Ultra-wideband light emitting diode and optical detector comprising indium gallium arsenide phosphide and method of fabricating the same

• US 10,629,775 B2
• Filed: 03/22/2019
• Issued: 04/21/2020
• Est. Priority Date: 02/09/2016
• Status: Active Grant

• Current Assignee: Lumeova, Inc.
• Original Assignee: Lumeova, Inc.
• Inventors: Khatibzadeh, Mohammad Ali, Goswami, Arunesh
• Primary Examiner(s): Lee, Cheung
• Application Number:
  US16/362,480
• Publication Number:
  US 20190221711A1
• Time in Patent Office: 396 Days
• CPC Class Codes: H01L 25/167 comprising optoelectronic devices, e.g. LED, photodiodes
• CPC Class Codes: H01L 27/156 two-dimensional arrays
• CPC Class Codes: H01L 31/167 the light sources and the devices sensitive to radiation all being semiconductor devices characterised by potential barriers
• CPC Class Codes: H01L 33/0025 comprising only AIIIBV compounds
• CPC Class Codes: H01L 33/04 with a quantum effect structure or superlattice, e.g. tunnel junction
• CPC Class Codes: H01L 33/06 within the light emitting region, e.g. quantum confinement structure or tunnel barrier
• CPC Class Codes: H01L 33/14 with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
• CPC Class Codes: H01L 33/145 with a current-blocking structure
• CPC Class Codes: H01L 33/28 containing only elements of Group II and Group VI of the Periodic Table
• CPC Class Codes: H01L 33/30 containing only elements of Group III and Group V of the Periodic Table
• CPC Class Codes: H04B 10/11 Arrangements specific to free-space transmission, i.e. transmission through air or vacuum
• CPC Class Codes: H04B 10/1143 Bidirectional transmission
• CPC Class Codes: H04B 10/1149 Arrangements for indoor wireless networking of information
• CPC Class Codes: H04B 10/116 Visible light communication
• CPC Class Codes: H04B 10/40 Transceivers
• CPC Class Codes: H04B 10/502 LED transmitters
• CPC Class Codes: H04B 10/60 Receivers
• CPC Class Codes: H04H 20/71 Wireless systems

Abstract

Devices, systems, and methods for providing wireless personal area networks (PANs) and local area networks (LANs) using visible and near-visible optical spectrum. Various constructions and material selections are provided herein. According to one embodiment, a light-emitting diode (LED) includes a substrate, a carrier confinement (CC) region positioned over the substrate, and an active region positioned over the CC region. The CC region includes a first CC layer that is a wideband gap CC layer including indium gallium phosphide or aluminum gallium arsenide. The CC region includes a second CC layer positioned over the first CC layer. The second CC layer is a wideband gap CC layer that includes indium gallium phosphide or aluminum gallium arsenide. The active region is configured to have a transient response time of less than 500 picoseconds (ps).

Claims

1. An optical source comprising:

a substrate;

a carrier confinement (CC) region positioned over the substrate, the CC region defining;

a first CC layer that is a wideband gap CC layer comprising at least one of indium gallium phosphide, aluminum gallium arsenide, and gallium arsenide phosphide;

a second CC layer positioned over the first CC layer, the second CC layer is a wideband gap CC layer comprising at least one of indium gallium phosphide and aluminum gallium arsenide;

and

an active region positioned over the CC region, wherein;

the active region comprises indium gallium arsenide;

the active region has an indium composition between 10% and 35%; and

the active region is configured to have a transient response time of less than 500 picoseconds (ps).

2. The optical source of claim 1, wherein the active region is at least one of a quantum well structure and a multi quantum well structure.

3. The optical source of claim 2, wherein the active region has a thickness between 50 and 150 angstroms for each quantum well.

4. The optical source of claim 3, further comprising a first barrier layer positioned between the CC region and the active region, wherein the first barrier layer has a phosphorous composition between 25% and 80%.

5. The optical source of claim 4, wherein the first barrier layer has a thickness between 25 and 75 angstroms.

6. The optical source of claim 5, further comprising a second barrier layer positioned over the active region, wherein the second barrier layer has a phosphorous composition between 40% and 50%.

7. The optical source of claim 6, wherein the second barrier layer has a thickness between 30 and 40 angstroms.

8. The optical source of claim 7, further comprising:

an n-type contact layer positioned between the substrate and the CC region; and

a p-type contact layer positioned over the second barrier layer.

