Physical quantity sensor, electronic apparatus, and moving object

• US 10,563,983 B2
• Filed: 03/31/2016
• Issued: 02/18/2020
• Est. Priority Date: 04/13/2015
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Ide, Tsugio
• Primary Examiner(s): Chapman, Jr., John E
• Application Number:
  US15/086,231
• Publication Number:
  US 20160298964A1
• Time in Patent Office: 1,419 Days
• Field of Search: 73510
• CPC Class Codes: G01C 19/5642 using vibrating bars or beams
• CPC Class Codes: G01C 19/5783 Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719

Abstract

A physical quantity sensor includes: an angular velocity detection element; an acceleration detection element; a bonding wire through which a detection signal of the acceleration detection element propagates; and a shield unit that is located between the angular velocity detection element and the bonding wire and is connected to a fixed potential. The angular velocity detection element and the acceleration detection element are disposed to be deviated in a height direction. At least a part of the shield unit is disposed between the angular velocity detection element and the acceleration detection element.

Claims

1. A physical quantity sensor comprising:

a package;

an angular velocity detection element;

an acceleration detection element;

an integrated circuit that is electrically connected to each of the angular velocity detection element and the acceleration detection element, the integrated circuit having a first side relative to a center of the integrated circuit and an opposite second side relative to the center in a plan view;

an acceleration detection signal wiring that connects the acceleration detection element and the integrated circuit, the acceleration detection signal wiring being connected to the first side of the integrated circuit and configured to propagate a detection signal of the acceleration detection element;

a plurality of digital wirings to that connect the opposite second side of the integrated circuit to a terminal located on the package, the digital wirings configured to transmit digital signals including an output signal obtained by converting the detection signal of the acceleration detection element and a digital signal of a power supply for an interface of the integrated circuit; and

a shield unit that is electrically connected to a fixed potential,

wherein at least a part of the shield unit is disposed between the angular velocity detection element and the acceleration detection signal wiring.

2. The physical quantity sensor according to claim 1,

wherein the angular velocity detection element and the acceleration detection element are offset from each other in a vertical direction in which the angular velocity detection element and the integrated circuit are overlapped such that at least a part of the shield unit is disposed between the angular velocity detection element and the acceleration detection element.

3. An electronic apparatus comprising:

a housing; and

the physical quantity sensor according to claim 2 located within the housing.

4. A moving object comprising:

a body; and

the physical quantity sensor according to claim 2 connected to the body.

5. The physical quantity sensor according to claim 1,

wherein at least a part of the shield unit is disposed between the angular velocity detection element and the acceleration detection element.

6. An electronic apparatus comprising:

a housing; and

the physical quantity sensor according to claim 5 located within the housing.

7. A moving object comprising:

a body; and

the physical quantity sensor according to claim 5 connected to the body.

8. The physical quantity sensor according to claim 1,

wherein at least a part of the shield unit is disposed between the acceleration detection signal wiring and at least one of a drive signal wiring through which a drive signal of the angular velocity detection element propagates and an angular velocity detection signal wiring through which the detection signal propagates.

9. The physical quantity sensor according to claim 8,

wherein at least the part of the shield unit is disposed between a carrier wave wiring through which a carrier wave to be applied to the acceleration detection element propagates and at least one of the drive signal wiring and the angular velocity detection signal wiring.

10. An electronic apparatus comprising:

a housing; and

the physical quantity sensor according to claim 9 located within the housing.

11. A moving object comprising:

a body; and

the physical quantity sensor according to claim 9 connected to the body.

12. An electronic apparatus comprising:

a housing; and

the physical quantity sensor according to claim 8 located within the housing.

13. A moving object comprising:

a body; and

the physical quantity sensor according to claim 8 connected to the body.

14. The physical quantity sensor according to claim 1,

wherein at least a part of the shield unit is disposed between the digital wirings and the angular velocity detection element.

15. An electronic apparatus comprising:

a housing; and

the physical quantity sensor according to claim 14 located within the housing.

16. An electronic apparatus comprising:

a housing; and

the physical quantity sensor according to claim 1 located within the housing.

17. A moving object comprising:

a body; and

the physical quantity sensor according to claim 1 connected to the body.

18. The physical quantity sensor according to claim 1, further comprising:

a base defining a concave portion,

wherein the base contains the angular velocity detection element, the acceleration detection element, the integrated circuit, the acceleration detection signal wiring, and the shield unit within the concave portion.

19. A physical quantity sensor comprising:

a package including a base having a cavity formed therein;

an angular velocity detection element suspended in the cavity;

an acceleration detection element positioned on the base in the cavity;

an integrated circuit positioned on the base in the cavity at a location that is laterally offset from and directly beneath the angular velocity detection element suspended in the cavity in a plan view of the package, the integrated circuit being electrically connected to each of the angular velocity detection element and the acceleration detection element, the integrated circuit having a first side relative to a center of the integrated circuit and proximate the acceleration detection element, and an opposite second side relative to the center and proximate a wall of the package;

an acceleration detection signal wiring that connects the acceleration detection element and the integrated circuit, the acceleration detection signal wiring being connected to the first side of the integrated circuit and configured to propagate a detection signal of the acceleration detection element;

a plurality of digital wirings that connect the opposite second side of the integrated circuit to a terminal located on the wall of the package, the digital wirings configured to transmit digital signals; and

a shield unit that is electrically connected to a fixed potential,

wherein the shield unit is disposed between the angular velocity detection element and the acceleration detection signal wiring such that, in the plan view of the package, the acceleration detection signal wiring is entirely overlapped by the shield unit.