a discrete change, from among a plurality of different discrete changes, to the discrete pupil profile, wherein the selection further comprises calculation of an estimated change in a value of a cost function for each of the plurality of discrete changes; apply the selected discrete change to the discrete pupil profile; and display, on an electronic display communicatively linked with the computer system, the discrete pupil profile to which the selected discrete change has been applied. - View Dependent Claims (19, 20)
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Specification