Chemical treatment, deposition and/or infiltration apparatus and method for using the same

• US 10,590,535 B2
• Filed: 07/26/2017
• Issued: 03/17/2020
• Est. Priority Date: 07/26/2017
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM IP Holdings B.V.
• Inventors: Huggare, Robert
• Primary Examiner(s): Gambetta, Kelly M
• Application Number:
  US15/660,797
• Publication Number:
  US 20190032209A1
• Time in Patent Office: 965 Days
• CPC Class Codes: C23C 16/4408 by purging residual gases from the reaction chamber or gas lines
• CPC Class Codes: C23C 16/45544 characterized by the apparatus
• CPC Class Codes: C23C 16/4583 the substrate being supported substantially horizontally
• CPC Class Codes: C23C 16/4586 Elements in the interior of the support, e.g. electrodes, heating or cooling devices
• CPC Class Codes: H01J 37/32568 Relative arrangement or disposition of electrodes; moving means
• CPC Class Codes: H01J 37/32724 Temperature
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/67748 horizontal transfer of a single workpiece
• CPC Class Codes: H01L 21/68735 characterised by edge profile or support profile

Abstract

The disclosure relates to a chemical deposition, treatment and/or infiltration apparatus for providing a chemical reaction on and/or in a surface of a substrate. The apparatus may have a top and a bottom reaction chamber part forming together a closable reaction chamber and an actuator constructed and arranged for moving the top and bottom reaction chamber parts with respect to each other from a closed position to an open position so as to allow access to an interior of the reaction chamber. A top substrate holder is connected to the top reaction chamber part to hold a substrate at least when the reaction chamber is in the open position and a bottom substrate holder is connected to the bottom reaction chamber part to hold the substrate when the reaction chamber is in the closed position.

Claims

1. A chemical deposition, treatment and/or infiltration apparatus for providing a chemical reaction on or in a surface of a substrate, wherein the apparatus comprises:

a top reaction chamber part and a bottom reaction chamber part forming together a closed reaction chamber;

an actuator coupled to at least one of the top reaction chamber part and the bottom reaction chamber part and configured to move the at least one of the top reaction chamber part and the bottom reaction chamber part with respect to the other in a first direction from an open position to a closed position to form the closed reaction chamber;

at least two top substrate holders coupled to the top reaction chamber part at two positions substantially opposite from each other with respect to a center of the substrate, wherein the at least two top substrate holders are configured to support the substrate at least when the reaction chamber is in the open position; and

a bottom substrate holder coupled to the bottom reaction chamber part configured to support the substrate in response to the top reaction chamber part being coupled to the bottom reaction chamber part in the closed position forming the closed reaction chamber,

wherein the closed reaction chamber is configured to enclose the substrate, and wherein the substrate is supported by at least the bottom substrate holder in the closed reaction chamber.

2. The apparatus according to claim 1, wherein the apparatus comprises:

a substrate handler constructed and arranged for moving the substrate in a second direction substantially perpendicular to the first direction to a position above the at least two top substrate holders when the reaction chamber is in the open position.

3. The apparatus according to claim 2, wherein the substrate handler is constructed and arranged for moving the substrate in the first direction from a position above the at least two top substrate holders to a position on the at least two top substrate holders when the reaction chamber is in the open position.

4. The apparatus according to claim 1, wherein the apparatus is constructed and arranged for positioning the substrate held by the at least two top substrate holders on the bottom substrate holder when the top and bottom reaction chamber parts are moved from the open position to the closed position.

5. The apparatus according to claim 1, wherein the at least two top substrate holders are protruding from the top reaction chamber part in the direction of the bottom reaction chamber part.

6. The apparatus according to claim 5, wherein the bottom substrate holder is provided with at least one recess to accommodate the at least two top substrate holders when the top and bottom reaction chamber parts are closed to form the reaction chamber.

7. The apparatus according to claim 6, wherein the bottom substrate holder is provided with a flat surface for receiving the substrate.

8. The apparatus according to claim 6, wherein the bottom substrate holder is provided with a heater for heating the substrate.

9. The apparatus according to claim 1, wherein the at least two top substrate holders each comprise:

a clamp comprising a support area for supporting the substrate; and

a suspension for suspending the clamp from the top reaction chamber part.

10. The apparatus according to claim 9, wherein the at least two top substrate holders are constructed and arranged with a substantially horizontal support area and a substantially vertical suspension.

11. The apparatus according to claim 1, wherein the at least two top substrate holders comprise a U-shape seen in the first direction.

12. The apparatus according to claim 1, further comprising a substrate handler constructed and arranged for moving the substrate in a second direction substantially perpendicular to the first direction, and wherein the at least two top substrate holders each comprise an L-shape seen in the second direction.

