Quality factor compensation in microelectromechanical system (MEMS) gyroscopes
First Claim
1. A method comprising:
- receiving, from a resonator of a microelectromechanical system (MEMS) gyroscope, a resonator signal generated in response to motion of the resonator;
determining a quality factor of the resonator using the resonator signal;
generating a compensation signal having at least one time characteristic determined using the quality factor of the resonator;
receiving, from a sensor of the MEMS gyroscope, a sense signal generated in response to angular motion of the MEMS gyroscope; and
generating a compensated sense signal using the sense signal and the compensation signal.
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Abstract
Circuits and methods for compensating microelectromechanical system (MEMS) gyroscopes for quality factor variations are described. Quality factor variations arise when mechanical losses are introduced in the gyroscope'"'"'s resonator, for example due to thermoelastic damping or squeeze-film damping, which may hinder the gyroscope'"'"'s ability to accurately sense angular velocity. Quality factor compensation may be performed by generating a compensation signal having a time decay rate that depends on the quality factor of resonator. In this way, artifacts that may otherwise arise in gyroscope'"'"'s output are limited. Additionally, or alternatively, quality factor compensation may be performed by controlling the force with which the gyroscope'"'"'s resonator is driven. This may be achieved, for example, by controlling the average value of the drive signal.
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Citations
20 Claims
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1. A method comprising:
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receiving, from a resonator of a microelectromechanical system (MEMS) gyroscope, a resonator signal generated in response to motion of the resonator; determining a quality factor of the resonator using the resonator signal; generating a compensation signal having at least one time characteristic determined using the quality factor of the resonator; receiving, from a sensor of the MEMS gyroscope, a sense signal generated in response to angular motion of the MEMS gyroscope; and generating a compensated sense signal using the sense signal and the compensation signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A microelectromechanical systems (MEMS) apparatus comprising:
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a gyroscope comprising a sensor and a resonator; and control circuitry configured to; receive, from the resonator, a resonator signal generated in response to motion of the resonator; determine a quality factor of the resonator using the resonator signal; generate a compensation signal having a time characteristic determined using the quality factor of the resonator; receive, from the sensor, a sense signal generated in response to angular motion of the MEMS gyroscope; and generate a compensated sense signal using the sense signal and the compensation signal. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A microelectromechanical systems (MEMS) apparatus comprising:
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a gyroscope comprising a sensor and a resonator; a quality factor measuring circuit coupled to a motion detection electrode of the resonator; a compensation circuit having an input terminal coupled to the quality factor measuring circuit and an output terminal, the compensation circuit comprising transient compensation circuitry; and signal combination circuitry coupled to the sensor and the output terminal of the transient compensation circuitry. - View Dependent Claims (17, 18, 19, 20)
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Specification