Variable conductance gas distribution apparatus and method

• US 10,561,975 B2
• Filed: 04/17/2017
• Issued: 02/18/2020
• Est. Priority Date: 10/07/2014
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM IP Holdings B.V.
• Inventors: Shugrue, John Kevin
• Primary Examiner(s): Cahill, Jessica
• Application Number:
  US15/489,453
• Publication Number:
  US 20170216762A1
• Time in Patent Office: 1,037 Days
• Field of Search: 15634533, 15634534
• CPC Class Codes: B01D 53/0446 Means for feeding or distributing gases
• CPC Class Codes: B01D 53/047 Pressure swing adsorption
• CPC Class Codes: C23C 16/45544 characterized by the apparatus
• CPC Class Codes: C23C 16/45563 Gas nozzles
• CPC Class Codes: C23C 16/45589 Movable means, e.g. fans
• CPC Class Codes: F04B 39/1013 the members being of the poppet valve type
• CPC Class Codes: F16K 1/32 Details details of more general applicability F16K25/00 - F16K51/00
• CPC Class Codes: F16K 1/38 of conical shape
• CPC Class Codes: F16K 1/385 contacting in the closed position, over a substantial axial length, a seat surface having the same inclination
• CPC Class Codes: Y10T 137/87265 Dividing into parallel flow paths with recombining
• CPC Class Codes: Y10T 137/87281 System having plural inlets

Abstract

Variable conductance gas distribution systems, reactors and systems including the variable conductance gas distribution systems, and methods of using the variable conductance gas distribution systems, reactors, and systems are disclosed. The variable conductance gas distribution systems allow rapid manipulation of gas-flow conductance through the gas distribution system.

Claims

1. A variable conductance gas distribution system comprising:

a gas inlet;

a first member having a plurality of concentrically aligned first features and in fluid communication with the gas inlet, wherein each first feature of the plurality of first features comprises a common center;

a second member having a plurality of concentrically aligned second features and in fluid communication with the gas inlet, wherein each second feature of the plurality of second features also comprises the common center; and

a mechanism coupled to at least one of the first member and the second member, the mechanism configured to move the at least one of the first member and the second member relative to the other member to manipulate an amount of gas flow between the plurality of first features and the plurality of second features,

wherein, when the gas distribution system is open, gas flows between the plurality of first features and the plurality of second features,

wherein, when the gas distribution system is closed, a seal forms between the plurality of first features and the plurality of second features, and

wherein, using the mechanism, the first member and the second member are spaced apart a first distance to control an amount of a first gas flowing from the gas inlet to an exhaust source at a first conductance for a first process, spaced apart a second distance to control an amount of a second gas flowing from the gas inlet to the exhaust source at a second conductance for a second process, and wherein the first member and the second member can be moved to another position to form the seal.

2. The variable conductance gas distribution system of claim 1, wherein the plurality of first features are tapered.

3. The variable conductance gas distribution system of claim 2, wherein the plurality of first features are frustum shaped.

4. The variable conductance gas distribution system of claim 3, wherein the plurality of second features are frustum shaped.

5. The variable conductance gas distribution system of claim 1, wherein the plurality of second features are tapered.

6. The variable conductance gas distribution system of claim 1, wherein the plurality of first features comprises a first annulus and the plurality of second features comprises a second annulus concentric with the first annulus, wherein when the gas distribution system is closed the first annulus is directly adjacent to and in sealing contact with the second annulus.

7. The variable conductance gas distribution system of claim 1, wherein the second gas comprises a reactant gas.

8. The variable conductance gas distribution system of claim 1, wherein the first gas comprises a purge gas.

9. The variable conductance gas distribution system of claim 1, wherein the mechanism moves the first member and the second member together prior to the gas inlet receiving the second gas.

10. The variable conductance gas distribution system of claim 1, wherein the mechanism moves the first member and the second member apart prior to the gas inlet receiving the first gas.

11. The variable conductance gas distribution system of claim 1, wherein one or more of the plurality of the first features and one or more of the plurality of second features comprise apertures to allow gas to flow there through when a seal is formed between the plurality of first features and the plurality of second features.

12. The variable conductance gas distribution system of claim 1, wherein the plurality of first features and the plurality of second features are all concentric.

13. The variable conductance gas distribution system of claim 1, further comprising a plurality of coupling elements coupled to the plurality of first features.

14. The variable conductance gas distribution system of claim 1, further comprising a plurality of coupling elements coupled to the plurality of second features.

15. The variable conductance gas distribution system of claim 1, wherein when the gas distribution system is closed, the first features alternate with the second features to form the seal.

16. The variable conductance gas distribution system of claim 1, wherein the plurality of first features of the first member comprises a first annulus and a second annulus and the plurality of second features comprises a center portion, a third annulus, and a fourth annulus, wherein when the gas distribution system is closed the first annulus extends around the center portion, the third annulus extends around the first annulus, the second annulus extends around the third anulus, and the fourth annulus extends around the second annulus.