Vibration device
First Claim
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1. A vibration device comprising:
- an elastic plate including a first elastic plate section having a leading end portion, a second elastic plate section opposed and spaced from the first elastic plate section, and a joining section connecting the first elastic plate section and the second elastic plate section;
a piezoelectric vibration element on the first elastic plate section and between the first elastic plate section and the second elastic plate section;
a circuit that drives the piezoelectric vibration element on the second elastic plate section and between the first elastic plate section and the second elastic plate section;
a mass addition member attached to the leading end portion of the first elastic plate section; and
a package accommodating the elastic plate.
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Abstract
A vibration device that includes an elastic plate having a first elastic plate section, a second elastic plate section opposing the first elastic plate section, and a curvature joining section connecting the first and second elastic plate sections; a piezoelectric vibration element is provided on a surface of the first elastic plate section; and a circuit is provided on the second elastic plate section. A mass addition member is attached to a leading end portion of the first elastic plate section, and the elastic plate is accommodated in a package member.
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Citations
19 Claims
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1. A vibration device comprising:
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an elastic plate including a first elastic plate section having a leading end portion, a second elastic plate section opposed and spaced from the first elastic plate section, and a joining section connecting the first elastic plate section and the second elastic plate section; a piezoelectric vibration element on the first elastic plate section and between the first elastic plate section and the second elastic plate section; a circuit that drives the piezoelectric vibration element on the second elastic plate section and between the first elastic plate section and the second elastic plate section; a mass addition member attached to the leading end portion of the first elastic plate section; and a package accommodating the elastic plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification