Programmable resistive device and memory using diode as selector

• US 10,586,593 B2
• Filed: 11/06/2017
• Issued: 03/10/2020
• Est. Priority Date: 12/07/2012
• Status: Active Grant

• Current Assignee: Attopsemi Technology Co., Ltd.
• Original Assignee: Attopsemi Technology Co., Ltd.
• Inventors: Chung, Shine C.
• Primary Examiner(s): Siddique, Mushfique
• Application Number:
  US15/805,109
• Publication Number:
  US 20180075906A1
• Time in Patent Office: 855 Days
• CPC Class Codes: G11C 13/0004 comprising amorphous/crystalline phase transition cells
• CPC Class Codes: G11C 13/0007 comprising metal oxide memory material, e.g. perovskites
• CPC Class Codes: G11C 13/004 Reading or sensing circuits or methods
• CPC Class Codes: G11C 13/0069 Writing or programming circuits or methods
• CPC Class Codes: G11C 17/16 using electrically-fusible links
• CPC Class Codes: G11C 17/18 Auxiliary circuits, e.g. for writing into memory
• CPC Class Codes: G11C 2213/72 Array wherein the access device being a diode
• CPC Class Codes: G11C 2213/74 Array wherein each memory cell has more than one access device

Abstract

Building programmable resistive devices in contact holes at the crossover of a plurality of conductor lines in more than two vertical layers is disclosed. There are plurality of first conductor lines and another plurality of second conductor lines that can be substantially perpendicular to each other, though in two different vertical layers. A diode and/or a programmable resistive element can be fabricated in the contact hole between the first and second conductor lines. The programmable resistive element can be coupled to another programmable resistive device or shared between two programmable devices whose diodes conducting currents in opposite directions and/or coupled to a common conductor line. The programmable resistive memory can be configured to be programmable by applying voltages to conduct current flowing through the programmable resistive element to change its resistance for a different logic state.

Claims

1. A Programmable Resistive Device (PRD) memory, comprising:

a plurality of PRD cells, at least one of the PRD cells including at least;

a diode and a Programmable Resistive Element (PRE) being fabricated at a crossover of a first conductor line and a second conductor line located in a structure having more than two vertical layers;

the PRE coupled to a first conductor line, the PRE being configured to penetrate substantially vertically through the first conductor line;

the diode including at least a first active region and a second active region isolated from the first active region, where the first active region having a first type of dopant and the second active region having a second type of dopant, the first active region providing a first terminal of the diode, the second active region providing a second terminal of the diode, the first active region coupled to the PRE and the second active region coupled to a second conductor line,

wherein the PRE of the at least one of the PRD cells is coupled through the first conductor line to the PRE of another of the PRD cells or is shared through the first conductor line between two PRD cells; and

wherein the PRE is configured to be programmable by applying voltages to the first conductor line, the second conductor lines and/or the third conductor line to thereby change its resistance for a different logic state.

2. A PRD memory as recited in claim 1, wherein the PRE is provided within a contact hole through the first conductor line.

3. A PRD memory as recited in claim 1, wherein the PRE penetrates through the first conductor layer via a contact hole through the first conductor line.

4. A Programmable Resistive Device (PRD) memory, comprising:

a plurality of PRD cells, at least one of the PRD cells including at least;

a diode and a Programmable Resistive Element (PRE) being fabricated at a crossover of a first conductor line and a second conductor line located in a structure having more than two vertical layers;

the PRE coupled to a first conductor line;

the diode including at least a first active region and a second active region isolated from the first active region, where the first active region having a first type of dopant and the second active region having a second type of dopant, the first active region providing a first terminal of the diode, the second active region providing a second terminal of the diode, the first active region coupled to the PRE and the second active region coupled to a second conductor line,

wherein the PRE of the at least one of the PRD cells is coupled through the first conductor line to the PRE of another of the PRD cells or is shared through the first conductor line between two PRD cells; and

wherein the PRE is configured to be programmable by applying voltages to the first conductor line, the second conductor lines and/or the third conductor line to thereby change its resistance for a different logic state.