Apparatus and methods for magnetic core inductors with biased permeability
First Claim
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1. A method of fabricating an inductor assembly, comprising:
- fabricating a magnetic core and an inductor coil that winds around the magnetic core on a first substrate, the magnetic core lying in a core plane, the inductor coil configured to generate an inductor magnetic field that passes through the magnetic core in a first direction parallel to the core plane;
providing relative movement between the first substrate and a second substrate having a bias coil disposed thereon such that the bias coil on the second substrate and the magnetic core on the first substrate are within range of one another; and
applying current in the bias coil to;
(i) generate a bias magnetic field that passes through the magnetic core in a second direction that is orthogonal to the first direction and (ii) generate heat to heat the magnetic core, to induce a permanent or semi-permanent orientation of anisotropy for the magnetic core.
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Abstract
Inductive elements comprising anisotropic media and biasing coils for magnetically biasing thereof and methods of manufacture and operation for use in applications such as microelectronics. Application of an electrical current through the bias coils generates a magnetic field that biases the magnetic material such that a desirable orientation of anisotropy is achieved throughout the magnetic core and enables modulation of the inductive response of the device. Electrical conductors coupled to interconnects are magnetically coupled to magnetic core layers to produce self and/or mutual inductors.
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Citations
12 Claims
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1. A method of fabricating an inductor assembly, comprising:
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fabricating a magnetic core and an inductor coil that winds around the magnetic core on a first substrate, the magnetic core lying in a core plane, the inductor coil configured to generate an inductor magnetic field that passes through the magnetic core in a first direction parallel to the core plane; providing relative movement between the first substrate and a second substrate having a bias coil disposed thereon such that the bias coil on the second substrate and the magnetic core on the first substrate are within range of one another; and applying current in the bias coil to;
(i) generate a bias magnetic field that passes through the magnetic core in a second direction that is orthogonal to the first direction and (ii) generate heat to heat the magnetic core, to induce a permanent or semi-permanent orientation of anisotropy for the magnetic core. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification