Pupil ptychography methods and systems
First Claim
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1. A pupil ptychography system comprising:
- an aperture modulator configured to modulate apertures at a Fourier plane of a first imager;
the first imager configured to acquire a full pupil image of a sample being incoherently illuminated by a light source during operation, and configured to acquire a sequence of N limited-aperture images of the sample while the aperture modulator modulates a first aperture to N locations at the Fourier plane of the first imager;
one or more optical components configured to propagate light reflected from the sample to the aperture modulator and propagate light from the aperture modulator to the first imager; and
at least one processor configured to;
use the N limited-aperture images to recover a pupil function of an optical system in an optical path between the sample and the first imager; and
deconvolve the full pupil image of the sample using the recovered pupil function to generate a substantially aberration-free full pupil image of the sample.
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Abstract
Certain embodiments pertain to pupil ptychography methods and systems.
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Citations
18 Claims
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1. A pupil ptychography system comprising:
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an aperture modulator configured to modulate apertures at a Fourier plane of a first imager; the first imager configured to acquire a full pupil image of a sample being incoherently illuminated by a light source during operation, and configured to acquire a sequence of N limited-aperture images of the sample while the aperture modulator modulates a first aperture to N locations at the Fourier plane of the first imager; one or more optical components configured to propagate light reflected from the sample to the aperture modulator and propagate light from the aperture modulator to the first imager; and at least one processor configured to; use the N limited-aperture images to recover a pupil function of an optical system in an optical path between the sample and the first imager; and deconvolve the full pupil image of the sample using the recovered pupil function to generate a substantially aberration-free full pupil image of the sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A pupil ptychography method comprising:
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receiving, from a first imager, a sequence of N limited-aperture images of a sample being incoherently illuminated, the N limited-aperture images are acquired, by the first imager, while an aperture modulator sequentially modulates a first aperture at N different locations at the Fourier plane of the first imager and one or more optical components propagate light reflected from the sample to the aperture modulator and propagate light from the aperture modulator to the first imager; receiving a full pupil image of the sample from the first imager, the full pupil image acquired while the sample is incoherently illuminated by a light source; recovering a pupil function of an optical system in an optical path between the sample and the first imager the sequence of N limited-aperture images; and deconvolving the full pupil image of the sample using the recovered pupil function to generate a substantially aberration-free full pupil image of the sample. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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Specification