9. The optical source of claim 8, wherein the first CC layer has an aluminium composition between 25% and 45%.

10. The optical source of claim 8, wherein the first CC layer has an indium composition between 45% and 55%, and the second CC layer has a phosphorous composition between 25% and 80%.

11. The optical source of claim 10, wherein the first CC layer has a thickness between 100 and 2000 angstroms and the second CC layer has a thickness between 25 and 75 angstroms.

12. The optical source of claim 10, wherein the CC region further defines:

a third CC layer positioned over the second CC layer, the third CC layer comprising indium gallium phosphide; and

a fourth CC layer positioned over the third CC layer, the fourth CC layer comprising gallium arsenide phosphide.

13. The optical source of claim 12, wherein the third CC layer has an indium composition between 45% and 55%, and the fourth CC layer has a phosphorous composition between 25% and 80%.

14. The optical source of claim 13, wherein the first CC layer, the second CC layer, the third CC layer, and the fourth CC layer each have a thickness between 25 and 75 angstroms.

15. The optical source of claim 12, wherein the CC region further defines:

a fifth CC layer positioned over the fourth CC layer, the fifth CC layer comprising indium gallium phosphide; and

a sixth CC layer positioned over the fifth CC layer, the sixth CC layer comprising gallium arsenide phosphide.

16. The optical source of claim 15, wherein:

the third CC layer and the fifth CC layer each have an indium composition between 45% and 55%; and

the fourth CC layer and the sixth CC layer each have a phosphorous composition between 25% and 80%.

17. The optical source of claim 16, wherein the first CC layer, the second CC layer, the third CC layer, the fourth CC layer, the fifth CC layer, and the sixth CC layer each have a thickness between 25 and 75 angstroms.

18. The optical source of claim 17, wherein:

the n-type contact layer and the p-type contact layer each comprise gallium arsenide;

the n-type contact layer has a thickness between 5000 and 20000 angstroms; and

the p-type contact layer has a thickness between 500 and 5000 angstroms.

19. The optical source of claim 1, wherein the optical source is implemented in a flip-chip package.

20. The optical source of claim 1, wherein the optical source is implemented within an optical transceiver and the optical transceiver further comprises an optical detector.

21. The optical source of claim 1, wherein:

the optical source is configured to transmit at a first wavelength;

the optical source is a first optical source within an array of optical sources; and

a second optical source within the array of optical sources is configured to operate at a second wavelength.

22. The optical source of claim 21, wherein:

the array of optical sources is implemented within an optical transceiver;

the optical transceiver further comprises an array of optical detectors;

a first optical detector within the array of optical detectors is configured to receive at the first wavelength; and

a second optical detector within the array of optical detectors is configured to receive at the second wavelength.

23. The optical source of claim 22, wherein the optical source is implemented in a flip-chip package.

24. The optical source of claim 22, wherein the first optical detector and the second optical detector are implemented within a first epitaxial structure.

25. The optical source of claim 21, wherein the optical source is implemented in a flip-chip package.

26. The optical source of claim 1, wherein the optical source is configured for variable wavelength modulation.

27. The optical source of claim 26, wherein the optical source is implemented in a flip-chip package.

28. The optical source of claim 1, wherein the optical source is implemented within an epitaxial structure and the epitaxial structure further comprises an optical detector.

29. The optical source of claim 1 further comprising an electron blocking layer (EBL) positioned over the active region, wherein the EBL is a wide band gap EBL comprising aluminum gallium arsenide.

30. The optical source of claim 29, wherein the electron blocking layer has an aluminium composition between 25% and 45%.

31. The optical source of claim 1, wherein the optical source is a light-emitting-diode (LED).

32. A method of forming an optical source, comprising:

providing an epitaxial structure on a substrate, the epitaxial structure comprising;

a carrier confinement (CC) region positioned over the substrate, the CC region defining;

a first CC layer that is a wideband gap CC layer comprising at least one of indium gallium phosphide and aluminum gallium arsenide; and

a second CC layer positioned on the first CC layer, the second CC layer is a wideband gap CC layer comprising at least one of indium gallium phosphide, aluminum gallium arsenide, and gallium arsenide phosphide;

and

an active region over the CC region, wherein;

the active region comprises indium gallium arsenide;

the active region has an indium composition between 10% and 35%; and

the active region is configured to have a transient response time of less than 500 picoseconds (ps).