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Quality factor compensation in microelectromechanical system (MEMS) gyroscopes

  • US 10,578,435 B2
  • Filed: 01/12/2018
  • Issued: 03/03/2020
  • Est. Priority Date: 01/12/2018
  • Status: Active Grant
First Claim
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1. A method comprising:

  • receiving, from a resonator of a microelectromechanical system (MEMS) gyroscope, a resonator signal generated in response to motion of the resonator;

    determining a quality factor of the resonator using the resonator signal;

    generating a compensation signal having at least one time characteristic determined using the quality factor of the resonator;

    receiving, from a sensor of the MEMS gyroscope, a sense signal generated in response to angular motion of the MEMS gyroscope; and

    generating a compensated sense signal using the sense signal and the compensation signal.

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