×

Pupil ptychography methods and systems

  • US 10,568,507 B2
  • Filed: 06/12/2017
  • Issued: 02/25/2020
  • Est. Priority Date: 06/10/2016
  • Status: Active Grant
First Claim
Patent Images

1. A pupil ptychography system comprising:

  • an aperture modulator configured to modulate apertures at a Fourier plane of a first imager;

    the first imager configured to acquire a full pupil image of a sample being incoherently illuminated by a light source during operation, and configured to acquire a sequence of N limited-aperture images of the sample while the aperture modulator modulates a first aperture to N locations at the Fourier plane of the first imager;

    one or more optical components configured to propagate light reflected from the sample to the aperture modulator and propagate light from the aperture modulator to the first imager; and

    at least one processor configured to;

    use the N limited-aperture images to recover a pupil function of an optical system in an optical path between the sample and the first imager; and

    deconvolve the full pupil image of the sample using the recovered pupil function to generate a substantially aberration-free full pupil image of the sample.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×