Waterproof microphone and associated packing techniques
First Claim
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1. A device, comprising:
- a microelectromechanical system (MEMS) device;
a housing enclosing the MEMS device, wherein a chamber is formed between the housing and the MEMS device, the chamber is a single continuous space fluidically connected to an exterior of the housing, the MEMS device is a rectangle in a sectional view, the chamber is in contact with at least three sides of the rectangle in the sectional view of the MEMS device; and
a liquid-resistant air inlet passive device (LRAPD), the LRAPD being separate from the housing and attached to the housing, the LRAPD including at least one channel connecting the exterior of the housing with the chamber.
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Abstract
Aspects of the disclosure provide a waterproof packaging technique for fabricating waterproof microphones in mobile devices. A device based on the waterproof packaging technique can include a microelectromechanical system (MEMS) device, a housing enclosing the MEMS device, and a liquid-resistant air inlet passive device (LRAPD) on the housing. The LRAPD can include at least one channel connecting an exterior of the housing with a chamber formed between the housing and the MEMS device. An inside surface of the channel can be coated with a liquid-repellant coating. In some examples, the liquid-repellant coating can be a self-assembled monolayer (SAM) coating.
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Citations
18 Claims
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1. A device, comprising:
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a microelectromechanical system (MEMS) device; a housing enclosing the MEMS device, wherein a chamber is formed between the housing and the MEMS device, the chamber is a single continuous space fluidically connected to an exterior of the housing, the MEMS device is a rectangle in a sectional view, the chamber is in contact with at least three sides of the rectangle in the sectional view of the MEMS device; and a liquid-resistant air inlet passive device (LRAPD), the LRAPD being separate from the housing and attached to the housing, the LRAPD including at least one channel connecting the exterior of the housing with the chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification