Split slit liner door

• US 10,636,629 B2
• Filed: 10/05/2017
• Issued: 04/28/2020
• Est. Priority Date: 10/05/2017
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Noorbakhsh, Hamid, Wakabayashi, Reyn
• Primary Examiner(s): Zervigon, Rudy
• Application Number:
  US15/726,139
• Publication Number:
  US 20190108983A1
• Time in Patent Office: 936 Days
• Field of Search: 118719, 15634522
• CPC Class Codes: E05D 15/56 with successive different movements raising wings before being turned E05F7/02
• CPC Class Codes: E05Y 2201/626 Levers
• CPC Class Codes: E05Y 2900/602 for containers
• CPC Class Codes: E06B 3/4645 with the sliding wing flush closing or moving a considerable distance towards the opening when closing
• CPC Class Codes: E06B 3/50 with more than one kind of movement E06B3/48 takes precedenceE06B3/92 takes precedence
• CPC Class Codes: E06B 5/00 Doors, windows, or like closures for special purposes insulated compound frames specially adapted for sliding doors or windows E06B3/26347; Border constructions therefor
• CPC Class Codes: E06B 7/23 Plastic, sponge rubber, or like strips or tubes
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32513 Sealing means, e.g. sealing between different parts of the vessel
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28

Abstract

Embodiments disclosed herein generally relate to a substrate processing chamber component assembly with a split slit liner door assembly. In one embodiment, the split slit liner door assembly has a first door portion having a top surface, a rear face and a font face, a RF conductive gasket is disposed on the front face of the first door portion, a second door portion having sides, a bottom and a front surface, the bottom coupled to the actuator, and a linkage assembly coupling the first door portion to the second door portion wherein the linkage assembly is configured to translate a vertical motion of the second door portion relative to a first door portion and a horizontal motion spacing the first door portion from the second door portion.

Claims

1. A split slit liner door assembly, comprising:

a first door portion having a top surface, a rear face and a front face;

a RF conductive gasket disposed on the front face of the first door portion;

a second door portion;

a linkage assembly connecting coupling the first door portion to the second door portion, wherein the linkage assembly is configured to translate a vertical motion of the second door portion relative to the first door portion into a horizontal motion of the first door portion relative to the second door portion spacing the first door portion from the second door portion; and

an actuator configured to provide vertical movement of the second door portion, the actuator connected to the second door portion.

2. The split slit liner door assembly of claim 1 further comprising:

a bumper disposed on the top surface.

3. The split slit liner door assembly of claim 1 wherein the linkage assembly further comprises:

a tension spring linkage biasing the first door portion to the second door portion.

4. The split slit liner door assembly of claim 3 wherein the linkage assembly further comprises:

an oblong hole formed in one end of a linkage of the linkage assembly connecting the first door portion to the second door portion; and

a compression bias spring disposed over the linkage biasing the first door portion away from the second door portion.

5. The split slit liner door assembly of claim 4 wherein the linkage is connected at a first end to the first door portion and at a second end to the second door portion, and wherein the first end travels in an arc when the horizontal motion spaces the first door portion from the second door portion.

6. The split slit liner door assembly of claim 1 wherein the RF conductive gasket is formed from yttria.

7. The split slit liner door assembly of claim 6 further comprising:

a seal formed from PTFE.

8. A semiconductor processing chamber comprising:

a chamber body;

a lid assembly disposed atop the chamber body, wherein a processing volume is formed within an area bounded by the lid assembly and the chamber body;

a electrostatic chuck disposed in the processing volume;

a liner surrounding the electrostatic chuck and disposed with the processing volume;

an opening formed through the chamber body and the liner; and

a split slit liner door assembly, comprising;

a first door portion having a top surface, a rear face and a front face;

a RF conductive gasket is disposed on the front face of the first door portion;

a second door portion;

a linkage assembly connecting the first door portion to the second door portion, wherein the linkage assembly is configured to translate a vertical motion of the second door portion relative to the first door portion into a horizontal motion of the first door portion relative to the second door portion spacing the first door portion from the second door portion; and

an actuator configured to provide vertical movement of the second door portion, the actuator connected to the second door portion.

9. The semiconductor processing chamber of claim 8 further comprising:

a bumper is disposed on the top surface.

10. The semiconductor processing chamber of claim 8 wherein the linkage assembly further comprises:

a tension spring linkage biasing the first door portion to the second door portion.

11. The semiconductor processing chamber of claim 10 wherein the linkage assembly further comprises:

an oblong hole formed in one end of a linkage of the linkage assembly connecting the first door portion to the second door portion; and

a compression bias spring disposed over the linkage biasing the first door portion away from the second door portion and against the liner.

12. The semiconductor processing chamber of claim 11 wherein the linkage is connected at a first end to the first door portion and at a second end to the second door portion, and wherein the first end travels in an arc when the horizontal motion spaces the first door portion from the second door portion.

13. The semiconductor processing chamber of claim 8 wherein the RF conductive gasket is formed from yttria.

14. The semiconductor processing chamber of claim 13 further comprising:

a seal formed from PTFE.

15. An apparatus comprising:

split slit liner door assembly

a first door portion having a top surface, a rear face, and a front face;

a RF conductive gasket disposed on the front face of the first door portion;

a second door portion having opposing lateral sides;

a linkage assembly comprising a first linkage sub-assembly and a second linkage sub-assembly, the first linkage sub-assembly and the second linkage sub-assembly being connected to the second door portion on respective ones of the opposing lateral sides, the first linkage sub-assembly and the second linkage sub-assembly further being connected to the first door portion, wherein the linkage assembly is configured to translate a vertical motion of the second door portion relative to the first door portion into a horizontal motion of the first door portion relative to the second door portion spacing the first door portion from the second door portion; and

an actuator configured to provide vertical movement of the second door portion, the actuator connected to the second door portion.

16. The apparatus of claim 15, wherein each of the first linkage sub-assembly and the second linkage sub-assembly includes:

a first linkage having a first opening and a second opening, a first support of the first door portion being inserted through the first opening, a second support of the second door portion being inserted through the second opening, the second opening being oblong-shaped;

a first compression spring disposed on the first linkage between the first opening and the second opening, the first compression spring biasing the first support away from the second support;

a second linkage having a third opening and a fourth opening, a third support of the first door portion being inserted through the third opening, a fourth support of the second door portion being inserted through the fourth opening, the fourth opening being oblong-shaped;

a second compression spring disposed on the second linkage between the third opening and the fourth opening, the second compression spring biasing the third support away from the fourth support; and

a tension linkage connected to the first door portion and the second door portion; and

a tension spring connected to the tension linkage and configured with the tension linkage to bias the first door portion towards the second door portion.

17. The apparatus of claim 15 further comprising a bumper disposed on the top surface of the first door portion.

18. The apparatus of claim 15, wherein each of the first linkage sub-assembly and the second linkage sub-assembly is configured to travel in an arc when the horizontal motion spaces the first door portion from the second door portion.

19. The apparatus of claim 15, wherein the RF conductive gasket is formed from yttria.

20. The apparatus of claim 15 further comprising a seal disposed on the front face of the first door portion, the RF conductive gasket being disposed around the seal on the front face of the first door portion, the seal being formed from PTFE.