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Illumination optical assembly, exposure apparatus, and device manufacturing method

  • US 10,578,973 B2
  • Filed: 10/24/2016
  • Issued: 03/03/2020
  • Est. Priority Date: 10/24/2011
  • Status: Active Grant
First Claim
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1. An illumination optical system which illuminates an illumination target surface with light, the illumination optical system comprising:

  • an optical integrator disposed in an optical path of the light on an incidence side of an illumination pupil of the illumination optical system;

    a spatial light modulator having a plurality of optical elements arranged along a predetermined surface, the plurality of optical elements being disposed in the optical path of the light on an incidence side of the optical integrator;

    an optical member disposed in the optical path of the light on an incidence side of the plurality of optical elements or between the plurality of optical elements and the optical integrator, the optical member being configured to variably set at least one of sizes and intensities of beams on the illumination pupil, the beams being at least a part of the light being distributed on the illumination pupil by the spatial light modulator; and

    an imaging optical system arranged in the optical path of the light between the plurality of optical elements and the optical member,wherein the optical member is located in a conjugate space in which a conjugate plane is located, the conjugate plane being a plane conjugate with the predetermined surface through the imaging optical system, andwherein the optical member acts on at least a portion of the light such that the light includes a first beam and a second beam, the first beam having a first divergence angle, the second beam having a second divergence angle different from the first divergence angle, the first beam and the second beam being distributed at different positions on the illumination pupil.

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