Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace

• US 10,605,530 B2
• Filed: 07/26/2017
• Issued: 03/31/2020
• Est. Priority Date: 07/26/2017
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM IP Holding B.V. (ASM International NV)
• Inventors: Jdira, Lucian C., de Ridder, Chris G. M., Oosterlaken, Theodorus G. M., Boonstra, Klaas P., Terhorst, Herbert, Keijser, Juul
• Primary Examiner(s): Wilson, Gregory A
• Application Number:
  US15/660,805
• Publication Number:
  US 20190032998A1
• Time in Patent Office: 979 Days
• CPC Class Codes: F27B 1/14 Arrangements of linings linings in general F27D1/00
• CPC Class Codes: F27B 1/28 Arrangements of monitoring devices, of indicators, of alarm devices
• CPC Class Codes: F27B 2005/162 through closable or non-closable openings of the chamber walls
• CPC Class Codes: F27B 5/04 adapted for treating the charge in vacuum or special atmosphere
• CPC Class Codes: F27B 5/08 Arrangements of linings
• CPC Class Codes: F27B 5/12 Arrangement of devices for charging
• CPC Class Codes: F27B 5/16 Arrangements of air or gas supply devices
• CPC Class Codes: F27D 11/00 Arrangement of elements for electric heating in or on furnaces electric heating per se H05B
• CPC Class Codes: F27D 3/0084 Charging; Manipulation of SC or SC wafers
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/67248 Temperature monitoring

Abstract

An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising:

• • an inlet opening configured to insert and remove a boat configured to carry substrates in the inner space of the liner;
  • a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.

Claims

1. An assembly of a liner and a flange, the liner being configured to extend in the interior of a low pressure tube of a vertical furnace, the liner comprising:

a substantially cylindrical wall delimited by a liner opening at a lower end and a top closure at a higher end and being substantially closed for gases above the liner opening and defining an inner space, the flange being configured to at least partially close an opening of the low pressure tube and comprising;

an inlet opening configured to insert and remove a boat configured to carry substrates in the inner space of the liner; and

a gas inlet to provide a gas to the inner space, wherein the assembly is constructed and arranged with a gas exhaust duct to remove gas from the inner space and a space between the liner and the low pressure tube through a gas exhaust opening in the flange.

2. The assembly according to claim 1, wherein the gas inlet comprises an injector, constructed and arranged within the assembly to extend into the inner space along the substantially cylindrical wall of the liner towards the higher end and comprising at least one opening to inject gas in the inner space.

3. The assembly according to claim 2, wherein a pattern of openings extending in the vertical direction is provided along the injector.

4. The assembly according to claim 3, wherein the vertical distance between the openings decreases when going from the lower end to the top end of the injector.

5. The assembly according to claim 3, wherein the openings are configured such that gas is injected in at least two different directions.

6. The assembly according to claim 2, wherein the horizontal, inner cross-section area of a gas conduction channel inside the injector is between 100 and 1500 mm².

7. The assembly according to claim 2, wherein the horizontal, inner cross-section of a gas conduction channel inside the injector has a shape with a dimension in a direction tangential to the circumference of the substantially cylindrical liner which is larger than a dimension in a radial direction.

8. The assembly according to claim 2, wherein the area of the at least one opening may be between 1 to 200 mm².

9. The assembly according to claim 2, wherein the at least one opening has a concave shape from the inside to the outside.

10. The assembly according to claim 2, wherein the openings are positioned on two vertically extending, spaced apart branches of the injector.

11. The assembly according to claim 2, wherein the injector comprises one opening near the top end of the liner.

12. The assembly according to claim 1, wherein the liner delimiting the inner space has a radially outwardly extending bulge.

13. The assembly according to claim 1, wherein the gas exhaust opening for removing gas from the inner space is provided below the open end of the liner.

14. The assembly according to claim 1, wherein the assembly is provided with a purge gas inlet mounted on the flange for providing a purge gas to the space between the liner and the low pressure tube.

15. The assembly according to claim 14, wherein the purge gas inlet comprises a purge gas injector extending along the outer surface of the substantially cylindrical wall of the liner towards the top end of the liner.

16. The assembly according to claim 1, wherein the assembly is provided with a temperature measurement system mounted on the flange and extending along the substantially cylindrical wall of the liner towards the top end of the liner to measure a temperature.

17. The assembly according to claim 16, wherein the temperature measurement system is arranged along an outer surface of the liner.

18. The assembly according to claim 17, wherein the liner is provided with an radially inwardly extending bulge to accommodate the temperature measurement system.

19. The assembly according to claim 1, wherein at least one of the liner and the gas injector comprises a material selected from silicon carbide and silicon.

20. The assembly according to claim 1, wherein the assembly is configured and arranged such that there is a gap between a lower surface of the liner and the upper surface of the flange.

21. The assembly according to claim 1, wherein the upper surface of the flange is provided with a groove for accommodating seal to seal the low pressure tube.

22. The assembly according to claim 1, wherein the exhaust opening is disposed in an area that is positioned radially outside the outer substantially cylindrical surface of the liner wall.

23. A vertical furnace comprising:

a heater configured to heat the interior of the low pressure tube;

an assembly according to claim 1; and

a vertically movably arranged door configured to close off the central inlet opening in the flange and configured to support a wafer boat that is configured to hold substrates.

24. The vertical furnace according to claim 23, wherein the door is provided with a rotator to rotate the wafer boat in the inner space.

25. The vertical furnace according to claim 23, wherein a seal is provided between the upper surface of the flange and the low pressure tube to seal the low pressure tube.

26. The vertical furnace according to claim 23, wherein a pressure control system is provided to remove gas from the interior of the low pressure tube via the gas exhaust opening.

27. The vertical furnace according to claim 23, wherein the low pressure tube is constructed and arranged to provide a pressure barrier between a low pressure interior space of the low pressure tube, comprising the inner space and the liner, and the atmospheric pressure space outside the low pressure tube.

28. A liner being configured to extend in the interior of a low pressure tube of a vertical furnace comprising:

a substantially cylindrical wall delimited by a liner opening at a lower end and a top closure at a higher end and being substantially closed for gases above the liner opening and defining an inner space,

and two or more support members connected to an outer surface of the substantially cylindrical wall, wherein each of the support members has a downwardly directed supporting surface, and wherein the support members are spaced radially outward from an inner surface of the substantially cylindrical wall,

wherein the liner comprises silicon carbide.

29. The liner according to claim 28, wherein the silicon carbide liner is between 4 to 6 mm thick.