Semiconductor device and manufacturing method thereof

• US 10,629,627 B2
• Filed: 03/16/2017
• Issued: 04/21/2020
• Est. Priority Date: 09/04/2009
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Sakakura, Masayuki, Oikawa, Yoshiaki, Yamazaki, Shunpei, Sakata, Junichiro, Tsubuku, Masashi, Akimoto, Kengo, Hosoba, Miyuki
• Primary Examiner(s): Tran, Tan N
• Application Number:
  US15/460,652
• Publication Number:
  US 20170186774A1
• Time in Patent Office: 1,132 Days
• Field of Search: 257 43, 257 59, 257 72
• CPC Class Codes: G02F 1/134309 characterised by their geometrical arrangement
• CPC Class Codes: G02F 1/13454 Drivers integrated on the active matrix substrate G02F1/136277 takes precedence
• CPC Class Codes: G02F 1/1368 in which the switching element is a three-electrode device G02F1/136277 takes precedence
• CPC Class Codes: G02F 2202/10 semiconductor
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1255 integrated with passive devices, e.g. auxiliary capacitors

Abstract

The semiconductor device includes a driver circuit portion including a driver circuit and a pixel portion including a pixel. The pixel includes a gate electrode layer having a light-transimitting property, a gate insulating layer, a source electrode layer and a drain electrode layer each having a light-transmitting property provided over the gate insulating layer, an oxide semiconductor layer covering top surfaces and side surfaces of the source electrode layer and the drain electrode layer and provided over the gate electrode layer with the gate insulating layer therebetween, a conductive layer provided over part of the oxide semiconductor layer and having a lower resistance than the source electrode layer and the drain electrode layer, and an oxide insulating layer in contact with part of the oxide semiconductor layer.

Claims

1. A semiconductor device comprising:

a pixel portion comprising a pixel;

a terminal portion outside the pixel portion; and

a substrate,

wherein the pixel comprises a transistor and a pixel electrode electrically connected to the transistor,

wherein the transistor comprises;

a gate electrode over the substrate;

a first insulating layer over the gate electrode;

a first oxide semiconductor layer over the first insulating layer; and

a source electrode and a drain electrode each electrically connected to the first oxide semiconductor layer,

wherein the pixel electrode overlaps with the first oxide semiconductor layer, the source electrode, and the drain electrode with a second insulating layer interposed therebetween,

wherein the first oxide semiconductor layer comprises indium, gallium and zinc,

wherein the terminal portion comprises;

a first conductive layer over the substrate;

the first insulating layer over the first conductive layer;

a second conductive layer over the first insulating layer;

the second insulating layer over the second conductive layer; and

a third conductive layer over and in direct contact with the second insulating layer,

wherein the second conductive layer comprises a first region in which the second conductive layer overlaps with the first conductive layer with the first insulating layer interposed therebetween,

wherein the second conductive layer is in contact with the first conductive layer in a first opening of the first insulating layer,

wherein the third conductive layer comprises a second region in which the third conductive layer overlaps with the second conductive layer with the second insulating layer interposed therebetween,

wherein the third conductive layer is in contact with the second conductive layer in a second opening of the second insulating layer,

wherein the gate electrode and the first conductive layer comprise a first material, and

wherein the source electrode, the drain electrode and the second conductive layer comprise a second material.

2. The semiconductor device according to claim 1,

wherein the first opening and the second opening do not overlap with each other.

3. The semiconductor device according to claim 1,

wherein a liquid crystal layer is provided over the pixel electrode,

wherein an orientation of liquid crystal molecules in the liquid crystal layer is controlled by an electric field made by the pixel electrode and a first electrode, and

wherein the first electrode is provided in a same side of the liquid crystal layer as the pixel electrode.

4. The semiconductor device according to claim 1, further comprising a capacitor over the substrate.

5. The semiconductor device according to claim 1,

wherein the first conductive layer and the gate electrode are formed by processing a same film.

6. The semiconductor device according to claim 1, further comprising a driving circuit,

wherein the driving circuit comprises a second transistor comprising:

a second gate electrode over the substrate;

the first insulating layer over the second gate electrode;

a second oxide semiconductor layer over the first insulating layer; and

a second source electrode and a second drain electrode each electrically connected to the second oxide semiconductor layer,

wherein the second oxide semiconductor layer comprises indium, gallium and zinc.

7. A semiconductor device comprising:

a pixel portion comprising a pixel;

a terminal portion outside the pixel portion; and

a substrate,

wherein the pixel comprises a transistor and a pixel electrode electrically connected to the transistor,

wherein the transistor comprises;

a gate electrode over the substrate;

a first insulating layer over the gate electrode;

a first oxide semiconductor layer over the first insulating layer; and

a source electrode and a drain electrode each electrically connected to the first oxide semiconductor layer,

wherein the pixel electrode overlaps with the first oxide semiconductor layer, the source electrode, and the drain electrode with a second insulating layer interposed therebetween,

wherein the first oxide semiconductor layer comprises indium, gallium and zinc,

wherein the terminal portion comprises;

a first conductive layer over the substrate;

the first insulating layer over the first conductive layer;

a second conductive layer over the first insulating layer;

the second insulating layer over the second conductive layer; and

a third conductive layer over and in direct contact with the second insulating layer,

wherein the second conductive layer comprises a first region in which the second conductive layer overlaps with the first conductive layer with the first insulating layer interposed therebetween,

wherein the second conductive layer is in contact with the first conductive layer in a first opening of the first insulating layer,

wherein the third conductive layer comprises a second region in which the third conductive layer overlaps with the second conductive layer with the second insulating layer interposed therebetween,

wherein the third conductive layer is in contact with the second conductive layer in a second opening of the second insulating layer,

wherein the gate electrode and the first conductive layer comprise a first material, and

wherein the source electrode, the drain electrode and the second conductive layer comprise indium and zinc.

8. The semiconductor device according to claim 7,

wherein the first opening and the second opening do not overlap with each other.

9. The semiconductor device according to claim 7,

wherein a liquid crystal layer is provided over the pixel electrode,

wherein an orientation of liquid crystal molecules in the liquid crystal layer is controlled by an electric field made by the pixel electrode and a first electrode, and

wherein the first electrode is provided in a same side of the liquid crystal layer as the pixel electrode.

10. The semiconductor device according to claim 7, further comprising a capacitor over the substrate.

11. A display device comprising:

the semiconductor device according to claim 7; and

a speaker.

12. The semiconductor device according to claim 7,

wherein the first conductive layer and the gate electrode are formed by processing a same film.

13. The semiconductor device according to claim 7, further comprising a driving circuit,

wherein the driving circuit comprises a second transistor comprising:

a second gate electrode over the substrate;

the first insulating layer over the second gate electrode;

a second oxide semiconductor layer over the first insulating layer; and

a second source electrode and a second drain electrode each electrically connected to the second oxide semiconductor layer,

wherein the second oxide semiconductor layer comprises indium, gallium and zinc.