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Microelectromechanical device incorporating a gyroscope and an accelerometer

  • US 10,598,690 B2
  • Filed: 12/09/2015
  • Issued: 03/24/2020
  • Est. Priority Date: 09/12/2011
  • Status: Active Grant
First Claim
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1. A device, comprising:

  • a substrate;

    a plurality of pairs of fixed electrodes on the substrate;

    a first pair of masses aligned with each other along a first axis, each of the masses having a first end and a second end;

    a second pair of masses aligned with each other along a second axis that is transverse to the first axis, each of the masses having a first end and a second end;

    a plurality of elastic coupling elements, each elastic coupling element of the plurality of elastic coupling elements being coupled between the first end of a mass of the first pair of masses and the first end of a mass of the second pair of masses;

    a plurality of pairs of elastic suspension elements coupled to the substrate, each of the masses of the first pair and the second pair of masses being coupled to only one of the pairs of elastic suspension elements at a location between the first end and the second end, the location being closer to the second end than the first end and aligned between a respective pair of fixed electrodes, each pair of elastic suspension elements configured to enable linear motion and rotation of the respective mass of the first pair and the second pair of masses around a third axis through the respective pair of elastic suspension elements; and

    a plurality of pairs of movable electrodes aligned with the fixed electrodes, each pair of movable electrodes arranged on a side of a respective mass of each of the first and second pairs of masses facing the fixed electrodes, each pair of movable electrodes including a first movable electrode and a second movable electrode, wherein the first movable electrode and the second movable electrode of each pair of the plurality of pairs of movable electrodes are positioned on opposing sides of the third axis of each respective pair of elastic suspension elements with the first and second movable electrodes closer to the second end than the first end of each respective mass.

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