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Compact emitter design for a vertical-cavity surface-emitting laser

  • US 10,574,031 B2
  • Filed: 06/30/2017
  • Issued: 02/25/2020
  • Est. Priority Date: 02/23/2016
  • Status: Active Grant
First Claim
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1. A vertical cavity surface emitting laser (VCSEL), comprising:

  • an isolation layer including a plurality of extended portions along an outer perimeter of the isolation layer;

    a metal layer formed on the isolation layer;

    a plurality of dielectric via openings formed on a dielectric layer; and

    a plurality of oxidation trenches,an oxidation trench, of the plurality of oxidation trenches, being;

    positioned along a portion of the outer perimeter of the isolation layer and to be shareable with a different VCSEL, andpositioned at least partially between a first extended portion of the plurality of extended portions and a second extended portion of the plurality of extended portions.

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