Substrate processing apparatus and standby method for ejection head
First Claim
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1. A standby method for an ejection head, said standby method being a method of placing said ejection head of a substrate processing apparatus on standby, said ejection head being disposed inside a cup part and above a substrate holding part surrounded by said cup part and being configured to eject a processing liquid from an outlet provided in an ejection surface toward a substrate held by said substrate holding part,said standby method comprising:
- a) moving said ejection head from a position inside said cup part to a position outside said cup part;
b) causing relative movement of said ejection head and a reservoir in which an immersion liquid is retained, in a direction that said ejection head and said reservoir become closer to each other, and causing said ejection surface of said ejection head to be immersed in said immersion liquid;
c) separating said ejection surface from said immersion liquid either by discharging said immersion liquid from said reservoir or by causing relative movement of said ejection head and said reservoir in a direction that said ejection head and said reservoir become away from each other;
d) removing said immersion liquid that remains on said ejection surface; and
e) moving said ejection head to a position inside said cup part, whereinsaid ejection head includes;
a head body part having an outer surface, part of which is said ejection surface, and for holding said processing liquid therein; and
a piezoelectric element attached to said head body part and for vibrating said processing liquid held in said head body part to cause the ejection of said processing liquid from said outlet, andsaid operation b) includes driving said piezoelectric element to vibrate said immersion liquid retained in said reservoir in a state where said ejection surface is immersed in said immersion liquid in said operation b),the standby method further comprises, after said operation b) and before said operation c), f) continuously or intermittently ejecting from said outlet into the immersion liquid, said processing liquid supplied from a processing liquid supply source to said ejection head, in a state where said ejection surface is immersed in said immersion liquid, andthe ejection of said processing liquid from said outlet is stopped before said operation c).
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Abstract
In a substrate processing apparatus, an ejection surface of an ejection head located at a standby position is immersed in an immersion liquid retained in a reservoir during standby of the ejection head. This prevents drying of a plurality of outlets provided in the ejection head and drying of processing liquid flow passages that communicate with the outlets. It is thus possible to suppress or prevent clogging of the fine outlets. When the ejection head resumes processing on a substrate, the immersion liquid in the reservoir is discharged and then a liquid removing part removes the immersion liquid adhering to the ejection surface. Accordingly, it is possible to prevent the immersion liquid remaining on the ejection surface from dropping and adhering to the substrate (so-called “liquid dripping”) when, for example, the ejection head is moved to a position above the substrate.
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Citations
14 Claims
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1. A standby method for an ejection head, said standby method being a method of placing said ejection head of a substrate processing apparatus on standby, said ejection head being disposed inside a cup part and above a substrate holding part surrounded by said cup part and being configured to eject a processing liquid from an outlet provided in an ejection surface toward a substrate held by said substrate holding part,
said standby method comprising: -
a) moving said ejection head from a position inside said cup part to a position outside said cup part; b) causing relative movement of said ejection head and a reservoir in which an immersion liquid is retained, in a direction that said ejection head and said reservoir become closer to each other, and causing said ejection surface of said ejection head to be immersed in said immersion liquid; c) separating said ejection surface from said immersion liquid either by discharging said immersion liquid from said reservoir or by causing relative movement of said ejection head and said reservoir in a direction that said ejection head and said reservoir become away from each other; d) removing said immersion liquid that remains on said ejection surface; and e) moving said ejection head to a position inside said cup part, wherein said ejection head includes; a head body part having an outer surface, part of which is said ejection surface, and for holding said processing liquid therein; and a piezoelectric element attached to said head body part and for vibrating said processing liquid held in said head body part to cause the ejection of said processing liquid from said outlet, and said operation b) includes driving said piezoelectric element to vibrate said immersion liquid retained in said reservoir in a state where said ejection surface is immersed in said immersion liquid in said operation b), the standby method further comprises, after said operation b) and before said operation c), f) continuously or intermittently ejecting from said outlet into the immersion liquid, said processing liquid supplied from a processing liquid supply source to said ejection head, in a state where said ejection surface is immersed in said immersion liquid, and the ejection of said processing liquid from said outlet is stopped before said operation c). - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A standby method for an ejection head, said standby method being a method of placing said ejection head of a substrate processing apparatus on standby, said ejection head being disposed inside a cup part and above a substrate holding part surrounded by said cup part and being configured to eject a processing liquid from a plurality of outlets provided in an ejection surface toward a substrate held by said substrate holding part,
said standby method comprising: -
a) moving said ejection head from a position inside said cup part to a position outside said cup part; b) causing relative movement of said ejection head and a reservoir in which an immersion liquid is retained, in a direction that said ejection head and said reservoir become closer to each other, and causing said ejection surface of said ejection head to be immersed in said immersion liquid; c) separating said ejection surface from said immersion liquid by discharging said immersion liquid from said reservoir; d) removing said immersion liquid that remains on said ejection surface by emitting gas toward said ejection head inside said reservoir after said operation c); and e) moving said ejection head to a position inside said cup part, wherein said standby method further comprises, after said operation b) and before said operation c), f) continuously or intermittently ejecting said processing liquid from said plurality of outlets into the immersion liquid, in a state where said ejection surface is immersed in said immersion liquid, and the ejection of said processing liquid from said plurality of outlets is stopped before said operation c). - View Dependent Claims (9, 10, 11, 12, 13, 14)
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Specification
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Current AssigneeSCREEN Holdings Co., Ltd.
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Original AssigneeSCREEN Holdings Co., Ltd.
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InventorsSotoku, Kota, Yashiki, Hiroyuki, Sato, Masanobu
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Primary Examiner(s)Blan, Nicole
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Application NumberUS16/056,387Publication NumberTime in Patent Office638 DaysField of SearchNoneUS Class CurrentCPC Class CodesB05B 15/555 discharged by cleaning nozzlesH01L 21/02052 Wet cleaning only H01L21/02...H01L 21/67051 using mainly spraying means...