13. The apparatus according to claim 1, wherein the at least two top substrate holders each comprise an upside down T-shape seen in a direction perpendicular to the first direction and a second direction substantially perpendicular to the first direction.

14. The apparatus according to claim 1, wherein the top reaction chamber part is operably connected to a precursor distribution system for providing precursors to the reaction chamber and a removal system to remove precursor from the reaction chamber.

15. The apparatus according to claim 14, wherein the apparatus comprises a sequence controller for controlling the precursor distribution and removal systems and provided with a memory being programmed to enable the apparatus to execute infiltration during at least a first infiltration cycle comprising:

providing a first precursor in the reaction chamber by the precursor distribution system for a first duration in the reaction chamber;

removing a portion of the first precursor from the substrate for at least a second duration by the removal system;

providing a second precursor in the reaction chamber by activating the precursor distribution system to provide the second precursor for a third duration in the reaction chamber.

16. The apparatus according to claim 15, wherein the sequence controller is programmed to leave the first precursor in the reaction chamber while having the precursor distribution and removal system deactivated for a soak period after providing the first precursor in the reaction chamber with the precursor distribution system.

17. The apparatus according to claim 1, wherein the bottom reaction chamber part is moveable up and down by the actuator and is positioned below the top reaction chamber part.

18. The apparatus according to claim 1, wherein there is provided an O-ring between the top reaction chamber part and the bottom reaction chamber part to seal the closed reaction chamber.

19. A chemical deposition, treatment and/or infiltration apparatus for providing a chemical reaction on or in a surface of a substrate, wherein the apparatus comprises:

a top reaction chamber part and a bottom reaction chamber part forming together a closed reaction chamber;

an actuator coupled to at least one of the top reaction chamber part and the bottom reaction chamber part and configured to move the at least one of the top reaction chamber part and the bottom reaction chamber part with respect to the other in a first direction from an open position to a closed position to form the closed reaction chamber;

a top substrate holder coupled to the top reaction chamber part configured to support the substrate at least when the reaction chamber is in the open position, wherein the top substrate holder comprises a U-shape as viewed in the first direction; and

a bottom substrate holder coupled to the bottom reaction chamber part configured to support the substrate in response to the top reaction chamber part being coupled to the bottom reaction chamber part in the closed position forming the closed reaction chamber,

wherein the closed reaction chamber is configured to enclose the substrate, and wherein the substrate is supported by at least the bottom substrate holder in the closed reaction chamber.

20. A chemical deposition, treatment and/or infiltration apparatus for providing a chemical reaction on or in a surface of a substrate, wherein the apparatus comprises:

a top reaction chamber part and a bottom reaction chamber part forming together a closed reaction chamber;

an actuator coupled to at least one of the top reaction chamber part and the bottom reaction chamber part and configured to move the at least one of the top reaction chamber part and the bottom reaction chamber part with respect to the other in a first direction from an open position to a closed position to form the closed reaction chamber;

a top substrate holder coupled to the top reaction chamber part configured to support the substrate at least when the reaction chamber is in the open position, wherein the top substrate holder comprises an L-shape as viewed in a second direction perpendicular to the first direction;

a bottom substrate holder coupled to the bottom reaction chamber part configured to support the substrate in response to the top reaction chamber part being coupled to the bottom reaction chamber part in the closed position forming the closed reaction chamber,

wherein the closed reaction chamber is configured to enclose the substrate, and wherein the substrate is supported by at least the bottom substrate holder in the closed reaction chamber; and

a substrate handler configured for moving the substrate in the second direction.

21. A chemical deposition, treatment and/or infiltration apparatus for providing a chemical reaction on or in a surface of a substrate, wherein the apparatus comprises:

a top reaction chamber part and a bottom reaction chamber part forming together a closed reaction chamber;

an actuator coupled to at least one of the top reaction chamber part and the bottom reaction chamber part and configured to move the at least one of the top reaction chamber part and the bottom reaction chamber part with respect to the other in a first direction from an open position to a closed position to form the closed reaction chamber;

a top substrate holder coupled to the top reaction chamber part configured to support the substrate at least when the reaction chamber is in the open position, wherein the top substrate holder comprises an upside-down T-shape as viewed in a direction perpendicular to the first direction and a second direction substantially perpendicular to the first direction; and

a bottom substrate holder coupled to the bottom reaction chamber part configured to support the substrate in response to the top reaction chamber part being coupled to the bottom reaction chamber part in the closed position forming the closed reaction chamber,

wherein the closed reaction chamber is configured to enclose the substrate, and wherein the substrate is supported by at least the bottom substrate holder in the closed reaction chamber.