Nanosheet devices with different types of work function metals
First Claim
1. A semiconductor device comprising:
- a first stack comprising a first two or more nanowires, a first work function metal on the first two or more nanowires, and a second work function metal in direct contact with and on the first work function metal, wherein the first two or more nanowires are separated by the first work function metal; and
a second stack comprising a second two or more nanowires and the second work function metal, wherein the second two or more nanowires are separated by the second work function metal.
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Abstract
A technique relates to a semiconductor device. A first work function metal is in first stack and second stacks, each having nanowires separated by the first work function metal. A mask is on the first stack such that the first work function metal in the first stack is protected while the first work function metal in the second stack is exposed. The mask is undercut by removing a portion of first work function metal in first stack, leaving a gap. A plug is formed in the gap underneath the mask so as to protect the first work function metal in first stack. First work function metal in the second stack is removed, thereby removing the first work function metal from in between the nanowires of the second stack. The mask and plug are removed from first stack. A second work function metal is formed on first and second stacks.
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Citations
20 Claims
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1. A semiconductor device comprising:
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a first stack comprising a first two or more nanowires, a first work function metal on the first two or more nanowires, and a second work function metal in direct contact with and on the first work function metal, wherein the first two or more nanowires are separated by the first work function metal; and a second stack comprising a second two or more nanowires and the second work function metal, wherein the second two or more nanowires are separated by the second work function metal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification