Integrated microphone device and manufacturing method thereof
First Claim
Patent Images
1. An integrated microphone device, comprising:
- a substrate including an aperture allowing acoustic pressure to pass through;
a plate disposed on a side of the substrate; and
a membrane disposed between the substrate and the plate, and movable relative to the plate as acoustic pressure strikes the membrane, wherein the membrane includes a vent valve having an open area that is variable in response to a change in acoustic pressure;
wherein the vent valve has an opening and a plurality of deflection parts connected to a main body of the membrane, and each of the deflection parts is deflectable relative to the main body to change the open area of the opening, wherein the opening includes a circular center portion and a plurality of channel portions extending radially from the circular center portion, wherein the deflection parts are disposed around the circular center portion and each of the channel portions is dispose between the two adjacent deflection parts, and one side of each of the deflection parts adjacent to the center portion is curved.
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Abstract
An integrated microphone device is provided. The integrated microphone device includes a substrate, a plate, and a membrane. The substrate includes an aperture allowing acoustic pressure to pass through. The plate is disposed on a side of the substrate. The membrane is disposed between the substrate and the plate and movable relative to the plate as acoustic pressure strikes the membrane. The membrane includes a vent valve having an open area that is variable in response to a change in acoustic pressure.
31 Citations
20 Claims
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1. An integrated microphone device, comprising:
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a substrate including an aperture allowing acoustic pressure to pass through; a plate disposed on a side of the substrate; and a membrane disposed between the substrate and the plate, and movable relative to the plate as acoustic pressure strikes the membrane, wherein the membrane includes a vent valve having an open area that is variable in response to a change in acoustic pressure; wherein the vent valve has an opening and a plurality of deflection parts connected to a main body of the membrane, and each of the deflection parts is deflectable relative to the main body to change the open area of the opening, wherein the opening includes a circular center portion and a plurality of channel portions extending radially from the circular center portion, wherein the deflection parts are disposed around the circular center portion and each of the channel portions is dispose between the two adjacent deflection parts, and one side of each of the deflection parts adjacent to the center portion is curved. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An integrated microphone device, comprising:
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a plate; a membrane disposed opposite to the plate and movable relative to the plate as acoustic pressure strikes the membrane, wherein the membrane has a vent hole configured to relieve stress on the membrane caused by acoustic pressure; and a vent valve formed in the membrane, having an open area that is variable in response to a change in acoustic pressure, wherein the vent valve has an opening and a plurality of deflection parts connected to a main body of the membrane, and each of the deflection parts is deflectable relative to the main body to change the open area of the opening, wherein the deflection parts comprise a first deflection part and a second deflection part with different sizes, and the first deflection part and the second deflection part each have a sharp-cone shape with a sharp end toward a center of the opening and an extending portion extending from the main body of the membrane to the sharp end, wherein the extending portion of the first deflection part has two parallel opposite edges, and the extending portion of the second deflection part has two non-parallel opposite edges. - View Dependent Claims (9, 10, 11, 13, 14, 15, 16, 17, 18, 19, 20)
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12. An integrated microphone device, comprising:
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a plate; a membrane disposed opposite to the plate and movable relative to the plate as acoustic pressure strikes the membrane; and a vent valve formed in the membrane, having an open area that is variable in response to a change in acoustic pressure, wherein the vent valve has an opening and a plurality of deflection parts connected to a main body of the membrane, and each of the deflection parts is deflectable relative to the main body to change the open area of the opening, wherein the opening includes a circular center portion and a plurality of channel portions extending radially from the center portion, and a width of the center portion is greater than that of each of the channel portions, wherein the deflection parts are disposed around the circular center portion and each of the channel portions is dispose between the two adjacent deflection parts, and one side of each of the deflection parts adjacent to the center portion is curved.
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Specification