Method to recess cobalt for gate metal application

• US 10,615,078 B2
• Filed: 08/30/2019
• Issued: 04/07/2020
• Est. Priority Date: 03/09/2017
• Status: Active Grant

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.), International Business Machines Corporation, Lam Research Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Jacobi, Georges, Kamineni, Vimal K., Knarr, Randolph F., Pranatharthiharan, Balasubramanian, Sankarapandian, Muthumanickam
• Primary Examiner(s): Pizarro, Marcos D.
• Assistant Examiner(s): Crite, Antonio B
• Application Number:
  US16/557,128
• Publication Number:
  US 20190385912A1
• Time in Patent Office: 221 Days
• CPC Class Codes: H01L 21/28088 the final conductor layer next to the insulator being a composite, e.g. TiN
• CPC Class Codes: H01L 21/28247 passivation or protection of the electrode, e.g. using re-oxidation
• CPC Class Codes: H01L 21/823456 gate conductors with different shapes, lengths or dimensions
• CPC Class Codes: H01L 21/823871 interconnection or wiring or contact manufacturing related aspects
• CPC Class Codes: H01L 29/401 Multistep manufacturing processes
• CPC Class Codes: H01L 29/4958 with a multiple layer structure
• CPC Class Codes: H01L 29/4966 the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2 H01L29/4908, H01L29/4983 take precedence
• CPC Class Codes: H01L 29/66545 using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate

Abstract

After forming a material stack including a gate dielectric, a work function metal and a cobalt gate electrode in a gate cavity formed by removing a sacrificial gate structure, the cobalt gate electrode is recessed by oxidizing the cobalt gate electrode to provide a cobalt oxide layer on a surface of the cobalt gate electrodes and removing the cobalt oxide layer from the surface of the cobalt gate electrodes by a chemical wet etch. The oxidation and oxide removal steps can be repeated until the cobalt gate electrode is recessed to any desired thickness. The work function metal can be recessed after the recessing of the cobalt gate electrode is completed or during the recessing of the cobalt gate electrode.

Claims

1. A method of forming a semiconductor structure comprising:

forming a gate structure over a semiconductor material portion, wherein the gate structure comprises, from bottom to top, a gate dielectric, a gate electrode and a gate cap;

forming a gate spacer on sidewalls of the gate structure;

forming a source/drain region on each side of the gate structure;

forming an interlevel dielectric (ILD) layer over each source/drain region and laterally surrounding the gate structure;

patterning the ILD layer to form a contact opening, wherein the contact opening extends through the ILD layer and physically exposes a surface of the source/drain regions and the gate structure, and the patterning the ILD layer also recesses the gate cap and gate spacer exposed by the contact opening;

forming a contact liner and a cobalt contact structure within the contact opening, wherein a portion of the contact liner and a portion of the cobalt contact structure are located above the recessed gate cap and recessed gate spacer;

recessing the cobalt contact conductor to provide a cobalt contact conductor portion overlying the source/drain regions, wherein the recessing the cobalt contact conductor is performed by repeating steps of oxidizing the cobalt contact conductor to form a cobalt oxide layer on a surface of the cobalt contact conductor and removing the cobalt oxide layer; and

recessing the contact liner to provide a contact liner portion contacting one of the source/drain regions.

2. The method of claim 1, wherein the cobalt contact conductor portion and the contact liner portion have topmost surfaces that are coplanar with each other and coplanar with a topmost surface of the recessed gate cap.

3. The method of claim 1, wherein the semiconductor material portion is a semiconductor fin, and the semiconductor fin is located on an insulator layer.

4. The method of claim 1, wherein the contact liner is composed of TiN or a stack of Ti/TiN.

5. The method of claim 1, wherein the contact liner and the contact liner portion are both U-shaped.

6. The method of claim 1, wherein the contact liner directly contacts a topmost surface of the source/drain region.

7. The method of claim 1, wherein the cobalt contact conductor is composed entirely of cobalt.

8. The method of claim 1, wherein the recessing of the contact liner is carried out using a H₂O₂ solution that is heated to a temperature above 70°

C.

9. The method of claim 1, wherein the recessing of the contact liner is carried out in an SC-1 solution containing a mixture of H₂O₂ and an ammonia-derived base, wherein the ammonia-derived base comprises NH₄OH or quaternary NH₄OH, and the H₂O₂ solution or the SC-1 solution is heated to a temperature above 70°

C.

10. The method of claim 1, wherein the oxidizing of the cobalt contact conductor comprises subjecting the cobalt contact conductor to an oxidation agent and the removing of the cobalt oxide layer comprises chemical wet etch.

11. The method of claim 10, wherein the oxidization agent comprises ozonated deionized water (DIO₃), a hydrogen peroxide (H₂O₂) solution, or an SC-1 solution containing a mixture of H₂O₂ and an ammonia-derived base, wherein the ammonia-derived base comprises NH₄OH or quaternary NH₄OH.

12. The method of claim 10, wherein the chemical wet etch comprises an acidic etching agent comprising one or more organic acids or inorganic acids.

13. The method of claim 10, wherein the chemical wet etch is performed under ambient for a period of time of about 1 minute.

14. The method of claim 10, wherein the chemical wet etch is performed under an oxygen environment having an oxygen concentration of less than 10,000 ppm.

15. The method of claim 10, wherein the chemical wet etch comprises HCl.

16. The method of claim 1, wherein the contact liner portion has a sidewall surface that directly contacts an entirety of a sidewall of the recessed gate spacer.

17. The method of claim 16, wherein the cobalt contact conductor portion and the contact liner portion have topmost surfaces that are coplanar with each other and coplanar with a topmost surface of the recessed gate spacer and a topmost surface of the recessed gate cap.