3-axis angular accelerometer
First Claim
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1. An apparatus for angular acceleration detection, comprising:
- a proof mass having an outer edge bounding a first area, an inner edge disposed within the first area and bounding a second area smaller than the first area, and a center disposed within the second area;
an anchor connected to a substrate; and
a tether coupling the proof mass to the anchor, the tether being symmetric with respect to a plane that passes through the center of the proof mass and is substantially perpendicular to the substrate, the tether comprising;
first, second and third beams positioned on a first side of the plane, wherein the first and second beams are substantially parallel to the plane and are connected to each other by the third beam, the third beam being angled relative to the plane;
fourth, fifth and sixth beams positioned on a second side of the plane opposite the first side, wherein the fourth and fifth beams are substantially parallel to the plane and are connected to each other by the sixth beam, the sixth beam being angled relative to the plane; and
a seventh beam disposed between the first beam and the fourth beam and having an end directly attached to the inner edge of the proof mass;
the proof mass further comprising a plurality of free-end beams having fixed ends fixed to the inner edge of the proof mass, the free-end beams further having free ends positioned closer to the center of the proof mass than the fixed ends.
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Abstract
Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.
51 Citations
20 Claims
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1. An apparatus for angular acceleration detection, comprising:
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a proof mass having an outer edge bounding a first area, an inner edge disposed within the first area and bounding a second area smaller than the first area, and a center disposed within the second area; an anchor connected to a substrate; and a tether coupling the proof mass to the anchor, the tether being symmetric with respect to a plane that passes through the center of the proof mass and is substantially perpendicular to the substrate, the tether comprising; first, second and third beams positioned on a first side of the plane, wherein the first and second beams are substantially parallel to the plane and are connected to each other by the third beam, the third beam being angled relative to the plane; fourth, fifth and sixth beams positioned on a second side of the plane opposite the first side, wherein the fourth and fifth beams are substantially parallel to the plane and are connected to each other by the sixth beam, the sixth beam being angled relative to the plane; and a seventh beam disposed between the first beam and the fourth beam and having an end directly attached to the inner edge of the proof mass; the proof mass further comprising a plurality of free-end beams having fixed ends fixed to the inner edge of the proof mass, the free-end beams further having free ends positioned closer to the center of the proof mass than the fixed ends. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification