Compact emitter design for a vertical-cavity surface-emitting laser
First Claim
1. A vertical cavity surface emitting laser (VCSEL), comprising:
- an isolation layer including a plurality of extended portions along an outer perimeter of the isolation layer;
a metal layer formed on the isolation layer;
a plurality of dielectric via openings formed on a dielectric layer; and
a plurality of oxidation trenches,an oxidation trench, of the plurality of oxidation trenches, being;
positioned along a portion of the outer perimeter of the isolation layer and to be shareable with a different VCSEL, andpositioned at least partially between a first extended portion of the plurality of extended portions and a second extended portion of the plurality of extended portions.
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Accused Products
Abstract
A surface emitting laser may include an isolation layer including a first center portion and a first plurality of outer portions extending from the first center portion, and a metal layer including a second center portion and a second plurality of outer portions extending from the second center portion. The metal layer may be formed on the isolation layer such that a first outer portion, of the second plurality of outer portions, is formed over one of the first plurality of outer portions. The surface emitting laser may include a passivation layer including a plurality of openings. An opening may be formed over the first outer portion. The surface emitting laser may include a plurality of oxidation trenches. An oxidation trench may be positioned at least partially between the first outer portion and a second outer portion of the second plurality of outer portions.
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Citations
20 Claims
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1. A vertical cavity surface emitting laser (VCSEL), comprising:
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an isolation layer including a plurality of extended portions along an outer perimeter of the isolation layer; a metal layer formed on the isolation layer; a plurality of dielectric via openings formed on a dielectric layer; and a plurality of oxidation trenches, an oxidation trench, of the plurality of oxidation trenches, being; positioned along a portion of the outer perimeter of the isolation layer and to be shareable with a different VCSEL, and positioned at least partially between a first extended portion of the plurality of extended portions and a second extended portion of the plurality of extended portions. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A vertical cavity surface emitting laser (VCSEL), comprising:
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an isolation layer including a plurality of extended portions along an outer perimeter of the isolation layer; a metal layer formed on the isolation layer; a plurality of dielectric via openings formed on a dielectric layer; and a plurality of oxidation trenches, an oxidation trench of the plurality of oxidation trenches; positioned along a portion of the outer perimeter of the isolation layer and to extend between two dielectric via openings of a different VCSEL, and being positioned at least partially between a first extended portion of the plurality of extended portions and a second extended portion of the plurality of extended portions. - View Dependent Claims (8, 9, 10, 11)
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12. A vertical cavity surface emitting laser (VCSEL), comprising:
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an isolation layer including a plurality of extended portions extending along an outer perimeter of the isolation layer; a metal layer formed on the isolation layer; a plurality of dielectric via openings formed on a dielectric via layer; and an oxidation trench being; positioned along a portion of the outer perimeter of the isolation layer, and at least partially positioned between a first extended portion, of the plurality of extended portions, and a second extended portion of the plurality of extended portions. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification