Additive manufacturing with array of energy sources

• US 10,596,763 B2
• Filed: 11/10/2017
• Issued: 03/24/2020
• Est. Priority Date: 04/21/2017
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Ng, Hou T., Patibandla, Nag B., Ganapathiappan, Sivapackia
• Primary Examiner(s): Minskey, Jacob T
• Assistant Examiner(s): Tsui, Melody
• Application Number:
  US15/809,965
• Publication Number:
  US 20180304538A1
• Time in Patent Office: 865 Days
• CPC Class Codes: B29C 64/209 Heads; Nozzles
• CPC Class Codes: B29C 64/227 Driving means
• CPC Class Codes: B29C 64/236 for motion in a direction within the plane of a layer
• CPC Class Codes: B29C 64/245 Platforms or substrates support structures intended to be sacrificed after manufacture B29C64/40
• CPC Class Codes: B29C 64/277 using multiple radiation means, e.g. micromirrors or multiple light-emitting diodes [LED]
• CPC Class Codes: B29C 64/393 for controlling or regulating additive manufacturing processes
• CPC Class Codes: B33Y 30/00 Apparatus for additive manufacturing; Details thereof or accessories therefor
• CPC Class Codes: B33Y 50/02 for controlling or regulating additive manufacturing processes
• CPC Class Codes: Y02P 10/25 Process efficiency

Abstract

An additive manufacturing apparatus includes a platform, a first support, a first actuator to create relative motion along a first axis such that the first support scans across the platform, one or more printheads supported on the first support above the platform and configured to dispense successive layers of feed material to form a polishing pad, a second support, a second actuator to create relative motion along a second axis substantially perpendicular to the first axis such that the second support scans across the platform in a direction perpendicular to the first axis, and a plurality of individually addressable energy sources supported on the second support above the platform, and a controller. The energy sources are arranged in an array that extends at least along the first axis and configured to emit radiation toward the platform.

Claims

1. An additive manufacturing apparatus comprising:

a platform having a top surface;

one or more printheads supported configured to dispense successive layers of feed material;

a first support;

a first actuator coupled to at least one of the platform and the first support and configured to create relative motion therebetween along a first axis such that the first support scans across the platform;

a first plurality of individually addressable first energy sources supported on the first support above the platform, the first energy sources arranged in an array that extends at least along a second axis parallel to the top surface of the platform and perpendicular to the first axis and configured to emit radiation toward the platform; and

a second support that is fixed stationary relative to platform;

a second plurality of individually addressable second energy sources supported on the second support above the platform and configured to emit radiation toward the platform; and

a controller configured to

cause the printheads to dispense a layer of feed material;

cause the first actuator to create relative motion between the first support and the platform such that the first energy sources scan across the platform, and

operate the first and second energy sources to apply energy to a selected region of the layer of feed material on the platform.

2. An additive manufacturing apparatus, comprising:

a platform having a top surface;

one or more printheads supported configured to dispense successive layers of feed material;

a first support;

a first actuator coupled to at least one of the platform and the first support and configured to create relative motion therebetween along a first axis parallel to the top surface such that the first support scans across the platform;

a first plurality of individually addressable first energy sources supported on the first support above the platform, the first energy sources arranged in a first array that extends at least along a second axis parallel to the top surface of the platform and perpendicular to the first axis and configured to emit radiation toward the platform; and

a second support;

a second plurality of individually addressable second energy sources supported on the second support above the platform and configured to emit radiation toward the platform, wherein the second plurality of second energy sources is arranged in a second array that extends at least along the first axis; and

a controller configured to

cause the printheads to dispense a layer of feed material;

cause the first actuator to create relative motion between the first support and the platform such that the first energy sources scan across the platform, and

operate the first and second energy sources to apply energy to a selected region of the layer of feed material on the platform.

3. The additive manufacturing apparatus of claim 2, comprising a second actuator coupled to at least one of the platform and the second support and configured to create relative motion therebetween along a second axis substantially perpendicular to the first axis such that the second support scans across the platform in a direction perpendicular to the first axis.

4. The additive manufacturing apparatus of claim 3, wherein the second support is mounted to a frame separately from the first support.

9. The additive manufacturing apparatus of claim 2, wherein the first energy sources each correspond to a voxel of a topmost layer of feed material above the platform.

10. The additive manufacturing apparatus of claim 9, wherein the first energy sources are configured to emit radiation having a first wavelength, and the second energy sources are configured to emit radiation have a second wavelength, the second wavelength being less than the first wavelength.

11. The additive manufacturing apparatus of claim 9, wherein each of the first and second energy sources include light emitting diodes (LEDs) configured to emit radiation having an intensity dependent on a current delivered to the LEDs.

5. An additive manufacturing apparatus comprising:

a platform having a top surface;

one or more printheads supported configured to dispense successive layers of feed material;

a first support;

a first actuator coupled to at least one of the platform and the first support and configured to create relative motion therebetween along a first axis parallel to the top surface such that the first support scans across the platform;

a first plurality of individually addressable first energy sources supported on the first support above the platform, the first energy sources arranged in a first array that extends at least along a second axis parallel to the top surface of the platform and perpendicular to the first axis and configured to emit radiation toward the platform; and

a second support;

a second actuator coupled to at least one of the platform and the second support and configured to create relative motion therebetween along the first axis such that the second support scans across the platform in a direction parallel to the first axis independently of the first support;

a second plurality of individually addressable second energy sources supported on the second support above the platform and configured to emit radiation toward the platform, wherein the second plurality of second energy sources is arranged in an array that extends at least along the second axis; and

a controller configured to

cause the printheads to dispense a layer of feed material;

cause the first actuator to create relative motion between the first support and the platform such that the first energy sources scan across the platform, and

operate the first and second energy sources to apply energy to a selected region of the layer of feed material on the platform.

6. An additive manufacturing apparatus, comprising:

a platform having a top surface;

one or more printheads supported configured to dispense successive layers of feed material;

a first support;

a first actuator coupled to at least one of the platform and the first support and configured to create relative motion therebetween along a first axis parallel to the top surface such that the first support scans across the platform;

a first plurality of individually addressable first energy sources supported on the first support above the platform, the first energy sources arranged in a first array that extends at least along a second axis parallel to the top surface of the platform and perpendicular to the first axis and configured to emit radiation toward the platform; and

a second support, wherein the second support is stationary relative to platform;

a second plurality of individually addressable second energy sources supported on the second support above the platform and configured to emit radiation toward the platform; and

a controller configured to

cause the printheads to dispense a layer of feed material;

cause the first actuator to create relative motion between the first support and the platform such that the first energy sources scan across the platform, and

operate the first and second energy sources to apply energy to a selected region of the layer of feed material on the platform.

7. The additive manufacturing apparatus of claim 6, wherein the second plurality of individually addressable second energy sources is a two-dimensional array extending along both the first axis and the second axis.

8. The additive manufacturing apparatus of claim 7, wherein the two-dimensional array extends along an entire width and length of a build area of the platform.