Inductively coupled pulsed RF voltage multiplier

• US 10,631,395 B2
• Filed: 01/22/2019
• Issued: 04/21/2020
• Est. Priority Date: 01/22/2018
• Status: Active Grant

• Current Assignee: Transient Plasma Systems, Inc.
• Original Assignee: Transient Plasma Systems, Inc.
• Inventors: Sanders, Jason M., Thomas, Mark
• Primary Examiner(s): Luu, An T
• Application Number:
  US16/254,140
• Publication Number:
  US 20190230779A1
• Time in Patent Office: 455 Days
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32146 Amplitude modulation, includes pulsing
• CPC Class Codes: H01J 37/32174 Circuits specially adapted for controlling the RF discharge
• CPC Class Codes: H03K 3/53 by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback H03K3/335 takes precedence
• CPC Class Codes: H03K 3/57 the switching device being a semiconductor device
• CPC Class Codes: H03K 5/02 by amplifying H03K5/04 takes precedence
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 1/4652 using inductive coupling means, e.g. coils
• CPC Class Codes: H05H 2242/26 Matching networks

Abstract

Systems and methods for increasing the RF power switched into a resonant load by achieving voltage multiplication by means of coupled inductors are provided herein. In one approach, the RF electromagnetic wave achieved by voltage multiplication is used to drive a diode opening switch in order to create a fast rising, unipolar electrical pulse.

Claims

1. A method for generating a pulsed radio frequency (RF) waveform, comprising:

voltage multiplying a DC charging voltage by;

supplying the DC charging voltage to respective capacitors of a plurality of switching stages that are electrically coupled to one another in parallel, each of the switching stages including a switching stage capacitor, a switching stage inductor, and a switch; and

discharging the capacitors by concurrently switching the switches of each of the plurality of switching stages from an electrically non-conducting state to an electrically conducting state; and

inductively coupling each of the plurality of switching stages to a resonant circuit through a plurality of transformers, each of the transformers having a primary winding electrically coupled to a respective switching stage and a secondary winding electrically coupled in series to one another and to the resonant circuit,

wherein the resonant circuit includes an inductor and a capacitor electrically coupled in series to the secondary windings of the transformers.

2. The method of claim 1 wherein each of the transformers have a same number of turns on the primary winding and the secondary winding to achieve a 1:

1 transformation ratio.

3. The method of claim 1 wherein each of the transformers have an unequal number of turns on the primary winding and the secondary winding to achieve a 1:

n transformation ratio.

4. The method of claim 1 wherein each of the transformers includes two or more windings on a magnetic material.

5. The method of claim 4 wherein the magnetic material includes at least one of:

nanocrystalline ribbon, ferrite, iron powder, crystalline magnetic material, and amorphous magnetic material.

6. The method of claim 1 wherein the transformers are air core transformers and each transformer includes two or more windings on a non-magnetic structure.

7. The method of claim 1 wherein the resonant circuit includes a leakage inductance due to uncoupled magnetic fields of the secondary windings of the transformers, and a value of the leakage inductance is tuned with the resonant circuit.

8. The method of claim 1, further comprising:

converting the DC charging voltage from a uniform DC voltage stored in the switching stage capacitors to a radio frequency (RF) voltage by the concurrently switching the switches of each of the plurality of switching stages from the electrically non-conducting state to the electrically conducting state.

9. The method of claim 1 wherein each of the switches of the switching stages includes a plurality of switching elements electrically coupled to one another in parallel, series, or series-parallel to increase an effective voltage and a current rating of each of the switches.

10. The method of claim 1 wherein the switches include at least one of:

field effect transistors, insulated gate bipolar transistors, thyristors, silicon controlled thyristors, bipolar junction transistors, photo conductive solid state switches, thyratrons, spark gaps, or any solid state, avalanche, optically triggered or gas discharge switches.

11. A method for generating a pulsed radio frequency (RF) waveform, the method comprising:

voltage multiplying a DC charging voltage by;

supplying the DC charging voltage to respective capacitors of a plurality of switching stages that are electrically coupled to one another in parallel, each of the switching stages including a switching stage capacitor, a switching stage inductor, and a switch; and

discharging the capacitors by concurrently switching the switches of each of the plurality of switching stages from an electrically non-conducting state to an electrically conducting state; and

inductively coupling each of the plurality of switching stages to a resonant circuit through a plurality of transformers, each of the transformers having a primary winding electrically coupled to a respective switching stage and a secondary winding electrically coupled in series to one another and to the resonant circuit,

generating a pulsed RF waveform by the inductively coupling each of the plurality of switching stages to the resonant circuit through the plurality of transformers; and

driving an opening switch with the pulsed RF waveform to convert RF energy of the pulsed RF waveform into a unipolar pulse.

12. The method of claim 11 wherein the opening switch includes at least one of a diode or an array of diodes.

13. The method of claim 11 wherein a natural frequency of the pulsed RF waveform that drives the diode opening switch is between 100 kHz, inclusive, and 10 MHz, inclusive, and an equivalent resonant impedance of the resonant circuit is between 0.1Ω

, inclusive, and 1,000Ω

, inclusive.

14. An inductively coupled pulsed radio frequency (RF) voltage multiplier circuit, comprising:

a plurality of switching circuits coupled to one another in parallel, each of the switching circuits including;

a switching circuit capacitor,

a switching circuit inductor, and

a switch;

a plurality of transformers, each of the transformers having a respective primary winding electrically coupled to a respective one of the switching circuits; and

a resonant circuit inductively coupled to the plurality of switching circuits through secondary windings of each of the plurality of transformers, the secondary windings of the plurality of transformers being electrically coupled to one another in series,

wherein the resonant circuit includes an inductor and a capacitor electrically coupled in series to the secondary windings of the plurality of transformers.

15. The pulsed RF voltage multiplier circuit of claim 14 wherein the resonant circuit includes an inductance and a capacitor electrically coupled in series to the secondary windings of the plurality of transformers, the inductance including a leakage inductance due to uncoupled magnetic fields of the secondary windings of the transformers.

16. The pulsed RF voltage multiplier circuit of claim 15, further comprising a load, wherein the diode opening switch is configured to deliver a RF voltage pulse to the load.

17. The pulsed RF voltage multiplier circuit of claim 14, further comprising a control circuit that selectively controls the switches of each of the plurality of switching circuits to concurrently switch from an electrically non-conducting state to an electrically conducting state.

18. The pulsed RF voltage multiplier circuit of claim 14, further comprising a diode opening switch electrically coupled to the resonant circuit.