Three dimensional nanometer filters and methods of use
First Claim
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1. A method for creating a filter panel, comprising:
- providing a substrate panel; and
creating at least one filter sidewall on a surface of the substrate panel by;
alternatingly depositing layers of structural material and sacrificial material; and
etching away at least a portion of each of the layers of sacrificial material to create spacers that separate the layers of structural material, and to create filter slots.
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Abstract
Three dimensional nanoparticle filters are provided herein. In one embodiment a filter device includes a base material, alternating layers of sacrificial material between layers of structural material being deposited onto the base material to create a layered base material, and filter sidewalls etched into the deposited alternating layers of the layered base material to remove the layers of sacrificial material between the layers of structural material to form filter slots in the filter sidewalls as well as create channels between the filter sidewalls, where a size of the filter slots is selectable based on a thickness of the layers of sacrificial material utilized.
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20 Claims
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1. A method for creating a filter panel, comprising:
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providing a substrate panel; and creating at least one filter sidewall on a surface of the substrate panel by; alternatingly depositing layers of structural material and sacrificial material; and etching away at least a portion of each of the layers of sacrificial material to create spacers that separate the layers of structural material, and to create filter slots. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A filter panel, comprising:
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a substrate panel; and at least one filter sidewall on a surface of the substrate panel comprising; alternatingly depositing layers of structural material and sacrificial material; and filter slots created from etching away at least a portion of each of the layers of sacrificial material to create spacers that separate the layers of structural material, and to create filter slots. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification