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High charge rate, large capacity, solid-state battery

  • US 10,629,957 B2
  • Filed: 11/20/2017
  • Issued: 04/21/2020
  • Est. Priority Date: 04/06/2017
  • Status: Active Grant
First Claim
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1. A solid-state battery structure comprising:

  • a material stack consisting of a plurality of alternating semiconductor material layers and dielectric material layers stacked one atop the other, wherein each semiconductor material layer has one of dielectric material layers located directly thereon and each dielectric material layer includes a solid-state thin-film battery located entirely therein, each solid-state thin-film battery comprises at least a bottom electrode, a cathode, a solid-state electrolyte, and a top electrode, and each dielectric material layer has a topmost surface that is coplanar with a topmost surface of the top electrode that is present in the dielectric material layer;

    a first via-filled contact structure entirely passing through each bottom electrode and interconnecting each bottom electrode together; and

    a second via-filled contact structure entirely passing through each top electrode and interconnecting each top electrode together, wherein the first via-filled contact structure has a topmost surface that is coplanar with a topmost surface of the second via-filled contact structure and a bottommost surface that directly contacts a topmost surface of the bottommost semiconductor material layer of the material stack, and wherein the topmost surface of the second via-filled contact structure is coplanar with the topmost surface of the top electrode that is present in the topmost dielectric material layer of the material stack.

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